Semiconductor Grade High Purity Quartz Tube for Diffusion, Oxidation and High-Temperature Wafer Processing

The Semiconductor Grade High Purity Quartz Tube is designed for high-temperature wafer processing environments such as diffusion, oxidation, annealing, and thermal treatment in semiconductor and photovoltaic manufacturing. Made from high-purity quartz material, it offers low metallic impurity levels, low hydroxyl content, excellent thermal stability, and strong resistance to chemical and thermal stress.

Quartz tubes are widely used in semiconductor furnaces because fused quartz has a high softening point, good dimensional stability at elevated temperatures, low thermal expansion, and high chemical purity. These properties help reduce process contamination risk and support stable performance in clean thermal processes.

The dimensional range and typical impurity values below are based on the RJ-741 semiconductor-grade quartz tube information in the uploaded product catalog.

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주요 기능

High-Purity Quartz Material

The tube is manufactured from selected high-purity quartz material with controlled metallic impurities. Low impurity levels are important in semiconductor thermal processes because alkali metals and transition metals may affect wafer surface quality and device reliability.

Low Hydroxyl Content

Low OH content improves the material’s stability during high-temperature use. This is especially important for diffusion, oxidation, and annealing processes where quartz tubes are exposed to repeated heating cycles.

Excellent High-Temperature Resistance

Quartz has strong thermal stability and can be used in demanding furnace environments. It is suitable for processes involving controlled atmospheres, oxidation gases, and high-temperature wafer treatment.

Good Dimensional Stability

The quartz tube can maintain reliable shape and structure under thermal cycling when used within proper process conditions. Custom outer diameter, wall thickness, length, and end structure are available according to equipment requirements.

Custom Processing Available

The product can be customized into straight tubes, flanged tubes, closed-end tubes, slotted tubes, enlarged-end tubes, and other quartz furnace components based on drawings or samples.

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Standard Specifications

Final specifications should be confirmed according to customer drawings, equipment requirements, and inspection standards.

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Typical Chemical Impurity Content

The values above are typical reference data. Actual impurity levels may vary by batch and should be verified by a material certificate or test report.

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Main Applications

• Semiconductor diffusion furnaces
• 산화로
• Annealing systems
• Wafer thermal processing
• LPCVD and related high-temperature equipment
• Photovoltaic cell diffusion processes
• Laboratory tube furnaces
• High-purity quartz furnace liners
• Quartz process tubes and reaction chambers

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Why Use High Purity Quartz Tubes in Semiconductor Processing?

In semiconductor manufacturing, furnace components must withstand high temperature while minimizing contamination. High-purity quartz is commonly used because it has low thermal expansion, good chemical resistance, and low levels of metallic impurities. These characteristics make it suitable for critical thermal processes where process cleanliness and dimensional stability are important.

Compared with general industrial quartz tubes, semiconductor-grade quartz tubes require stricter control of raw material purity, dimensional tolerance, surface condition, and cleaning process. This helps reduce particle generation, metallic contamination, and process variation during wafer manufacturing.

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사용자 지정 기능

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Quality Control

Each quartz tube can be inspected according to customer requirements, including dimensional measurement, visual inspection, surface quality check, and impurity verification. For semiconductor applications, material traceability, cleanliness, and packaging should be confirmed before shipment.

Available inspection items may include:

• 외경과 내경
• Wall thickness
• Length tolerance
• Straightness or bending
• Ovality
• Surface defects
• 화학적 순도
• OH content
• Cleanliness and packaging condition

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자주 묻는 질문

1. What is a semiconductor grade quartz tube?

A semiconductor grade quartz tube is a high-purity fused quartz tube used in wafer processing equipment such as diffusion furnaces, oxidation furnaces, and annealing systems. It requires controlled impurity levels, stable dimensions, and good high-temperature performance.

2. Why is high purity important for quartz tubes?

High purity is important because metallic impurities may migrate or contaminate the wafer surface during high-temperature processing. For semiconductor applications, low levels of alkali metals and transition metals are especially important.

3. What does low OH content mean?

OH content refers to hydroxyl groups present in quartz. Lower OH content generally improves high-temperature stability and helps reduce changes in material properties during long-term thermal exposure.

4. Can the quartz tube be used for oxidation and diffusion processes?

Yes. High-purity quartz tubes are commonly used in oxidation and diffusion processes for silicon wafer manufacturing, provided that the selected material grade and dimensions match the furnace design and process temperature.

5. What sizes can be customized?

Outer diameter, inner diameter, wall thickness, length, end shape, flange structure, holes, slots, and other details can be customized according to customer drawings or equipment requirements.