The fused quartz vacuum suction plate is a precision quartz component designed for wafer handling, s

ubstrate positioning, vacuum adsorption, and semiconductor processing equipment.

Manufactured from high-purity fused quartz, the plate features a large circular body with custom-designed quartz ports and connection openings. Its excellent thermal stability, chemical resistance, low contamination characteristics, and dimensional accuracy make it suitable for demanding semiconductor, photovoltaic, optical, and laboratory applications.

The diameter, thickness, port quantity, port position, opening size, surface finish, and connection structure can all be customized according to equipment drawings and operating requirements.

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Основные характеристики

Плавленой кварц высокой чистоты

Manufactured from high-quality fused silica with low metallic impurity content, helping reduce contamination during wafer and substrate processing.

Превосходная термическая стабильность

The low coefficient of thermal expansion allows the quartz suction plate to maintain dimensional stability during temperature changes.

Strong Chemical Resistance

Quartz offers excellent resistance to most acids and process chemicals, making it suitable for wet processing, cleaning, etching, and other corrosive environments.

Precision Vacuum Connections

The suction plate can be manufactured with multiple quartz ports, vacuum interfaces, gas connections, or liquid transfer openings according to the equipment design.

Smooth and Uniform Surface

Precision grinding, polishing, fire polishing, and surface cleaning processes are available to improve flatness, sealing performance, and product cleanliness.

Custom Manufacturing

Each quartz suction plate can be produced according to customer drawings, samples, equipment dimensions, and application conditions.

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Технические характеристики продукта

Specific tolerances, maximum dimensions, operating pressure, and working temperature should be confirmed according to the customer’s drawing and application.

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Типовые применения

• Semiconductor wafer handling equipment
• Wafer vacuum adsorption and positioning
• Quartz process chambers and reaction systems
• Wet benches and chemical processing equipment
• Solar wafer and photovoltaic substrate processing
• Glass substrate handling systems
• Optical component positioning
• Laboratory vacuum systems
• High-purity chemical equipment
• Customized semiconductor quartz assemblies

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Производственные возможности

We provide integrated quartz processing services, including:

• Large-diameter quartz plate fabrication
• Precision CNC machining
• Quartz drilling and opening
• Quartz tube and port welding
• Quartz flange fabrication
• Surface grinding and polishing
• Edge chamfering and rounding
• Высокотемпературный отжиг
• Ультразвуковая очистка
• Dimensional and visual inspection

Complex port layouts and welded quartz structures can be manufactured according to technical drawings.

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Advantages of Quartz Vacuum Suction Plates

Compared with metal, plastic, or ordinary glass components, fused quartz provides several advantages in semiconductor environments:

• Lower particle and metal contamination risk
• Better resistance to high temperatures
• Excellent chemical durability
• Stable dimensions during temperature fluctuations
• Suitable for cleanroom and high-purity processing
• Transparent or translucent structure for process observation
• Long service life under appropriate operating conditions

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Customization Information Required

To provide an accurate quotation, please send the following information:

1. Overall diameter and thickness
2. Main opening diameter and height
3. Number, diameter, and position of small ports
4. Port or flange connection dimensions
5. Surface finish requirements
6. Flatness and dimensional tolerances
7. Working temperature and operating environment
8. Vacuum or pressure conditions
9. Required quantity
10. Technical drawing, sample, or equipment photo

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Quality Control

Each quartz suction plate can be inspected for:

• Overall diameter and thickness
• Opening and port dimensions
• Port position accuracy
• Surface condition
• Плоскость
• Weld integrity
• Edge condition
• Visual defects
• Cleanliness
• Packaging protection

Products are individually protected with foam or customized packaging to reduce the risk of scratching, impact, and breakage during transportation.

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ЧАСТО ЗАДАВАЕМЫЕ ВОПРОСЫ

1. Can the diameter and port positions be customized?

Yes. The plate diameter, thickness, opening size, port quantity, port diameter, and port position can all be manufactured according to customer drawings.

2. Can you manufacture the quartz suction plate from a sample?

Yes. We can evaluate and reproduce the component based on a physical sample, but a dimensional drawing is recommended for better accuracy.

3. Can the surface be polished?

Yes. Ground, matte, mechanically polished, and fire-polished surfaces are available depending on the application.

4. Is this product suitable for semiconductor equipment?

Yes. High-purity fused quartz is commonly selected for semiconductor equipment because of its thermal stability, chemical resistance, and low contamination characteristics.

5. Can additional quartz tubes or ports be welded onto the plate?

Yes. Different quartz tubes, ports, joints, and flange structures can be welded according to the required vacuum, gas, or liquid connection design.