B\u1ec1 m\u1eb7t \u0111\u01b0\u1ee3c gia c\u00f4ng c\u1ef1c k\u1ef3 nh\u1eb5n (Ra \u2264 1 nm), ph\u00f9 h\u1ee3p cho quang h\u1ecdc ch\u00ednh x\u00e1c v\u00e0 MEMS<\/li>\n<\/ul>\n
\n\u0110\u1eb7c t\u00ednh v\u1eadt li\u1ec7u<\/h2>\n
![\"\"](\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/04\/fused_quartz_wafer_4_inch_fused_silica_wafer_3-300x300.webp\")
<\/p>\n
<\/p>\n
T\u1ea5m wafer th\u1ea1ch anh \u0111\u01b0\u1ee3c ch\u1ebf t\u1ea1o d\u1ef1a tr\u00ean <\/span>SiO\u2082 v\u00f4 \u0111\u1ecbnh h\u00ecnh \u0111\u00e3 nung ch\u1ea3y<\/span>, cung c\u1ea5p:<\/span><\/p>\n\n- C\u1ea5u tr\u00fac \u0111\u1eb3ng h\u01b0\u1edbng c\u00f3 t\u00ednh ch\u1ea5t quang h\u1ecdc \u0111\u1ed3ng nh\u1ea5t<\/li>\n
- Kh\u00f4ng c\u00f3 hi\u1ec7n t\u01b0\u1ee3ng song kh\u00fac x\u1ea1 th\u01b0\u1eddng g\u1eb7p \u1edf c\u00e1c v\u1eadt li\u1ec7u tinh th\u1ec3<\/li>\n
- Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t v\u00e0 ti\u1ebfp x\u00fac v\u1edbi plasma cao<\/li>\n
- \u0110\u1ed9 tho\u00e1t kh\u00ed th\u1ea5p, ph\u00f9 h\u1ee3p v\u1edbi m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng<\/li>\n<\/ul>\n
So v\u1edbi th\u1ee7y tinh th\u00f4ng th\u01b0\u1eddng, c\u00e1c t\u1ea5m th\u1ea1ch anh c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao h\u01a1n, kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t t\u1ed1t h\u01a1n v\u00e0 d\u1ea3i truy\u1ec1n d\u1eabn quang r\u1ed9ng h\u01a1n, khi\u1ebfn ch\u00fang tr\u1edf th\u00e0nh v\u1eadt li\u1ec7u \u0111\u01b0\u1ee3c \u01b0a chu\u1ed9ng trong ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn v\u00e0 quang t\u1eed.<\/p>\n
\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/h2>\n\n
\n
\n\n\n| Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n | \u0110\u01a1n v\u1ecb<\/th>\n | 4\u2033<\/th>\n | 6 inch<\/th>\n | 8 inch<\/th>\n | 10 inch<\/th>\n | 12 inch<\/th>\n<\/tr>\n<\/thead>\n |
\n\n| \u0110\u01b0\u1eddng k\u00ednh \/ K\u00edch th\u01b0\u1edbc<\/td>\n | mm<\/td>\n | 100<\/td>\n | 150<\/td>\n | 200<\/td>\n | 250<\/td>\n | 300<\/td>\n<\/tr>\n |
\n| Dung sai (\u00b1)<\/td>\n | mm<\/td>\n | 0.2<\/td>\n | 0.2<\/td>\n | 0.2<\/td>\n | 0.2<\/td>\n | 0.2<\/td>\n<\/tr>\n |
\n| \u0110\u1ed9 d\u00e0y<\/td>\n | mm<\/td>\n | \u22650,10<\/td>\n | \u22650,30<\/td>\n | \u22650,40<\/td>\n | \u22650,50<\/td>\n | \u22650,50<\/td>\n<\/tr>\n |
\n| C\u0103n h\u1ed9 tham chi\u1ebfu ch\u00ednh<\/td>\n | mm<\/td>\n | 32.5<\/td>\n | 57.5<\/td>\n | Khe h\u1edf b\u00e1n ph\u1ea7n<\/td>\n | Khe h\u1edf b\u00e1n ph\u1ea7n<\/td>\n | Khe h\u1edf b\u00e1n ph\u1ea7n<\/td>\n<\/tr>\n |
\n| LTV (5\u00d75 mm)<\/td>\n | \u03bcm<\/td>\n | <0,5<\/td>\n | <0,5<\/td>\n | <0,5<\/td>\n | <0,5<\/td>\n | <0,5<\/td>\n<\/tr>\n |
\n| TTV<\/td>\n | \u03bcm<\/td>\n | <2<\/td>\n | <3<\/td>\n | <3<\/td>\n | <5<\/td>\n | <5<\/td>\n<\/tr>\n |
\n| Cung<\/td>\n | \u03bcm<\/td>\n | \u00b120<\/td>\n | \u00b130<\/td>\n | \u00b140<\/td>\n | \u00b140<\/td>\n | \u00b140<\/td>\n<\/tr>\n |
\n| Warp<\/td>\n | \u03bcm<\/td>\n | \u226430<\/td>\n | \u226440<\/td>\n | \u226450<\/td>\n | \u226450<\/td>\n | \u226450<\/td>\n<\/tr>\n |
\n| PLTV (5\u00d75 mm)<\/td>\n | %<\/td>\n | \u226595<\/td>\n | \u226595<\/td>\n | \u226595<\/td>\n | \u226595<\/td>\n | \u226595<\/td>\n<\/tr>\n |
\n| L\u00e0m tr\u00f2n g\u00f3c<\/td>\n | mm<\/td>\n | Tu\u00e2n th\u1ee7 ti\u00eau chu\u1ea9n SEMI M1.2 \/ IEC 62276<\/td>\n | <\/td>\n | <\/td>\n | <\/td>\n | <\/td>\n<\/tr>\n |
\n| Lo\u1ea1i b\u1ec1 m\u1eb7t<\/td>\n | \u2014<\/td>\n | SSP \/ DSP<\/td>\n | <\/td>\n | <\/td>\n | <\/td>\n | <\/td>\n<\/tr>\n |
\n| M\u1eb7t b\u00ean \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng<\/td>\n | nm<\/td>\n | \u22641<\/td>\n | \u22641<\/td>\n | \u22641<\/td>\n | \u22641<\/td>\n | \u22641<\/td>\n<\/tr>\n |
\n| Ti\u00eau ch\u00ed m\u1eb7t sau<\/td>\n | \u03bcm<\/td>\n | 0,2\u20130,7 ho\u1eb7c theo y\u00eau c\u1ea7u<\/td>\n | <\/td>\n | <\/td>\n | <\/td>\n | <\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n\u1ee8ng d\u1ee5ng<\/h2>\nCh\u1ebf t\u1ea1o ch\u1ea5t b\u00e1n d\u1eabn<\/h3>\nT\u1ea5m th\u1ea1ch anh \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i l\u00e0m t\u1ea5m n\u1ec1n v\u00e0 c\u00e1c th\u00e0nh ph\u1ea7n trong quy tr\u00ecnh x\u1eed l\u00fd \u1edf m\u00f4i tr\u01b0\u1eddng nhi\u1ec7t \u0111\u1ed9 cao nh\u01b0 khu\u1ebfch t\u00e1n, l\u1eafng \u0111\u1ecdng v\u00e0 \u0103n m\u00f2n. \u0110\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t c\u1ee7a ch\u00fang \u0111\u1ea3m b\u1ea3o hi\u1ec7u su\u1ea5t \u1ed5n \u0111\u1ecbnh trong qu\u00e1 tr\u00ecnh x\u1eed l\u00fd l\u1eb7p \u0111i l\u1eb7p l\u1ea1i<\/p>\n chu k\u1ef3 nhi\u1ec7t.<\/span><\/h2>\nMEMS v\u00e0 C\u1ea3m bi\u1ebfn<\/h3>\nTrong qu\u00e1 tr\u00ecnh ch\u1ebf t\u1ea1o MEMS, c\u00e1c t\u1ea5m th\u1ea1ch anh cung c\u1ea5p n\u1ec1n \u1ed5n \u0111\u1ecbnh cho c\u00e1c c\u1ea5u tr\u00fac vi m\u00f4 v\u00e0 c\u1ea3m bi\u1ebfn ho\u1ea1t \u0111\u1ed9ng<\/p>\n g trong \u0111i\u1ec1u ki\u1ec7n ch\u1ecbu t\u00e1c \u0111\u1ed9ng c\u1ee7a \u1ee9ng su\u1ea5t c\u01a1 h\u1ecdc v\u00e0 nhi\u1ec7t.<\/span><\/h2>\nQuang h\u1ecdc & Quang t\u1eed h\u1ecdc<\/h3>\nV\u1edbi kh\u1ea3 n\u0103ng truy\u1ec1n tia UV v\u00e0 h\u1ed3ng ngo\u1ea1i (IR) tuy\u1ec7t v\u1eddi, c\u00e1c t\u1ea5m th\u1ea1ch anh l\u00e0 l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho:<\/p>\n |
![\"\"](\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/04\/Fused-Silica-and-Optical-Quartz-Glass-Wafers-2-300x300.webp\")
T\u1ea5m wafer th\u1ea1ch anh SiO\u2082 l\u00e0 c\u00e1c ch\u1ea5t n\u1ec1n c\u00f3 \u0111\u1ed9 tinh khi\u1ebft c\u1ef1c cao, \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong ch\u1ebf bi\u1ebfn b\u00e1n d\u1eabn, s\u1ea3n xu\u1ea5t MEMS, thi\u1ebft b\u1ecb RF v\u00e0 h\u1ec7 th\u1ed1ng quang h\u1ecdc. C\u00f3 s\u1eb5n v\u1edbi c\u00e1c \u0111\u01b0\u1eddng k\u00ednh ti\u00eau chu\u1ea9n t\u1eeb 2\u2033 \u0111\u1ebfn 12\u2033, c\u00e1c t\u1ea5m wafer n\u00e0y \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u00f2i h\u1ecfi \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t cao, \u0111\u1ed9 trong su\u1ed1t quang h\u1ecdc v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n h\u00f3a h\u1ecdc.<\/p>\n![\"\"](\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/04\/Fused-Silica-and-Optical-Quartz-Glass-Wafers1-300x300.webp\")
Quy tr\u00ecnh s\u1ea3n xu\u1ea5t<\/h2>\n