This quartz vacuum chuck plate is a precision-machined quartz component designed for optical coating, semiconductor processing, precision positioning, vacuum adsorption, and laboratory equipment applications. Made from high-purity fused quartz, it provides excellent cleanliness, thermal stability, chemical resistance, and dimensional accuracy.
The product features a round plate structure with multiple large apertures and small vacuum or positioning holes. It can be used to hold, support, position, or adsorb optical lenses, quartz wafers, glass discs, optical windows, semiconductor wafers, and other precision round components during coating, inspection, transfer, or processing.
Compared with metal or ordinary glass chucks, fused quartz vacuum chuck plates offer better purity, lower contamination risk, excellent high-temperature performance, and strong resistance to corrosive process environments.
製品仕様
| 項目 | 説明 |
|---|---|
| 製品名 | Quartz Vacuum Chuck Plate |
| 素材 | High-Purity Quartz / Fused Quartz |
| 構造 | Multi-hole round suction plate |
| 表面仕上げ | Frosted, ground, or polished |
| 加工 | Cutting, drilling, grinding, chamfering, precision machining |
| Hole Design | Large apertures, vacuum holes, positioning holes, mounting holes |
| 申し込み | Optical coating, semiconductor, vacuum holding, precision positioning |
| Customization | Available according to drawings or samples |
主な特徴
High-Purity Quartz Material
Manufactured from high-purity fused quartz, the chuck plate is suitable for cleanroom, optical, semiconductor, and precision process environments.
Multi-Hole Vacuum Adsorption Design
The plate can be designed with large openings, small vacuum holes, positioning holes, and mounting holes. Hole size, quantity, spacing, and layout can be customized according to the workpiece and equipment requirements.
Stable Workpiece Holding
The quartz vacuum chuck helps hold and position lenses, glass discs, wafers, optical windows, and other precision parts during coating, inspection, transfer, or processing.
優れた熱安定性
Fused quartz has low thermal expansion and good resistance to thermal shock, making it suitable for coating systems and high-temperature process environments.
Good Chemical Resistance
Quartz provides strong resistance to many acids, corrosive gases, and process chemicals, making it suitable for demanding industrial and laboratory applications.
Custom Machining Available
Outer diameter, thickness, hole layout, vacuum grooves, channels, chamfers, surface finish, and tolerance can be customized based on drawings or samples.
代表的なアプリケーション
This quartz vacuum chuck plate can be used in:
- Optical coating equipment
- Lens coating and holding fixtures
- Vacuum adsorption platforms
- Optical window and glass disc positioning
- Quartz wafer and glass wafer handling
- Semiconductor laboratory equipment
- Precision inspection and assembly systems
- Vacuum process equipment
- Custom quartz fixtures and tooling
カスタマイズ・オプション
| Custom Item | Available Options |
|---|---|
| 外径 | カスタマイズ |
| 厚さ | カスタマイズ |
| Large Aperture Size | カスタマイズ |
| Small Hole Size | Vacuum holes, positioning holes, mounting holes |
| Hole Layout | Symmetrical, circular, multi-point, custom design |
| Vacuum Structure | Grooves, channels, through holes |
| 表面仕上げ | Ground, frosted, polished |
| エッジ処理 | Chamfer, bevel, rounded edge |
| 寛容 | According to customer drawing |
| Quantity | Prototype, small batch, mass production |
Product Advantages
This quartz vacuum chuck plate is ideal for applications requiring high cleanliness, stable adsorption, dimensional precision, and resistance to heat or chemicals. The multi-hole structure allows the part to work with a vacuum system to hold precision components securely and reduce movement during coating, inspection, or processing. Its high-purity quartz material also helps reduce contamination risk in optical and semiconductor environments.
Information Needed for Quotation
For accurate quotation, please provide:
- Outer diameter and thickness
- Large aperture quantity, diameter, and layout
- Small hole quantity, diameter, and function
- Vacuum groove or backside channel requirements
- Surface finish requirement
- Tolerance requirement
- Application equipment and workpiece type
- Required quantity
- Drawing or sample photos
よくあるご質問
1. Is this product a quartz flange or a quartz vacuum chuck?
This product is more accurately classified as a quartz vacuum chuck plate. It is mainly used for vacuum adsorption, workpiece holding, and precision positioning.
2. Can the hole layout be customized?
Yes. The large apertures, vacuum holes, positioning holes, mounting holes, and groove design can be customized according to customer drawings.
3. What materials can be held by this quartz chuck?
It can be used for optical lenses, glass discs, quartz wafers, optical windows, semiconductor wafers, and other precision round components.
4. Can you provide polished surface finishing?
Yes. Ground, frosted, and polished surface finishes are available depending on the application requirements.
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