{"id":3058,"date":"2026-06-10T03:45:55","date_gmt":"2026-06-10T03:45:55","guid":{"rendered":"https:\/\/www.fuyao-quartz.com\/?p=3058"},"modified":"2026-06-10T03:46:08","modified_gmt":"2026-06-10T03:46:08","slug":"fracture-mechanism-of-fused-silica-glass-wafers-during-double-sided-polishing-process","status":"publish","type":"post","link":"https:\/\/www.fuyao-quartz.com\/vi\/fracture-mechanism-of-fused-silica-glass-wafers-during-double-sided-polishing-process\/","title":{"rendered":"C\u01a1 ch\u1ebf g\u00e3y v\u1ee1 c\u1ee7a c\u00e1c t\u1ea5m wafer th\u1ee7y tinh silic h\u1ee3p nh\u1ea5t trong qu\u00e1 tr\u00ecnh \u0111\u00e1nh b\u00f3ng hai m\u1eb7t"},"content":{"rendered":"<h2 class=\"wp-block-heading\">1. Gi\u1edbi thi\u1ec7u<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u0110\u00e1nh b\u00f3ng hai m\u1eb7t (DSP) l\u00e0 c\u00f4ng \u0111o\u1ea1n cu\u1ed1i c\u00f9ng v\u00e0 quan tr\u1ecdng nh\u1ea5t trong qu\u00e1 tr\u00ecnh gia c\u00f4ng c\u01a1 h\u1ecdc c\u00e1c t\u1ea5m wafer th\u1ee7y tinh silica nung ch\u1ea3y. \u0110\u00e2y c\u0169ng l\u00e0 c\u00f4ng \u0111o\u1ea1n gia c\u00f4ng k\u00e9o d\u00e0i nh\u1ea5t v\u00e0 \u0111\u00f3ng vai tr\u00f2 quy\u1ebft \u0111\u1ecbnh \u0111\u1ed1i v\u1edbi ch\u1ea5t l\u01b0\u1ee3ng s\u1ea3n ph\u1ea9m cu\u1ed1i c\u00f9ng.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Trong qu\u00e1 tr\u00ecnh n\u00e0y, c\u00e1c khuy\u1ebft t\u1eadt b\u1ec1 m\u1eb7t th\u01b0\u1eddng g\u1eb7p bao g\u1ed3m c\u00e1c v\u1ebft l\u00f5m, v\u1ebft x\u01b0\u1edbc, m\u1ebb c\u1ea1nh, v\u1ebft n\u1ee9t v\u00e0 t\u00ecnh tr\u1ea1ng v\u1ee1 ho\u00e0n to\u00e0n c\u1ee7a t\u1ea5m wafer. Trong s\u1ed1 \u0111\u00f3, c\u00e1c v\u1ebft l\u00f5m v\u00e0 v\u1ebft x\u01b0\u1edbc th\u01b0\u1eddng c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c gi\u1ea3m thi\u1ec3u ho\u1eb7c th\u1eadm ch\u00ed kh\u1eafc ph\u1ee5c th\u00f4ng qua vi\u1ec7c t\u1ed1i \u01b0u h\u00f3a quy tr\u00ecnh v\u00e0 ki\u1ec3m so\u00e1t m\u00f4i tr\u01b0\u1eddng. Tuy nhi\u00ean, m\u1ebb c\u1ea1nh, v\u1ebft n\u1ee9t v\u00e0 v\u1ee1 l\u00e0 nh\u1eefng khuy\u1ebft t\u1eadt kh\u00f4ng th\u1ec3 kh\u1eafc ph\u1ee5c, d\u1eabn tr\u1ef1c ti\u1ebfp \u0111\u1ebfn vi\u1ec7c lo\u1ea1i b\u1ecf t\u1ea5m wafer.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u0110\u1ed1i v\u1edbi c\u00e1c t\u1ea5m wafer silica nung ch\u1ea3y si\u00eau m\u1ecfng, c\u00e1c khuy\u1ebft t\u1eadt li\u00ean quan \u0111\u1ebfn s\u1ef1 g\u00e3y v\u1ee1 v\u1eabn l\u00e0 th\u00e1ch th\u1ee9c ch\u00ednh trong vi\u1ec7c \u0111\u1ea1t \u0111\u01b0\u1ee3c n\u0103ng su\u1ea5t cao v\u00e0 s\u1ea3n xu\u1ea5t \u1ed5n \u0111\u1ecbnh.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-large\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"430\" src=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/06\/Fracture-Mechanism-of-Fused-Silica-Glass-Wafers-During-Double-Sided-Polishing-Process-1024x430.png\" alt=\"\" class=\"wp-image-3059\" srcset=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/06\/Fracture-Mechanism-of-Fused-Silica-Glass-Wafers-During-Double-Sided-Polishing-Process-1024x430.png 1024w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/06\/Fracture-Mechanism-of-Fused-Silica-Glass-Wafers-During-Double-Sided-Polishing-Process-300x126.png 300w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/06\/Fracture-Mechanism-of-Fused-Silica-Glass-Wafers-During-Double-Sided-Polishing-Process-768x323.png 768w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/06\/Fracture-Mechanism-of-Fused-Silica-Glass-Wafers-During-Double-Sided-Polishing-Process-1536x645.png 1536w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/06\/Fracture-Mechanism-of-Fused-Silica-Glass-Wafers-During-Double-Sided-Polishing-Process-18x8.png 18w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/06\/Fracture-Mechanism-of-Fused-Silica-Glass-Wafers-During-Double-Sided-Polishing-Process-600x252.png 600w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/06\/Fracture-Mechanism-of-Fused-Silica-Glass-Wafers-During-Double-Sided-Polishing-Process.png 1699w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">2. C\u00e1c lo\u1ea1i khuy\u1ebft t\u1eadt do n\u1ee9t g\u00e3y<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c khuy\u1ebft t\u1eadt do n\u1ee9t trong <a href=\"https:\/\/www.fuyao-quartz.com\/vi\/product-category\/quartz-wafer\/\">t\u1ea5m th\u1ee7y tinh<\/a> th\u01b0\u1eddng bao g\u1ed3m ba lo\u1ea1i:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>S\u1ee9t m\u1ebb m\u00e9p (v\u1ee1 m\u00e9p)<\/strong><br>Th\u00f4ng th\u01b0\u1eddng \u0111\u01b0\u1ee3c \u0111\u1ecbnh ngh\u0129a l\u00e0 nh\u1eefng h\u01b0 h\u1ecfng c\u00f3 th\u1ec3 nh\u00ecn th\u1ea5y \u1edf m\u00e9p ho\u1eb7c nh\u1eefng m\u1ea3nh v\u1ee1 b\u1ecb thi\u1ebfu c\u00f3 chi\u1ec1u d\u00e0i l\u1edbn h\u01a1n 0,3 mm.<\/li>\n\n\n\n<li><strong>S\u1ef1 lan truy\u1ec1n v\u1ebft n\u1ee9t<\/strong><br>C\u00e1c v\u1ebft n\u1ee9t th\u01b0\u1eddng b\u1eaft \u0111\u1ea7u t\u1eeb c\u00e1c m\u00e9p b\u1ecb s\u1ee9t m\u1ebb v\u00e0 d\u1ea7n d\u1ea7n lan r\u1ed9ng v\u00e0o b\u00ean trong th\u00e2n t\u1ea5m wafer.<\/li>\n\n\n\n<li><strong>G\u00e3y ho\u00e0n to\u00e0n (v\u1ee1)<\/strong><br>M\u1ed9t khi c\u00e1c v\u1ebft n\u1ee9t lan r\u1ed9ng d\u01b0\u1edbi t\u00e1c \u0111\u1ed9ng c\u1ee7a \u1ee9ng su\u1ea5t trong qu\u00e1 tr\u00ecnh gia c\u00f4ng ho\u1eb7c x\u1eed l\u00fd ti\u1ebfp theo, s\u1ebd d\u1eabn \u0111\u1ebfn s\u1ef1 c\u1ed1 h\u1ecfng h\u00f3c nghi\u00eam tr\u1ecdng c\u1ee7a t\u1ea5m wafer.<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Trong th\u1ef1c ti\u1ec5n c\u00f4ng nghi\u1ec7p, m\u1ed9t khi ph\u00e1t hi\u1ec7n hi\u1ec7n t\u01b0\u1ee3ng s\u1ee9t m\u1ebb c\u1ea1nh, t\u1ea5m wafer th\u01b0\u1eddng \u0111\u01b0\u1ee3c ph\u00e2n lo\u1ea1i l\u00e0 s\u1ea3n ph\u1ea9m l\u1ed7i v\u00e0 lo\u1ea1i b\u1ecf kh\u1ecfi quy tr\u00ecnh gia c\u00f4ng ti\u1ebfp theo, do n\u00f3 c\u00f3 nguy c\u01a1 cao b\u1ecb h\u1ecfng trong c\u00e1c c\u00f4ng \u0111o\u1ea1n ti\u1ebfp theo.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3. Ngu\u1ed3n g\u1ed1c c\u1ee7a v\u1ebft n\u1ee9t trong qu\u00e1 tr\u00ecnh \u0111\u00e1nh b\u00f3ng hai m\u1eb7t<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Trong qu\u00e1 tr\u00ecnh DSP, t\u1ea5m wafer tr\u1ea3i qua m\u1ed9t tr\u1ea1ng th\u00e1i chuy\u1ec3n \u0111\u1ed9ng ph\u1ee9c t\u1ea1p do c\u00e1c y\u1ebfu t\u1ed1 sau \u0111\u00e2y t\u00e1c \u0111\u1ed9ng:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Xoay t\u1ea5m tr\u00ean<\/li>\n\n\n\n<li>Xoay t\u1ea5m d\u01b0\u1edbi<\/li>\n\n\n\n<li>Chuy\u1ec3n \u0111\u1ed9ng quay c\u1ee7a b\u00e1nh r\u0103ng m\u1eb7t tr\u1eddi<\/li>\n\n\n\n<li>Chuy\u1ec3n \u0111\u1ed9ng c\u1ee7a b\u00e1nh r\u0103ng mang (b\u00e1nh r\u0103ng h\u00e0nh tinh)<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Trong nh\u1eefng \u0111i\u1ec1u ki\u1ec7n n\u00e0y, t\u1ea5m wafer ph\u1ea3i ch\u1ecbu m\u1ed9t chuy\u1ec3n \u0111\u1ed9ng k\u1ebft h\u1ee3p gi\u1eefa chuy\u1ec3n \u0111\u1ed9ng quay quanh tr\u1ee5c v\u00e0 t\u1ef1 quay, khi\u1ebfn vi\u1ec7c ph\u00e2n t\u00edch \u1ee9ng su\u1ea5t ch\u00ednh x\u00e1c tr\u1edf n\u00ean v\u00f4 c\u00f9ng ph\u1ee9c t\u1ea1p.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Tuy nhi\u00ean, s\u1ed1 li\u1ec7u th\u1ed1ng k\u00ea s\u1ea3n xu\u1ea5t cho th\u1ea5y m\u1ed9t xu h\u01b0\u1edbng r\u00f5 r\u00e0ng: c\u00e1c khuy\u1ebft t\u1eadt g\u00e3y g\u1ea7n nh\u01b0 lu\u00f4n b\u1eaft \u0111\u1ea7u t\u1eeb m\u00e9p t\u1ea5m wafer. \u0110i\u1ec1u n\u00e0y cho th\u1ea5y \u0111\u1ed9 b\u1ec1n m\u00e9p c\u1ee7a t\u1ea5m wafer l\u00e0 y\u1ebfu t\u1ed1 ch\u1ee7 y\u1ebfu quy\u1ebft \u0111\u1ecbnh h\u00e0nh vi g\u00e3y.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">4. \u0110\u1ed9 b\u1ec1n m\u00e9p l\u00e0 y\u1ebfu t\u1ed1 ch\u00ednh d\u1eabn \u0111\u1ebfn h\u01b0 h\u1ecfng<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Kh\u1ea3 n\u0103ng ch\u1ed1ng n\u1ee9t c\u1ee7a m\u1ed9t t\u1ea5m wafer silica nung ch\u1ea3y ch\u1ee7 y\u1ebfu \u0111\u01b0\u1ee3c quy\u1ebft \u0111\u1ecbnh b\u1edfi \u0111\u1ed9 b\u1ec1n m\u00e9p c\u1ee7a n\u00f3.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u0110\u1ec3 n\u00e2ng cao \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh c\u01a1 h\u1ecdc, c\u00e1c t\u1ea5m wafer th\u01b0\u1eddng \u0111\u01b0\u1ee3c \u0111\u01b0a v\u00e0o qu\u00e1 tr\u00ecnh <strong>v\u00e1t c\u1ea1nh (l\u00e0m v\u00e1t)<\/strong>, gi\u00fap gi\u1ea3m s\u1ef1 t\u1eadp trung \u1ee9ng su\u1ea5t \u1edf c\u00e1c m\u00e9p. M\u1ed9t g\u00f3c v\u00e1t \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf ph\u00f9 h\u1ee3p s\u1ebd c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3 kh\u1ea3 n\u0103ng ch\u1ed1ng n\u1ee9t g\u00e3y.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Tuy nhi\u00ean, ngay c\u1ea3 khi \u0111\u00e3 c\u00f3 bi\u1ec7n ph\u00e1p b\u1ea3o v\u1ec7 m\u00e9p, c\u00e1c th\u00f4ng s\u1ed1 gia c\u00f4ng kh\u00f4ng ph\u00f9 h\u1ee3p ho\u1eb7c t\u1ea3i tr\u1ecdng c\u01a1 h\u1ecdc qu\u00e1 m\u1ee9c v\u1eabn c\u00f3 th\u1ec3 d\u1eabn \u0111\u1ebfn s\u1ef1 xu\u1ea5t hi\u1ec7n c\u1ee7a khuy\u1ebft t\u1eadt t\u1ea1i v\u00f9ng v\u00e1t c\u1ea1nh.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">5. Ph\u00e2n t\u00edch \u1ee9ng su\u1ea5t t\u1ea1i m\u00e9p t\u1ea5m wafer<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Trong qu\u00e1 tr\u00ecnh DSP, m\u00e9p t\u1ea5m wafer ph\u1ea3i ch\u1ecbu t\u00e1c \u0111\u1ed9ng c\u1ee7a s\u1ef1 k\u1ebft h\u1ee3p c\u00e1c l\u1ef1c:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>F\u2081: L\u1ef1c \u00e9p d\u1ecdc<\/strong><br>Ch\u1ee7 y\u1ebfu do \u00e1p l\u1ef1c \u0111\u00e1nh b\u00f3ng t\u1eeb t\u1ea5m tr\u00ean g\u00e2y ra.<\/li>\n\n\n\n<li><strong>F\u2082: L\u1ef1c ngang<\/strong><br>Ch\u1ee7 y\u1ebfu do t\u00e1c \u0111\u1ed9ng ly t\u00e2m trong qu\u00e1 tr\u00ecnh quay v\u00e0 l\u1ef1c ph\u1ea3n \u1ee9ng t\u1eeb h\u1ec7 th\u1ed1ng v\u1eadn chuy\u1ec3n g\u00e2y ra.<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">T\u1ea1i m\u00e9p v\u00e1t, c\u00e1c l\u1ef1c n\u00e0y c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c ph\u00e2n t\u00edch th\u00e0nh:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>L\u1ef1c ph\u00e1p tuy\u1ebfn vu\u00f4ng g\u00f3c v\u1edbi b\u1ec1 m\u1eb7t v\u00e1t<\/li>\n\n\n\n<li>L\u1ef1c ti\u1ebfp tuy\u1ebfn song song v\u1edbi b\u1ec1 m\u1eb7t v\u00e1t<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Tr\u1ea1ng th\u00e1i \u1ee9ng su\u1ea5t t\u1ed5ng h\u1ee3p c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c bi\u1ec3u di\u1ec5n d\u01b0\u1edbi d\u1ea1ng s\u1ef1 ch\u1ed3ng ch\u1eadp c\u1ee7a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u0103ng th\u1eb3ng th\u00f4ng th\u01b0\u1eddng (th\u00e0nh ph\u1ea7n n\u00e9n\/k\u00e9o)<\/li>\n\n\n\n<li>\u00c1p su\u1ea5t c\u1eaft (th\u00e0nh ph\u1ea7n tr\u01b0\u1ee3t)<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Khi c\u00e1c \u1ee9ng su\u1ea5t n\u00e0y v\u01b0\u1ee3t qu\u00e1 gi\u1edbi h\u1ea1n \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc c\u1ee7a th\u1ea1ch anh nung ch\u1ea3y, hi\u1ec7n t\u01b0\u1ee3ng n\u1ee9t s\u1ebd x\u1ea3y ra, th\u01b0\u1eddng b\u1eaft \u0111\u1ea7u t\u1eeb m\u00e9p v\u00e0 lan truy\u1ec1n v\u00e0o trong.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">6. C\u01a1 ch\u1ebf h\u1ecfng h\u00f3c trong c\u00e1c t\u1ea5m wafer si\u00eau m\u1ecfng<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">\u0110\u1ed1i v\u1edbi c\u00e1c t\u1ea5m wafer silica nung ch\u1ea3y si\u00eau m\u1ecfng (th\u01b0\u1eddng c\u00f3 \u0111\u1ed9 d\u00e0y &lt; 0,3 mm), nguy c\u01a1 g\u00e3y v\u1ee1 t\u0103ng l\u00ean \u0111\u00e1ng k\u1ec3 do m\u1ed9t s\u1ed1 y\u1ebfu t\u1ed1 sau:<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">6.1 Gi\u1ea3m \u0111\u1ed9 b\u1ec1n k\u1ebft c\u1ea5u<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Khi \u0111\u1ed9 d\u00e0y gi\u1ea3m, \u0111\u1ed9 c\u1ee9ng c\u01a1 h\u1ecdc t\u1ed5ng th\u1ec3 c\u1ee7a t\u1ea5m wafer c\u0169ng gi\u1ea3m \u0111\u00e1ng k\u1ec3, khi\u1ebfn n\u00f3 tr\u1edf n\u00ean nh\u1ea1y c\u1ea3m h\u01a1n v\u1edbi \u1ee9ng su\u1ea5t b\u00ean ngo\u00e0i.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">6.2 Khu v\u1ef1c b\u1ea3o v\u1ec7 g\u00f3c v\u00e1t b\u1ecb thu h\u1eb9p<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c t\u1ea5m wafer si\u00eau m\u1ecfng c\u00f3 th\u1ec3 t\u00edch v\u00e1t c\u1ea1nh v\u00e0 di\u1ec7n t\u00edch ti\u1ebfp x\u00fac nh\u1ecf h\u01a1n nhi\u1ec1u. Do \u0111\u00f3, t\u00e1c d\u1ee5ng b\u1ea3o v\u1ec7 c\u1ee7a vi\u1ec7c v\u00e1t c\u1ea1nh b\u1ecb suy gi\u1ea3m.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">6.3 S\u1ef1 gia t\u0103ng \u0111\u1ed9 t\u1eadp trung \u1ee9ng su\u1ea5t<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Trong c\u00f9ng \u0111i\u1ec1u ki\u1ec7n \u0111\u00e1nh b\u00f3ng:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Di\u1ec7n t\u00edch ti\u1ebfp x\u00fac gi\u1ea3m<\/li>\n\n\n\n<li>\u00c1p su\u1ea5t c\u1ee5c b\u1ed9 tr\u00ean m\u1ed7i \u0111\u01a1n v\u1ecb di\u1ec7n t\u00edch t\u0103ng l\u00ean<\/li>\n\n\n\n<li>M\u1ee9c \u0111\u1ed9 t\u1eadp trung \u1ee9ng su\u1ea5t \u1edf m\u00e9p t\u0103ng l\u00ean \u0111\u00e1ng k\u1ec3<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">\u0110i\u1ec1u n\u00e0y d\u1eabn \u0111\u1ebfn s\u1ef1 gia t\u0103ng nhanh ch\u00f3ng c\u1ee7a c\u1ea3 \u1ee9ng su\u1ea5t b\u00ecnh th\u01b0\u1eddng v\u00e0 \u1ee9ng su\u1ea5t c\u1eaft t\u1ea1i m\u00e9p.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">7. K\u1ebft lu\u1eadn<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c khuy\u1ebft t\u1eadt n\u1ee9t g\u00e3y tr\u00ean c\u00e1c t\u1ea5m wafer th\u1ee7y tinh silica nung k\u1ebft trong qu\u00e1 tr\u00ecnh \u0111\u00e1nh b\u00f3ng hai m\u1eb7t ch\u1ee7 y\u1ebfu do \u1ee9ng su\u1ea5t qu\u00e1 m\u1ee9c t\u1ea1i m\u00e9p t\u1ea5m wafer g\u00e2y ra. Khi t\u1ed5ng \u1ee9ng su\u1ea5t ph\u00e1p tuy\u1ebfn v\u00e0 \u1ee9ng su\u1ea5t c\u1eaft v\u01b0\u1ee3t qu\u00e1 gi\u1edbi h\u1ea1n \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc c\u1ee7a v\u1eadt li\u1ec7u, s\u1ebd x\u1ea3y ra hi\u1ec7n t\u01b0\u1ee3ng s\u1ee9t m\u1ebb m\u00e9p, lan truy\u1ec1n v\u1ebft n\u1ee9t v\u00e0 cu\u1ed1i c\u00f9ng l\u00e0 g\u00e3y v\u1ee1.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c t\u1ea5m wafer si\u00eau m\u1ecfng \u0111\u1eb7c bi\u1ec7t d\u1ec5 b\u1ecb h\u01b0 h\u1ecfng do \u0111\u1ed9 d\u00e0y gi\u1ea3m, kh\u1ea3 n\u0103ng b\u1ea3o v\u1ec7 m\u00e9p b\u1ecb suy y\u1ebfu v\u00e0 s\u1ef1 t\u1eadp trung \u1ee9ng su\u1ea5t t\u0103ng cao.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Do \u0111\u00f3, \u0111\u1ec3 n\u00e2ng cao hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t wafer, c\u1ea7n ph\u1ea3i t\u1eadp trung m\u1ea1nh m\u1ebd v\u00e0o:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>T\u1ed1i \u01b0u h\u00f3a \u0111\u1ed9 b\u1ec1n m\u00e9p<\/li>\n\n\n\n<li>C\u1ea3i ti\u1ebfn thi\u1ebft k\u1ebf v\u00e1t c\u1ea1nh<\/li>\n\n\n\n<li>Ki\u1ec3m so\u00e1t \u00e1p su\u1ea5t \u0111\u00e1nh b\u00f3ng<\/li>\n\n\n\n<li>T\u1ed1i \u01b0u h\u00f3a t\u1ed1c \u0111\u1ed9 quay<\/li>\n\n\n\n<li>N\u00e2ng cao t\u00ednh \u1ed5n \u0111\u1ecbnh c\u1ee7a qu\u00e1 tr\u00ecnh<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">B\u1eb1ng c\u00e1ch ki\u1ec3m so\u00e1t c\u1ea9n th\u1eadn c\u00e1c y\u1ebfu t\u1ed1 n\u00e0y, c\u00f3 th\u1ec3 gi\u1ea3m \u0111\u00e1ng k\u1ec3 nguy c\u01a1 n\u1ee9t v\u1ee1, t\u1eeb \u0111\u00f3 gi\u00fap t\u0103ng n\u0103ng su\u1ea5t v\u00e0 n\u00e2ng cao \u0111\u1ed9 tin c\u1eady trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t t\u1ea5m wafer silica nung ch\u1ea3y.<\/p>","protected":false},"excerpt":{"rendered":"<p>1. Introduction Double-sided polishing (DSP) is the final and most critical step in the mechanical processing of fused silica glass wafers. It is also the longest processing stage and plays a decisive role in final product quality. During this process, common surface defects include pits, scratches, edge chipping, cracks, and complete wafer breakage. Among these, [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":3059,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[1],"tags":[1373,1366,1367,1370,506,1352,1379,1375,1376,1377,1350,1351,1372,1369,1368,1365,1371,1364,1378,1374],"class_list":["post-3058","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-chamfering-process","tag-double-sided-polishing","tag-dsp-process","tag-edge-chipping","tag-fused-silica-wafer","tag-glass-wafer","tag-microcrack-propagation","tag-normal-stress","tag-optical-glass-wafer","tag-precision-polishing","tag-quartz-wafer","tag-semiconductor-substrate","tag-shear-stress","tag-ultra-thin-wafer-processing","tag-wafer-breakage","tag-wafer-cracking","tag-wafer-edge-strength","tag-wafer-fracture-mechanism","tag-wafer-manufacturing-defects","tag-wafer-polishing-stress"],"_links":{"self":[{"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/posts\/3058","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/comments?post=3058"}],"version-history":[{"count":1,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/posts\/3058\/revisions"}],"predecessor-version":[{"id":3060,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/posts\/3058\/revisions\/3060"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/media\/3059"}],"wp:attachment":[{"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/media?parent=3058"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/categories?post=3058"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/tags?post=3058"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}