{"id":2583,"date":"2026-03-23T03:06:02","date_gmt":"2026-03-23T03:06:02","guid":{"rendered":"https:\/\/www.fuyao-quartz.com\/?p=2583"},"modified":"2026-03-23T03:13:51","modified_gmt":"2026-03-23T03:13:51","slug":"%e7%a1%bc%e7%a1%85%e7%8e%bb%e7%92%83%e8%88%87%e9%88%89%e9%88%a3%e7%8e%bb%e7%92%83%e6%99%b6%e7%89%87","status":"publish","type":"post","link":"https:\/\/www.fuyao-quartz.com\/zh\/borosilicate-vs-soda-lime-glass-wafers\/","title":{"rendered":"\u787c\u7845\u73bb\u7483\u8207\u8607\u6253\u9223\u73bb\u7483\u6676\u5713\uff1a\u70ba\u5149\u5b78\u53ca\u5fae\u6a5f\u96fb (MEMS) \u61c9\u7528\u9078\u64c7\u6b63\u78ba\u7684\u57fa\u677f"},"content":{"rendered":"

\u5728\u7cbe\u5bc6\u5149\u5b78\u3001\u5fae\u88fd\u9020\u548c MEMS \u7814\u7a76\u4e2d\uff0c\u9078\u64c7\u6b63\u78ba\u7684\u73bb\u7483\u6676\u5713\u5c0d\u65bc\u78ba\u4fdd\u6a5f\u68b0\u7a69\u5b9a\u6027\u3001\u5149\u5b78\u6027\u80fd\u548c\u88fd\u7a0b\u53ef\u9760\u6027\u81f3\u95dc\u91cd\u8981\u3002\u6700\u5e38\u7528\u7684\u5169\u7a2e\u6750\u6599\u662f\u787c\u7845\u73bb\u7483\u6676\u5713\u548c\u9209\u9223\u73bb\u7483\u6676\u5713\u3002\u96d6\u7136\u5169\u8005\u90fd\u662f\u77fd\u9178\u9e7d\u73bb\u7483\u7684\u4e00\u7a2e\uff0c\u4f46\u5176\u6210\u5206\u3001\u71b1\u7279\u6027\u548c\u6a5f\u68b0\u7279\u6027\u537b\u6709\u5f88\u5927\u7684\u5dee\u7570\uff0c\u56e0\u6b64\u6bcf\u7a2e\u6750\u6599\u90fd\u9069\u5408\u7279\u5b9a\u7684\u61c9\u7528\u3002.<\/p>\n\n\n\n

\u9019\u7bc7\u6587\u7ae0\u4ee5\u79d1\u5b78\u70ba\u57fa\u790e\uff0c\u6bd4\u8f03\u4e86\u787c\u77fd\u9178\u9e7d\u548c\u787c\u7845\u9178\u9e7d\u3002 \u8607\u6253\u77f3\u7070\u9905<\/a>, \u7a81\u51fa\u5176\u7279\u6027\u3001\u512a\u52e2\u3001\u9650\u5236\u548c\u5178\u578b\u4f7f\u7528\u6848\u4f8b\u3002.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

\u6750\u8cea\u7d44\u6210<\/strong><\/h2>\n\n\n\n
\u8ca1\u7522<\/th>\u787c\u7845\u73bb\u7483<\/th>\u8607\u6253\u77f3\u7070\u73bb\u7483\u676f<\/th><\/tr><\/thead>
\u4e3b\u8981\u5143\u4ef6<\/td>SiO\u2082 + B\u2082O\u2083 + Al\u2082O\u2083 + \u5fae\u91cf\u9e7c\u6c27\u5316\u7269<\/td>SiO\u2082 + Na\u2082O + CaO<\/td><\/tr>
\u9e7c\u542b\u91cf<\/td>\u4f4e (~4-5%)<\/td>\u9ad8 (~12-15%)<\/td><\/tr>
\u787c\u542b\u91cf<\/td>\u9ad8 (~12-13%)<\/td>\u6700\u5c11\u6216\u7121<\/td><\/tr>
\u5f71\u97ff<\/td>\u4f4e\u71b1\u81a8\u8139\u3001\u9ad8\u5316\u5b78\u7a69\u5b9a\u6027<\/td>\u5177\u6210\u672c\u6548\u76ca\u3001\u6613\u65bc\u52a0\u5de5\u3001\u4e2d\u7b49\u8010\u5316\u5b78\u6027<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

\u787c\u7845\u73bb\u7483<\/a> \u5305\u542b\u6c27\u5316\u787c\uff0c\u53ef\u5927\u5e45\u964d\u4f4e\u5176\u71b1\u81a8\u8139\u4fc2\u6578\u4e26\u589e\u5f37\u8010\u5316\u5b78\u6027\u3002\u4e3b\u8981\u7531\u77fd\u77f3\u3001\u8607\u6253\u548c\u77f3\u7070\u7d44\u6210\u7684\u8607\u6253\u77f3\u7070\u73bb\u7483\u8f03\u70ba\u7d93\u6fdf\uff0c\u4f46\u71b1\u81a8\u8139\u4fc2\u6578\u8f03\u9ad8\uff0c\u5316\u5b78\u7a69\u5b9a\u6027\u9069\u4e2d\u3002.<\/p>\n\n\n\n

\u71b1\u548c\u6a5f\u68b0\u7279\u6027<\/strong><\/h2>\n\n\n\n
\u8ca1\u7522<\/th>\u787c\u7845\u73bb\u7483<\/th>\u8607\u6253\u77f3\u7070\u73bb\u7483\u676f<\/th><\/tr><\/thead>
\u71b1\u81a8\u8139\u4fc2\u6578 (CTE)<\/td>~3.3 \u00d7 10-\u2076 \/K<\/td>~9 \u00d7 10-\u2076 \/K<\/td><\/tr>
\u6297\u71b1\u885d\u64ca<\/td>\u6975\u4f73\uff0c\u53ef\u627f\u53d7 >150\u00b0C \u7684\u6eab\u5ea6\u8b8a\u5316<\/td>\u5dee\uff0c\u5728 ~30\u00b0C \u5dee\u7570\u4e0b\u53ef\u80fd\u6703\u958b\u88c2<\/td><\/tr>
\u8edf\u5316\u9ede<\/td>~820-860\u00b0C<\/td>~585-740\u00b0C<\/td><\/tr>
\u6a5f\u68b0\u5f37\u5ea6<\/td>\u76f8\u5c0d\u8f03\u9ad8<\/td>\u4e2d\u5ea6<\/td><\/tr>
\u8868\u9762\u5e73\u6574\u5ea6<\/td>\u9ad8\uff0c\u9069\u5408\u8584\u819c\u88fd\u7a0b<\/td>\u826f\u597d\u7684\u6d6e\u52d5\u88fd\u7a0b\u63d0\u4f9b\u5747\u4e00\u6027<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

\u95dc\u9375\u898b\u89e3\uff1a<\/strong> \u787c\u77fd\u6676\u5713\u662f\u9ad8\u6eab\u88fd\u7a0b\u3001\u71b1\u5faa\u74b0\u6216\u7cbe\u5bc6 MEMS \u88dd\u7f6e\u7684\u7406\u60f3\u9078\u64c7\uff0c\u800c\u9209\u9223\u6676\u5713\u5247\u9069\u7528\u65bc\u5ba4\u6eab\u6216\u4f4e\u6eab\u61c9\u7528\uff0c\u5728\u9019\u4e9b\u61c9\u7528\u4e2d\uff0c\u6210\u672c\u6548\u76ca\u548c\u5149\u5b78\u6e05\u6670\u5ea6\u662f\u512a\u5148\u8003\u91cf\u3002.<\/p>\n\n\n\n

\u5149\u5b78\u6548\u80fd<\/strong><\/h2>\n\n\n\n

\u787c\u7845\u7247\u548c\u9209\u9223\u7247\u5728\u53ef\u898b\u5149\u5149\u8b5c\u4e2d\u90fd\u5177\u6709\u9ad8\u900f\u660e\u5ea6\uff0c\u4f46\u4e5f\u5b58\u5728\u5dee\u7570\uff1a<\/p>\n\n\n\n

    \n
  • \u787c\u7845\u6676\u7247<\/strong>:\u900f\u5149\u7387\u7565\u9ad8\uff0c\u8272\u5dee\u6700\u5c0f\uff0c\u662f\u7cbe\u5bc6\u5149\u5b78\u548c\u96f7\u5c04\u61c9\u7528\u7684\u7406\u60f3\u9078\u64c7\u3002.<\/li>\n\n\n\n
  • \u8607\u6253\u840a\u59c6\u5a01\u5316\u9905<\/strong>:\u5149\u5b78\u6e05\u6670\u5ea6\u975e\u5e38\u597d\uff0c\u4f46\u7531\u65bc\u542b\u9435\uff0c\u53ef\u80fd\u6703\u986f\u793a\u8f15\u5fae\u7684\u7da0\u8272\u3002\u9069\u7528\u65bc\u986f\u793a\u5668\u4fdd\u8b77\u3001\u5149\u5b78\u7a97\u53ca\u4f4e\u6210\u672c\u5be6\u9a57\u57fa\u677f\u3002.<\/li>\n<\/ul>\n\n\n\n

    \u8010\u5316\u5b78\u6027<\/strong><\/h2>\n\n\n\n
      \n
    • \u787c\u77fd\u9178\u9e7d<\/strong>:: \u53ef\u62b5\u6297\u591a\u6578\u9178\u548c\u5f31\u9e7c\uff0c\u9069\u7528\u65bc\u5be6\u9a57\u5ba4\u548c\u5de5\u696d\u5316\u5b78\u88fd\u7a0b\u3002.<\/li>\n\n\n\n
    • \u8607\u6253\u77f3\u7070<\/strong>:: \u4e2d\u7b49\u8010\u6027\uff1b\u5c0d\u6c34\u548c\u6eab\u548c\u9178\u7a69\u5b9a\uff0c\u4f46\u6613\u53d7\u9e7c\u4fb5\u8755\uff0c\u9650\u5236\u4e86\u5176\u5728\u4fb5\u8755\u6027\u5316\u5b78\u74b0\u5883\u4e2d\u7684\u4f7f\u7528\u3002.<\/li>\n<\/ul>\n\n\n\n

      \u6210\u672c\u8207\u88fd\u9020\u8003\u91cf<\/strong><\/h2>\n\n\n\n
        \n
      • \u8607\u6253\u840a\u59c6\u5a01\u5316\u9905<\/strong>:\n
          \n
        • \u539f\u6599\u8c50\u5bcc\u4e14\u50f9\u683c\u4f4e\u5ec9\uff08\u7802\u3001\u7d14\u77f3\u7070\u3001\u77f3\u7070\u77f3\uff09\u3002.<\/li>\n\n\n\n
        • \u6d6e\u52d5\u88fd\u7a0b\u80fd\u4ee5\u4f4e\u6210\u672c\u9032\u884c\u5927\u898f\u6a21\u751f\u7522\u3002.<\/li>\n\n\n\n
        • \u6613\u65bc\u5207\u5272\u3001\u62cb\u5149\u548c\u6210\u578b\u52a0\u5de5\u3002.<\/li>\n<\/ul>\n<\/li>\n\n\n\n
        • \u787c\u7845\u6676\u7247<\/strong>:\n
            \n
          • \u7531\u65bc\u6dfb\u52a0\u787c\u548c\u7279\u6b8a\u7684\u7194\u89e3\u689d\u4ef6\uff0c\u6210\u672c\u8f03\u9ad8\u3002.<\/li>\n\n\n\n
          • \u9069\u7528\u65bc\u5c0d\u71b1\u7a69\u5b9a\u6027\u548c\u5316\u5b78\u7a69\u5b9a\u6027\u8981\u6c42\u6975\u9ad8\u7684\u9ad8\u7cbe\u5ea6\u61c9\u7528\u3002.<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n\n\n\n

            \u5be6\u7528\u7684\u5fc3\u5f97\uff1a<\/strong> \u5c0d\u65bc\u5927\u6279\u91cf\u3001\u4f4e\u6210\u672c\u7684\u5be6\u9a57\u6216\u539f\u578b\u88fd\u4f5c\uff0c\u9209\u9223\u6676\u5713\u662f\u9996\u9078\u3002\u5c0d\u65bc\u7cbe\u5bc6\u88dd\u7f6e\u3001\u71b1\u5faa\u74b0\u6216\u56b4\u82db\u7684\u5316\u5b78\u88fd\u7a0b\uff0c\u787c\u7845\u6676\u5713\u662f\u4e0a\u4f73\u7684\u9078\u64c7\u3002.<\/p>\n\n\n\n

            \u61c9\u7528\u6bd4\u8f03<\/strong><\/h2>\n\n\n\n
            \u61c9\u7528<\/th>\u787c\u7845\u6676\u7247<\/th>\u8607\u6253\u9752\u6ab8\u5a01\u5316<\/th><\/tr><\/thead>
            MEMS \u7814\u7a76<\/td>\u6975\u4f73\uff0c\u53ef\u627f\u53d7\u63a5\u5408\u8207\u5fae\u7d30\u52a0\u5de5\u88fd\u7a0b<\/td>\u9069\u5408\u4f4e\u6eab\u6216\u539f\u578b\u88fd\u4f5c MEMS<\/td><\/tr>
            \u8584\u819c\/\u539a\u819c\u6c89\u7a4d<\/td>\u53ef\u9760\u6027\u9ad8\uff0c\u7ff9\u66f2\u6700\u5c0f<\/td>\u5927\u9762\u7a4d\u5857\u5c64\u7684\u9ad8\u6027\u50f9\u6bd4\u9078\u64c7<\/td><\/tr>
            \u5149\u5b78\u8996\u7a97 \/ \u986f\u793a\u5668<\/td>\u7cbe\u5bc6\u5149\u5b78\u8207\u96f7\u5c04<\/td>\u901a\u7528\u986f\u793a\u5668\u3001\u4f4e\u6210\u672c\u5149\u5b78\u7a97<\/td><\/tr>
            \u5be6\u9a57\u5ba4\u57fa\u677f<\/td>\u52a0\u71b1\u4e0b\u7684\u5316\u5b78\u7a69\u5b9a\u6027<\/td>\u7d93\u6fdf\u7684\u5be6\u9a57\u57fa\u677f<\/td><\/tr>
            \u5fae\u6d41\u63a7<\/td>\u9ad8\u8010\u71b1\u548c\u8010\u5316\u5b78\u6027<\/td>\u9069\u7528\u65bc\u4f4e\u6eab\u6d41\u9ad4\u6e2c\u8a66<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

            \u7e3d\u7d50<\/strong><\/h2>\n\n\n\n

            \u5728\u787c\u7845\u73bb\u7483\u548c\u9209\u9223\u73bb\u7483\u6676\u5713\u4e4b\u9593\u505a\u51fa\u9078\u64c7\uff0c\u53d6\u6c7a\u65bc\u71b1\u7a69\u5b9a\u6027\u3001\u6a5f\u68b0\u5f37\u5ea6\u3001\u5149\u5b78\u54c1\u8cea\u3001\u8010\u5316\u5b78\u6027\u548c\u6210\u672c\u4e4b\u9593\u7684\u8b39\u614e\u5e73\u8861\u3002.<\/p>\n\n\n\n

              \n
            • \u787c\u7845\u6676\u7247<\/strong> \u6700\u9069\u5408\u9ad8\u7cbe\u5ea6\u3001\u9ad8\u6eab\u548c\u5316\u5b78\u8981\u6c42\u9ad8\u7684\u61c9\u7528\u3002.<\/li>\n\n\n\n
            • \u8607\u6253\u840a\u59c6\u5a01\u5316\u9905<\/strong> \u662f\u6210\u672c\u654f\u611f\u578b\u3001\u4f4e\u6eab\u6216\u5927\u5bb9\u91cf\u5149\u5b78\u8207 MEMS \u61c9\u7528\u7684\u7406\u60f3\u9078\u64c7\u3002.<\/li>\n<\/ul>\n\n\n\n

              \u900f\u904e\u77ad\u89e3\u9019\u4e9b\u5dee\u7570\uff0c\u5de5\u7a0b\u5e2b\u3001\u7814\u7a76\u4eba\u54e1\u548c\u7522\u54c1\u958b\u767c\u4eba\u54e1\u53ef\u4ee5\u512a\u5316\u5be6\u9a57\u548c\u751f\u7522\u74b0\u5883\u7684\u6750\u6599\u9078\u64c7\u3002\u6b64\u5916\uff0c\u8003\u616e\u5857\u5c64\u76f8\u5bb9\u6027\u3001\u6676\u5713\u539a\u5ea6\u548c\u8655\u7406\u7a0b\u5e8f\u53ef\u9032\u4e00\u6b65\u63d0\u5347\u6548\u80fd\u548c\u53ef\u9760\u6027\uff0c\u78ba\u4fdd\u6240\u9078\u64c7\u7684\u57fa\u677f\u540c\u6642\u7b26\u5408\u9810\u671f\u61c9\u7528\u7684\u5149\u5b78\u548c\u6a5f\u68b0\u8981\u6c42\u3002.<\/p>\n\n\n\n

              \u6700\u7d42\uff0c\u9078\u64c7\u6b63\u78ba\u7684\u6676\u5713\u6750\u6599\u53ef\u4ee5\u6539\u5584\u88dd\u7f6e\u6548\u80fd\u3001\u964d\u4f4e\u88fd\u9020\u98a8\u96aa\uff0c\u4e26\u63d0\u4f9b\u7b26\u5408\u7279\u5b9a\u5de5\u696d\u6216\u7814\u7a76\u9700\u6c42\u7684\u6210\u672c\u6548\u76ca\u89e3\u6c7a\u65b9\u6848\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

              In precision optics, microfabrication, and MEMS research, selecting the correct glass wafers is critical for ensuring mechanical stability, optical performance, and process reliability. Two of the most commonly used materials are borosilicate glass wafers and soda-lime glass wafers. While both are forms of silicate glass, their composition, thermal properties, and mechanical characteristics differ significantly, making 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