{"id":2856,"date":"2026-05-14T01:43:16","date_gmt":"2026-05-14T01:43:16","guid":{"rendered":"https:\/\/www.fuyao-quartz.com\/?p=2856"},"modified":"2026-05-14T01:43:29","modified_gmt":"2026-05-14T01:43:29","slug":"why-quartz-is-used-in-semiconductor-manufacturing-equipment","status":"publish","type":"post","link":"https:\/\/www.fuyao-quartz.com\/vi\/why-quartz-is-used-in-semiconductor-manufacturing-equipment\/","title":{"rendered":"T\u1ea1i sao th\u1ea1ch anh \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn"},"content":{"rendered":"<p class=\"wp-block-paragraph\">Ng\u00e0nh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn hi\u1ec7n \u0111\u1ea1i ph\u1ee5 thu\u1ed9c v\u00e0o c\u00e1c quy tr\u00ecnh c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c c\u1ef1c cao v\u00e0 \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t ch\u1eb7t ch\u1ebd v\u1ec1 m\u1ee9c \u0111\u1ed9 \u00f4 nhi\u1ec5m. T\u1eeb qu\u00e1 tr\u00ecnh ch\u1ebf t\u1ea1o t\u1ea5m wafer \u0111\u1ebfn x\u1eed l\u00fd nhi\u1ec7t v\u00e0 x\u1eed l\u00fd b\u1eb1ng plasma, m\u1ecdi v\u1eadt li\u1ec7u \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn \u0111\u1ec1u ph\u1ea3i ch\u1ecbu \u0111\u01b0\u1ee3c m\u00f4i tr\u01b0\u1eddng ho\u1ea1t \u0111\u1ed9ng kh\u1eafc nghi\u1ec7t \u0111\u1ed3ng th\u1eddi duy tr\u00ec \u0111\u1ed9 tinh khi\u1ebft c\u1ef1c cao. Trong s\u1ed1 t\u1ea5t c\u1ea3 c\u00e1c v\u1eadt li\u1ec7u k\u1ef9 thu\u1eadt hi\u1ec7n c\u00f3, th\u1ea1ch anh \u0111\u00e3 tr\u1edf th\u00e0nh m\u1ed9t trong nh\u1eefng v\u1eadt li\u1ec7u \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i nh\u1ea5t trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">S\u1ef1 k\u1ebft h\u1ee3p \u0111\u1ed9c \u0111\u00e1o gi\u1eefa t\u00ednh \u1ed5n \u0111\u1ecbnh nhi\u1ec7t, kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n h\u00f3a h\u1ecdc, \u0111\u1ed9 trong su\u1ed1t quang h\u1ecdc v\u00e0 \u0111\u1eb7c t\u00ednh \u00f4 nhi\u1ec5m c\u1ef1c th\u1ea5p \u0111\u00e3 khi\u1ebfn th\u1ea1ch anh tr\u1edf th\u00e0nh v\u1eadt li\u1ec7u kh\u00f4ng th\u1ec3 thi\u1ebfu trong c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">B\u00e0i vi\u1ebft n\u00e0y gi\u1ea3i th\u00edch l\u00fd do t\u1ea1i sao <a href=\"https:\/\/www.fuyao-quartz.com\/vi\/products\/\">th\u1ea1ch anh<\/a> \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn, n\u01a1i c\u00e1c b\u1ed9 ph\u1eadn th\u01b0\u1eddng s\u1eed d\u1ee5ng th\u1ea1ch anh, v\u00e0 c\u00e1ch c\u00e1c t\u00ednh ch\u1ea5t v\u1eadt li\u1ec7u c\u1ee7a n\u00f3 h\u1ed7 tr\u1ee3 c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-large\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"1024\" src=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/03\/Custom-Design-Quartz-Boats-for-Semiconductor-Processing-7-1-1024x1024.jpg\" alt=\"\" class=\"wp-image-2513\" srcset=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/03\/Custom-Design-Quartz-Boats-for-Semiconductor-Processing-7-1-1024x1024.jpg 1024w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/03\/Custom-Design-Quartz-Boats-for-Semiconductor-Processing-7-1-300x300.jpg 300w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/03\/Custom-Design-Quartz-Boats-for-Semiconductor-Processing-7-1-150x150.jpg 150w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/03\/Custom-Design-Quartz-Boats-for-Semiconductor-Processing-7-1-768x768.jpg 768w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/03\/Custom-Design-Quartz-Boats-for-Semiconductor-Processing-7-1-1536x1536.jpg 1536w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/03\/Custom-Design-Quartz-Boats-for-Semiconductor-Processing-7-1-2048x2048.jpg 2048w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/03\/Custom-Design-Quartz-Boats-for-Semiconductor-Processing-7-1-12x12.jpg 12w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/03\/Custom-Design-Quartz-Boats-for-Semiconductor-Processing-7-1-600x600.jpg 600w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/03\/Custom-Design-Quartz-Boats-for-Semiconductor-Processing-7-1-100x100.jpg 100w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">Hi\u1ec3u v\u1ec1 th\u1ea1ch anh trong c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Trong ng\u00e0nh s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn, thu\u1eadt ng\u1eef \u201cth\u1ea1ch anh\u201d th\u01b0\u1eddng d\u00f9ng \u0111\u1ec3 ch\u1ec9 <strong>v\u1eadt li\u1ec7u th\u1ea1ch anh nung ch\u1ea3y ho\u1eb7c silica nung ch\u1ea3y c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao<\/strong> \u0111\u01b0\u1ee3c ch\u1ebf t\u1ea1o ch\u1ee7 y\u1ebfu t\u1eeb dioxit silic (SiO\u2082). Kh\u00e1c v\u1edbi th\u1ee7y tinh c\u00f4ng nghi\u1ec7p th\u00f4ng th\u01b0\u1eddng, th\u1ea1ch anh d\u00f9ng trong ng\u00e0nh b\u00e1n d\u1eabn c\u00f3 h\u00e0m l\u01b0\u1ee3ng t\u1ea1p ch\u1ea5t kim lo\u1ea1i c\u1ef1c th\u1ea5p v\u00e0 s\u1edf h\u1eefu c\u00e1c t\u00ednh ch\u1ea5t v\u1eadt l\u00fd \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t ch\u1eb7t ch\u1ebd.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c linh ki\u1ec7n th\u1ea1ch anh c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t b\u1eb1ng c\u00e1c k\u1ef9 thu\u1eadt gia c\u00f4ng ch\u00ednh x\u00e1c \u0111\u1ec3 \u0111\u00e1p \u1ee9ng c\u00e1c ti\u00eau chu\u1ea9n nghi\u00eam ng\u1eb7t c\u1ee7a thi\u1ebft b\u1ecb b\u00e1n d\u1eabn.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c th\u00e0nh ph\u1ea7n n\u00e0y th\u01b0\u1eddng ho\u1ea1t \u0111\u1ed9ng trong:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>M\u00f4i tr\u01b0\u1eddng nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n\n\n\n<li>Bu\u1ed3ng ch\u00e2n kh\u00f4ng<\/li>\n\n\n\n<li>C\u00e1c qu\u00e1 tr\u00ecnh h\u00f3a h\u1ecdc \u0103n m\u00f2n<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng plasma<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng x\u1eed l\u00fd t\u1ea5m wafer<\/li>\n\n\n\n<li>C\u00e1c \u1ee9ng d\u1ee5ng li\u00ean quan \u0111\u1ebfn truy\u1ec1n qua \u00e1nh s\u00e1ng v\u00e0 tia UV<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Ngay c\u1ea3 nh\u1eefng t\u1ea1p ch\u1ea5t si\u00eau nh\u1ecf c\u0169ng c\u00f3 th\u1ec3 l\u00e0m gi\u1ea3m n\u0103ng su\u1ea5t t\u1ea5m wafer. Do \u0111\u00f3, vi\u1ec7c l\u1ef1a ch\u1ecdn v\u1eadt li\u1ec7u c\u00f3 \u1ea3nh h\u01b0\u1edfng tr\u1ef1c ti\u1ebfp \u0111\u1ebfn s\u1ef1 \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh v\u00e0 hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Nh\u1eefng l\u00fd do ch\u00ednh khi\u1ebfn th\u1ea1ch anh \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">1. Kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn th\u01b0\u1eddng ph\u1ea3i ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 v\u01b0\u1ee3t qu\u00e1 <strong>1000\u00b0C<\/strong>, \u0111\u1eb7c bi\u1ec7t l\u00e0 trong c\u00e1c qu\u00e1 tr\u00ecnh oxy h\u00f3a, khu\u1ebfch t\u00e1n, \u1ee7 v\u00e0 l\u1eafng \u0111\u1ecdng.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Quartz cung c\u1ea5p:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Nhi\u1ec7t \u0111\u1ed9 l\u00e0m m\u1ec1m cao<\/li>\n\n\n\n<li>H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t th\u1ea5p<\/li>\n\n\n\n<li>Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t tuy\u1ec7t v\u1eddi<\/li>\n\n\n\n<li>\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc trong c\u00e1c chu k\u1ef3 gia nhi\u1ec7t l\u1eb7p \u0111i l\u1eb7p l\u1ea1i<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Kh\u00f4ng gi\u1ed1ng nh\u01b0 c\u00e1c v\u1eadt li\u1ec7u th\u1ee7y tinh th\u00f4ng th\u01b0\u1eddng, th\u1ea1ch anh c\u00f3 th\u1ec3 ch\u1ecbu \u0111\u01b0\u1ee3c s\u1ef1 thay \u0111\u1ed5i nhi\u1ec7t \u0111\u1ed9 \u0111\u1ed9t ng\u1ed9t m\u00e0 kh\u00f4ng b\u1ecb n\u1ee9t hay bi\u1ebfn d\u1ea1ng.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u0110i\u1ec1u n\u00e0y khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c m\u00f4i tr\u01b0\u1eddng l\u00f2 nung v\u00e0 h\u1ec7 th\u1ed1ng x\u1eed l\u00fd nhi\u1ec7t.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c \u1ee9ng d\u1ee5ng \u0111i\u1ec3n h\u00ecnh bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u1ed0ng l\u00f2 th\u1ea1ch anh<\/li>\n\n\n\n<li>\u1ed0ng khu\u1ebfch t\u00e1n<\/li>\n\n\n\n<li><a href=\"https:\/\/www.fuyao-quartz.com\/vi\/product\/custom-quartz-boats-for-semiconductor-processing-high-purity-fused-silica-wafer-carriers\/\">Khay \u0111\u1ef1ng t\u1ea5m th\u1ea1ch anh<\/a><\/li>\n\n\n\n<li>Bu\u1ed3ng x\u1eed l\u00fd<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2. \u0110\u1ed9 tinh khi\u1ebft c\u1ef1c cao gi\u00fap gi\u1ea3m nguy c\u01a1 nhi\u1ec5m b\u1ea9n<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Ki\u1ec3m so\u00e1t \u00f4 nhi\u1ec5m l\u00e0 m\u1ed9t trong nh\u1eefng th\u00e1ch th\u1ee9c quan tr\u1ecdng nh\u1ea5t trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c h\u1ea1t kim lo\u1ea1i vi l\u01b0\u1ee3ng c\u00f3 th\u1ec3 g\u00e2y ra c\u00e1c khuy\u1ebft t\u1eadt \u1edf quy m\u00f4 nanomet v\u00e0 \u1ea3nh h\u01b0\u1edfng \u0111\u00e1ng k\u1ec3 \u0111\u1ebfn hi\u1ec7u su\u1ea5t c\u1ee7a chip.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Th\u1ea1ch anh c\u1ea5p b\u00e1n d\u1eabn mang l\u1ea1i:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>H\u00e0m l\u01b0\u1ee3ng t\u1ea1p ch\u1ea5t c\u1ef1c th\u1ea5p<\/li>\n\n\n\n<li>S\u1ea3n sinh h\u1ea1t \u1edf m\u1ee9c t\u1ed1i thi\u1ec3u<\/li>\n\n\n\n<li>\u0110\u1eb7c t\u00ednh tho\u00e1t kh\u00ed th\u1ea5p<\/li>\n\n\n\n<li>\u0110\u1ed9 s\u1ea1ch quy tr\u00ecnh tuy\u1ec7t v\u1eddi<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Th\u1ea1ch anh nung c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao c\u00f3 th\u1ec3 ch\u1ee9a t\u1ea1p ch\u1ea5t kim lo\u1ea1i \u1edf m\u1ee9c ch\u1ec9 v\u00e0i ph\u1ea7n tri\u1ec7u ho\u1eb7c th\u1eadm ch\u00ed v\u00e0i ph\u1ea7n t\u1ef7.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Do th\u1ea1ch anh c\u00f3 t\u00ednh \u1ed5n \u0111\u1ecbnh h\u00f3a h\u1ecdc v\u00e0 kh\u00f4ng d\u1ec5 d\u00e0ng gi\u1ea3i ph\u00f3ng c\u00e1c ch\u1ea5t g\u00e2y \u00f4 nhi\u1ec5m trong qu\u00e1 tr\u00ecnh gia c\u00f4ng, n\u00ean n\u00f3 gi\u00fap duy tr\u00ec n\u0103ng su\u1ea5t cao c\u1ee7a c\u00e1c t\u1ea5m wafer.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3. Kh\u1ea3 n\u0103ng ch\u1ed1ng h\u00f3a ch\u1ea5t v\u01b0\u1ee3t tr\u1ed9i<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn s\u1eed d\u1ee5ng c\u00e1c h\u00f3a ch\u1ea5t c\u00f3 t\u00ednh \u0103n m\u00f2n m\u1ea1nh, bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>H\u1ed7n h\u1ee3p axit hydrofluoric<\/li>\n\n\n\n<li>Axit nitric<\/li>\n\n\n\n<li>Axit sunfuric<\/li>\n\n\n\n<li>Kh\u00ed c\u00f4ng nghi\u1ec7p<\/li>\n\n\n\n<li>H\u00f3a ch\u1ea5t t\u1ea9y r\u1eeda<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Th\u1ea1ch anh th\u1ec3 hi\u1ec7n kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n v\u01b0\u1ee3t tr\u1ed9i trong nhi\u1ec1u m\u00f4i tr\u01b0\u1eddng \u0103n m\u00f2n v\u00e0 v\u1eabn gi\u1eef \u0111\u01b0\u1ee3c t\u00ednh to\u00e0n v\u1eb9n c\u1ea5u tr\u00fac ngay c\u1ea3 khi ti\u1ebfp x\u00fac trong th\u1eddi gian d\u00e0i.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">T\u00ednh \u1ed5n \u0111\u1ecbnh h\u00f3a h\u1ecdc c\u1ee7a n\u00f3 cho ph\u00e9p v\u1eadn h\u00e0nh \u0111\u00e1ng tin c\u1eady trong c\u00e1c h\u1ec7 th\u1ed1ng x\u1eed l\u00fd \u01b0\u1edbt v\u00e0 bu\u1ed3ng x\u1eed l\u00fd.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">M\u1ed9t s\u1ed1 v\u00ed d\u1ee5 \u0111i\u1ec3n h\u00ecnh bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u1ed0ng ph\u1ea3n \u1ee9ng b\u1eb1ng th\u1ea1ch anh<\/li>\n\n\n\n<li>B\u00ecnh ch\u1ee9a d\u00f9ng trong qu\u00e1 tr\u00ecnh h\u00f3a h\u1ecdc<\/li>\n\n\n\n<li>C\u00e1c b\u1ed9 ph\u1eadn c\u1ee7a thi\u1ebft b\u1ecb kh\u1eafc \u01b0\u1edbt<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">4. T\u00ednh ch\u1ea5t truy\u1ec1n d\u1eabn quang h\u1ecdc xu\u1ea5t s\u1eafc<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Nhi\u1ec1u quy tr\u00ecnh s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn ph\u1ee5 thu\u1ed9c v\u00e0o n\u0103ng l\u01b0\u1ee3ng tia c\u1ef1c t\u00edm v\u00e0 h\u1ed3ng ngo\u1ea1i.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Th\u1ea1ch anh s\u1edf h\u1eefu c\u00e1c \u0111\u1eb7c t\u00ednh quang h\u1ecdc tuy\u1ec7t v\u1eddi:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0110\u1ed9 truy\u1ec1n qua tia c\u1ef1c t\u00edm cao<\/li>\n\n\n\n<li>\u0110\u1ed9 trong su\u1ed1t quang ph\u1ed5 r\u1ed9ng<\/li>\n\n\n\n<li>H\u1ea5p th\u1ee5 quang h\u1ecdc th\u1ea5p<\/li>\n\n\n\n<li>Hi\u1ec7u su\u1ea5t \u1ed5n \u0111\u1ecbnh \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Nh\u1eefng \u0111\u1eb7c t\u00ednh n\u00e0y \u0111\u1eb7c bi\u1ec7t quan tr\u1ecdng trong:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>H\u1ec7 th\u1ed1ng s\u1ea5y b\u1eb1ng tia UV<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng in th\u1ea1ch b\u1ea3n<\/li>\n\n\n\n<li>Thi\u1ebft b\u1ecb gia c\u00f4ng b\u1eb1ng laser<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng gi\u00e1m s\u00e1t quang h\u1ecdc<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">So v\u1edbi th\u1ee7y tinh th\u00f4ng th\u01b0\u1eddng, th\u1ea1ch anh c\u00f3 hi\u1ec7u su\u1ea5t v\u01b0\u1ee3t tr\u1ed9i h\u01a1n h\u1eb3n trong m\u00f4i tr\u01b0\u1eddng tia c\u1ef1c t\u00edm s\u00e2u.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">5. Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi qu\u00e1 tr\u00ecnh x\u1eed l\u00fd plasma<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Ng\u00e0nh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn ng\u00e0y c\u00e0ng ph\u1ee5 thu\u1ed9c v\u00e0o c\u00e1c c\u00f4ng ngh\u1ec7 d\u1ef1a tr\u00ean plasma:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Kh\u1eafc b\u1eb1ng plasma<\/li>\n\n\n\n<li>PECVD<\/li>\n\n\n\n<li>Gi\u1eb7t kh\u00f4<\/li>\n\n\n\n<li>X\u1eed l\u00fd b\u1ec1 m\u1eb7t<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Th\u1ea1ch anh c\u00f3 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch t\u1ed1t v\u1edbi plasma nh\u1edd:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>T\u00ednh ch\u1ea5t \u0111i\u1ec7n m\u00f4i \u1ed5n \u0111\u1ecbnh<\/li>\n\n\n\n<li>M\u1ee9c \u0111\u1ed9 ph\u00e1t sinh ch\u1ea5t th\u1ea3i th\u1ea5p<\/li>\n\n\n\n<li>\u0110\u1ed9 b\u1ec1n c\u1ee7a quy tr\u00ecnh<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Nhi\u1ec1u bu\u1ed3ng plasma \u0111\u01b0\u1ee3c trang b\u1ecb c\u00e1c b\u1ed9 ph\u1eadn th\u1ea1ch anh ch\u00ednh x\u00e1c, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 gi\u1ea3m thi\u1ec3u s\u1ef1 h\u00ecnh th\u00e0nh h\u1ea1t \u0111\u1ed3ng th\u1eddi duy tr\u00ec t\u00ednh \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">C\u00e1c th\u00e0nh ph\u1ea7n th\u1ea1ch anh th\u00f4ng d\u1ee5ng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Th\u1ea1ch anh xu\u1ea5t hi\u1ec7n d\u01b0\u1edbi nhi\u1ec1u h\u00ecnh th\u1ee9c kh\u00e1c nhau trong c\u00e1c h\u1ec7 th\u1ed1ng s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e1c th\u00e0nh ph\u1ea7n \u0111i\u1ec3n h\u00ecnh bao g\u1ed3m:<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u1ed0ng l\u00f2 nung th\u1ea1ch anh<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c qu\u00e1 tr\u00ecnh oxy h\u00f3a v\u00e0 khu\u1ebfch t\u00e1n \u1edf \u0111i\u1ec1u ki\u1ec7n nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">T\u1ea5m th\u1ea1ch anh d\u1ea1ng thuy\u1ec1n<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">H\u1ed7 tr\u1ee3 v\u00e0 v\u1eadn chuy\u1ec3n c\u00e1c t\u1ea5m wafer qua c\u00e1c h\u1ec7 th\u1ed1ng x\u1eed l\u00fd nhi\u1ec7t.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Nh\u1eabn th\u1ea1ch anh<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c bu\u1ed3ng kh\u1eafc v\u00e0 l\u1eafng \u0111\u1ecdng plasma.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">C\u1eeda s\u1ed5 th\u1ea1ch anh<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Cho ph\u00e9p gi\u00e1m s\u00e1t quang h\u1ecdc v\u00e0 truy\u1ec1n qua tia UV \u0111\u1ed3ng th\u1eddi c\u00e1ch ly c\u00e1c m\u00f4i tr\u01b0\u1eddng qu\u00e1 tr\u00ecnh.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">L\u1ecd th\u1ee7y tinh h\u00ecnh chu\u00f4ng l\u00e0m t\u1eeb th\u1ea1ch anh<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Cung c\u1ea5p c\u00e1c c\u1ea5u tr\u00fac bu\u1ed3ng t\u01b0\u01a1ng th\u00edch v\u1edbi m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">V\u00f2i sen b\u1eb1ng th\u1ea1ch anh<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Ph\u00e2n ph\u1ed1i kh\u00ed qu\u00e1 tr\u00ecnh m\u1ed9t c\u00e1ch \u0111\u1ed3ng \u0111\u1ec1u trong qu\u00e1 tr\u00ecnh l\u1eafng \u0111\u1ecdng.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">C\u00e1c b\u1ed9 ph\u1eadn th\u1ea1ch anh ch\u00ednh x\u00e1c theo y\u00eau c\u1ea7u<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Nhi\u1ec1u thi\u1ebft b\u1ecb b\u00e1n d\u1eabn \u0111\u00f2i h\u1ecfi c\u00e1c c\u1ea5u tr\u00fac th\u1ea1ch anh c\u00f3 h\u00ecnh d\u1ea1ng r\u1ea5t chuy\u00ean bi\u1ec7t, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf ri\u00eang cho t\u1eebng n\u1ec1n t\u1ea3ng thi\u1ebft b\u1ecb.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">T\u1ea1i sao kh\u00f4ng d\u00f9ng k\u00ednh th\u00f4ng th\u01b0\u1eddng?<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">M\u1ed9t c\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p l\u00e0:<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">T\u1ea1i sao c\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn kh\u00f4ng th\u1ec3 \u0111\u01a1n gi\u1ea3n l\u00e0 s\u1eed d\u1ee5ng k\u00ednh?<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00e2u tr\u1ea3 l\u1eddi n\u1eb1m \u1edf c\u00e1c y\u00eau c\u1ea7u v\u1ec1 hi\u1ec7u su\u1ea5t.<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>B\u1ea5t \u0111\u1ed9ng s\u1ea3n<\/th><th>K\u00ednh th\u00f4ng th\u01b0\u1eddng<\/th><th>Th\u1ea1ch anh c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao<\/th><\/tr><\/thead><tbody><tr><td>Kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 t\u1ed1i \u0111a<\/td><td>Th\u1ea5p h\u01a1n<\/td><td>Cao h\u01a1n nhi\u1ec1u<\/td><\/tr><tr><td>Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t<\/td><td>Trung b\u00ecnh<\/td><td>Tuy\u1ec7t v\u1eddi<\/td><\/tr><tr><td>\u0110\u1ed9 truy\u1ec1n qua tia UV<\/td><td>S\u1ed1 l\u01b0\u1ee3ng c\u00f3 h\u1ea1n<\/td><td>Xu\u1ea5t s\u1eafc<\/td><\/tr><tr><td>T\u00ednh \u1ed5n \u0111\u1ecbnh h\u00f3a h\u1ecdc<\/td><td>Trung b\u00ecnh<\/td><td>Tuy\u1ec7t v\u1eddi<\/td><\/tr><tr><td>S\u1ef1 tinh khi\u1ebft<\/td><td>Th\u1ea5p h\u01a1n<\/td><td>Si\u00eau cao<\/td><\/tr><tr><td>Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi ch\u1ea5t b\u00e1n d\u1eabn<\/td><td>S\u1ed1 l\u01b0\u1ee3ng c\u00f3 h\u1ea1n<\/td><td>Tuy\u1ec7t v\u1eddi<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\">M\u1eb7c d\u00f9 k\u00ednh th\u00f4ng th\u01b0\u1eddng c\u00f3 gi\u00e1 r\u1ebb h\u01a1n, nh\u01b0ng n\u00f3 kh\u00f4ng th\u1ec3 \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u0110\u1ed9 tin c\u1eady c\u1ee7a quy tr\u00ecnh v\u00e0 vi\u1ec7c ki\u1ec3m so\u00e1t \u00f4 nhi\u1ec5m lu\u00f4n \u0111\u01b0\u1ee3c \u0111\u1eb7t l\u00ean h\u00e0ng \u0111\u1ea7u.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Nhu c\u1ea7u v\u1ec1 th\u1ea1ch anh trong t\u01b0\u01a1ng lai trong l\u0129nh v\u1ef1c s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Khi c\u00f4ng ngh\u1ec7 b\u00e1n d\u1eabn \u0111ang ti\u1ebfn t\u1edbi:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u00e1c n\u00fat c\u00f4ng ngh\u1ec7 nh\u1ecf h\u01a1n<\/li>\n\n\n\n<li>N\u0103ng su\u1ea5t x\u1eed l\u00fd t\u1ea5m wafer cao h\u01a1n<\/li>\n\n\n\n<li>C\u00f4ng ngh\u1ec7 \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn<\/li>\n\n\n\n<li>Ch\u1ea5t b\u00e1n d\u1eabn h\u1ee3p ch\u1ea5t<\/li>\n\n\n\n<li>C\u00e1c \u1ee9ng d\u1ee5ng tr\u00ed tu\u1ec7 nh\u00e2n t\u1ea1o v\u00e0 t\u00ednh to\u00e1n hi\u1ec7u su\u1ea5t cao<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Y\u00eau c\u1ea7u \u0111\u1ed1i v\u1edbi m\u00f4i tr\u01b0\u1eddng v\u1eadn h\u00e0nh thi\u1ebft b\u1ecb ng\u00e0y c\u00e0ng kh\u1eaft khe h\u01a1n.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Xu h\u01b0\u1edbng n\u00e0y \u0111ang th\u00fac \u0111\u1ea9y nhu c\u1ea7u ng\u00e0y c\u00e0ng t\u0103ng \u0111\u1ed1i v\u1edbi:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>V\u1eadt li\u1ec7u th\u1ea1ch anh c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao h\u01a1n<\/li>\n\n\n\n<li>Dung sai k\u00edch th\u01b0\u1edbc ch\u1eb7t ch\u1ebd h\u01a1n<\/li>\n\n\n\n<li>Ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n<\/li>\n\n\n\n<li>Gia c\u00f4ng th\u1ea1ch anh ch\u00ednh x\u00e1c theo y\u00eau c\u1ea7u<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Th\u1ea1ch anh ti\u1ebfp t\u1ee5c \u0111\u00f3ng vai tr\u00f2 quan tr\u1ecdng trong vi\u1ec7c th\u00fac \u0111\u1ea9y s\u1ef1 ph\u00e1t tri\u1ec3n c\u1ee7a c\u00e1c c\u00f4ng ngh\u1ec7 b\u00e1n d\u1eabn th\u1ebf h\u1ec7 m\u1edbi.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Nh\u1eefng suy ngh\u0129 cu\u1ed1i c\u00f9ng<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">Th\u1ea1ch anh kh\u00f4ng ch\u1ec9 \u0111\u01a1n thu\u1ea7n l\u00e0 v\u1eadt li\u1ec7u ph\u1ee5 tr\u1ee3 b\u00ean trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn. N\u00f3 \u0111\u00f3ng g\u00f3p tr\u1ef1c ti\u1ebfp v\u00e0o s\u1ef1 \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh, vi\u1ec7c gi\u1ea3m thi\u1ec3u \u00f4 nhi\u1ec5m v\u00e0 hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">S\u1ef1 k\u1ebft h\u1ee3p \u0111\u1ed9c \u0111\u00e1o gi\u1eefa \u0111\u1ed9 tinh khi\u1ebft cao, kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t, \u0111\u1ed9 b\u1ec1n h\u00f3a h\u1ecdc v\u00e0 hi\u1ec7u su\u1ea5t quang h\u1ecdc \u0111\u00e3 khi\u1ebfn v\u1eadt li\u1ec7u n\u00e0y tr\u1edf th\u00e0nh m\u1ed9t trong nh\u1eefng v\u1eadt li\u1ec7u kh\u00f4ng th\u1ec3 thi\u1ebfu trong m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">C\u00f9ng v\u1edbi s\u1ef1 ph\u00e1t tri\u1ec3n c\u1ee7a thi\u1ebft b\u1ecb b\u00e1n d\u1eabn, c\u00e1c linh ki\u1ec7n th\u1ea1ch anh ch\u00ednh x\u00e1c s\u1ebd v\u1eabn \u0111\u00f3ng vai tr\u00f2 thi\u1ebft y\u1ebfu trong vi\u1ec7c duy tr\u00ec hi\u1ec7u su\u1ea5t, n\u0103ng su\u1ea5t v\u00e0 \u0111\u1ed9 tin c\u1eady c\u1ee7a quy tr\u00ecnh.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>C\u00e1c c\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p (FAQ)<\/strong><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>T\u1ea1i sao th\u1ea1ch anh l\u1ea1i \u0111\u01b0\u1ee3c \u01b0a chu\u1ed9ng h\u01a1n th\u1ee7y tinh trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn?<\/strong><br>Th\u1ea1ch anh c\u00f3 \u0111\u1ed9 tinh khi\u1ebft, kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t v\u00e0 t\u00ednh \u1ed5n \u0111\u1ecbnh h\u00f3a h\u1ecdc cao h\u01a1n so v\u1edbi th\u1ee7y tinh th\u00f4ng th\u01b0\u1eddng.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>Th\u1ea1ch anh c\u00f3 ch\u1ecbu \u0111\u01b0\u1ee3c nhi\u1ec7t \u0111\u1ed9 trong l\u00f2 b\u00e1n d\u1eabn kh\u00f4ng?<\/strong><br>\u0110\u00fang v\u1eady. C\u00e1c linh ki\u1ec7n th\u1ea1ch anh c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao c\u00f3 th\u1ec3 ho\u1ea1t \u0111\u1ed9ng trong m\u00f4i tr\u01b0\u1eddng c\u00f3 nhi\u1ec7t \u0111\u1ed9 tr\u00ean 1000\u00b0C.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>Nh\u1eefng linh ki\u1ec7n b\u00e1n d\u1eabn n\u00e0o th\u01b0\u1eddng \u0111\u01b0\u1ee3c l\u00e0m t\u1eeb th\u1ea1ch anh?<\/strong><br>\u1ed0ng l\u00f2, khay \u0111\u1ef1ng wafer, v\u00f2ng \u0111\u1ec7m, b\u00ecnh thu\u1ef7 tinh h\u00ecnh chu\u00f4ng, c\u1eeda s\u1ed5 quang h\u1ecdc v\u00e0 c\u00e1c b\u1ed9 ph\u1eadn c\u1ee7a bu\u1ed3ng x\u1eed l\u00fd.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><strong>Th\u1ea1ch anh h\u1ee3p nh\u1ea5t c\u00f3 ph\u1ea3i l\u00e0 th\u1ea1ch anh kh\u00f4ng?<\/strong><br>C\u1ea3 hai \u0111\u1ec1u ch\u1ee7 y\u1ebfu l\u00e0 v\u1eadt li\u1ec7u dioxit silic, m\u1eb7c d\u00f9 ph\u01b0\u01a1ng ph\u00e1p s\u1ea3n xu\u1ea5t v\u00e0 c\u00e1c \u0111\u1eb7c t\u00ednh v\u1ec1 \u0111\u1ed9 tinh khi\u1ebft c\u00f3 th\u1ec3 kh\u00e1c nhau t\u00f9y thu\u1ed9c v\u00e0o y\u00eau c\u1ea7u c\u1ee7a \u1ee9ng d\u1ee5ng.<\/p>","protected":false},"excerpt":{"rendered":"<p>Modern semiconductor manufacturing relies on extremely precise and contamination-controlled processes. From wafer fabrication to thermal processing and plasma treatment, every material used inside semiconductor equipment must withstand harsh operating environments while maintaining ultra-high purity. Among all available engineering materials, quartz has become one of the most widely used materials in semiconductor equipment. Its unique combination [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2513,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[1],"tags":[1124,544,563,846,676,675,1126,551,1127,768,964,1122,1128,766,1121,1123,1105,545,131,42,69,561,1125,107],"class_list":["post-2856","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-custom-quartz-components","tag-fused-quartz","tag-fused-silica","tag-high-purity-fused-silica-2","tag-high-purity-quartz-2","tag-optical-quartz","tag-plasma-etching","tag-precision-quartz-parts","tag-quartz-applications","tag-quartz-bell-jar","tag-quartz-furnace-tube","tag-quartz-in-semiconductor-manufacturing","tag-quartz-process-tube","tag-quartz-ring","tag-quartz-semiconductor","tag-quartz-shower-head","tag-quartz-wafer-boat","tag-quartz-window","tag-semiconductor-equipment","tag-semiconductor-fabrication","tag-semiconductor-materials","tag-semiconductor-quartz-components","tag-thermal-processing","tag-wafer-processing"],"_links":{"self":[{"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/posts\/2856","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/comments?post=2856"}],"version-history":[{"count":1,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/posts\/2856\/revisions"}],"predecessor-version":[{"id":2857,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/posts\/2856\/revisions\/2857"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/media\/2513"}],"wp:attachment":[{"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/media?parent=2856"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/categories?post=2856"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/tags?post=2856"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}