Quartz plates are flat components made from high-purity fused silica, widely used in optical systems, semiconductor equipment, and high-temperature industrial environments.

Unlike standard glass, quartz plates combine excellent thermal stability, chemical resistance, and optical transmission, making them a key material in precision engineering applications.

1. What Are Quartz Plates?

Quartz plates are flat sheets of fused silica (SiO₂) produced through high-temperature melting and precision machining processes.

They are characterized by:

• 極めて低い熱膨張率
• High UV and IR transmission
• Strong resistance to chemical corrosion
• High dimensional stability under heat

These properties make quartz plates suitable for demanding optical and industrial environments.

2. Quartz Plate Manufacturing Process

The manufacturing of quartz plates involves several controlled steps to ensure purity and precision:

2.1 Raw Material Selection

High-purity natural quartz or synthetic silica is selected to ensure minimal impurities and stable optical performance.

2.2 Melting Process

Silica is melted at temperatures above 1700°C using flame fusion or electric fusion techniques, forming a homogeneous quartz structure.

2.3 Forming

The molten material is cast into slabs or ingots under controlled cooling conditions to avoid internal stress.

2.4 Annealing

Slow cooling is applied to release internal stress and improve structural stability.

2.5 Cutting and Machining

Quartz ingots are cut into plates using diamond tools or precision wire cutting systems.

2.6 Surface Finishing

Depending on application requirements, surfaces may be:

• Ground finish
• Polished
• Double-side polished (DSP) for optical use

3. Quartz Plate Technical Parameters

The following table summarizes typical material and processing characteristics of quartz plates:

3.1 Material Properties

プロパティ	代表値
素材	Fused Silica (SiO₂ ≥ 99.99%)
密度	~2.20 g/cm³
熱膨張係数	5.5 × 10-⁷ /°C
軟化点	~1730°C
Continuous Working Temperature	Up to 1100°C
光伝送範囲	180 nm – 2500 nm

3.2 Dimensional Range

パラメータ	Typical Range
厚さ	0.5 mm – 50 mm
Max Size	Up to 500 mm or customized
形状	円形 / 正方形 / 長方形 / 特注
エッジタイプ	Cut / Ground / Chamfered

3.3 Precision Tolerance Levels

パラメータ	標準グレード	Precision Grade	光学グレード
厚さ公差	±0.05 mm	±0.02 mm	±0.01 mm
平坦性	≤ 5 µm / 100 mm	≤ 2 µm / 100 mm	≤ 1 µm / 100 mm
パラレリズム	≤ 0.05 mm	≤ 0.02 mm	≤ 0.01 mm
表面粗さ（Ra）	≤ 0.2 µm	≤ 0.05 µm	≤ 0.01 µm

3.4 Optical Performance

Wavelength Range	Transmission Rate
UV (200–400 nm)	>85%
Visible (400–700 nm)	>90%
IR (700–2500 nm)	>85%

4. Applications of Quartz Plates

Quartz plates are used in multiple high-tech industries due to their stability and optical performance.

4.1 Optical Industry

Used in:

• Laser systems
• UV optical devices
• Imaging and detection systems

4.2 Semiconductor Industry

Used in:

• Wafer processing equipment
• Thermal chambers
• Etching and deposition systems

4.3 Industrial High-Temperature Systems

Used in:

• Furnace observation windows
• Heat-resistant shielding components

4.4 Laboratory and Scientific Equipment

Used in:

• Spectroscopy instruments
• Chemical analysis systems
• Precision measurement devices

5. Key Advantages of Quartz Plates

• 優れた耐熱衝撃性
• Very low thermal expansion
• High optical transparency (UV–IR range)
• Strong resistance to acids and chemicals
• Stable performance under extreme conditions

6. Summary

Quartz plates are essential engineering materials used in optics, semiconductor manufacturing, and industrial thermal systems. Their performance depends heavily on purity, machining accuracy, and surface quality.

Understanding their manufacturing process and technical parameters helps engineers and buyers select the right grade for different applications.

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