{"id":2661,"date":"2026-04-13T06:09:54","date_gmt":"2026-04-13T06:09:54","guid":{"rendered":"https:\/\/www.fuyao-quartz.com\/?p=2661"},"modified":"2026-04-13T06:19:05","modified_gmt":"2026-04-13T06:19:05","slug":"quartz-glassware-and-machined-quartz-components-in-engineering-applications","status":"publish","type":"post","link":"https:\/\/www.fuyao-quartz.com\/vi\/quartz-glassware-and-machined-quartz-components-in-engineering-applications\/","title":{"rendered":"\u0110\u1ed3 th\u1ee7y tinh th\u1ea1ch anh v\u00e0 c\u00e1c b\u1ed9 ph\u1eadn th\u1ea1ch anh gia c\u00f4ng trong c\u00e1c \u1ee9ng d\u1ee5ng k\u1ef9 thu\u1eadt"},"content":{"rendered":"

1. Gi\u1edbi thi\u1ec7u <\/h2>\n\n\n\n

\u0110\u1ed3 th\u1ee7y tinh th\u1ea1ch anh v\u00e0 c\u00e1c b\u1ed9 ph\u1eadn th\u1ea1ch anh gia c\u00f4ng <\/a>\u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn, k\u1ef9 thu\u1eadt quang h\u1ecdc, x\u1eed l\u00fd nhi\u1ec7t \u0111\u1ed9 cao v\u00e0 c\u00e1c h\u1ec7 th\u1ed1ng ch\u00e2n kh\u00f4ng. Khi c\u00f4ng ngh\u1ec7 b\u00e1n d\u1eabn ti\u1ebfn t\u1edbi c\u00e1c n\u00fat c\u00f4ng ngh\u1ec7 d\u01b0\u1edbi 7 nm v\u00e0 c\u00e1c h\u1ec7 th\u1ed1ng quang t\u1eed hi\u1ec7u su\u1ea5t cao ng\u00e0y c\u00e0ng ph\u00e1t tri\u1ec3n, nhu c\u1ea7u v\u1ec1 v\u1eadt li\u1ec7u th\u1ea1ch anh c\u00f3 \u0111\u1ed9 tinh khi\u1ebft c\u1ef1c cao ti\u1ebfp t\u1ee5c gia t\u0103ng.<\/p>\n\n\n\n

Theo c\u00e1c ph\u00e2n t\u00edch ng\u00e0nh t\u1eeb T\u1ea1p ch\u00ed Thi\u1ebft b\u1ecb v\u00e0 V\u1eadt li\u1ec7u B\u00e1n d\u1eabn Qu\u1ed1c t\u1ebf (SEMI<\/strong>), c\u00e1c linh ki\u1ec7n l\u00e0m t\u1eeb th\u1ea1ch anh l\u00e0 v\u1eadt t\u01b0 ti\u00eau hao kh\u00f4ng th\u1ec3 thi\u1ebfu trong thi\u1ebft b\u1ecb x\u1eed l\u00fd nhi\u1ec7t. Tu\u1ed5i th\u1ecd c\u1ee7a ch\u00fang ch\u1ee7 y\u1ebfu ph\u1ee5 thu\u1ed9c v\u00e0o hi\u1ec7n t\u01b0\u1ee3ng m\u1ecfi do chu k\u1ef3 nhi\u1ec7t (th\u01b0\u1eddng trong \u0111i\u1ec1u ki\u1ec7n ho\u1ea1t \u0111\u1ed9ng tr\u00ean 1000\u00b0C) v\u00e0 m\u1ee9c \u0111\u1ed9 \u00f4 nhi\u1ec5m, ch\u1ee9 kh\u00f4ng ph\u1ea3i do h\u01b0 h\u1ecfng c\u01a1 h\u1ecdc.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

2. \u0110\u1ecbnh ngh\u0129a v\u1eadt li\u1ec7u v\u00e0 c\u01a1 s\u1edf khoa h\u1ecdc<\/h2>\n\n\n\n

Th\u1ea1ch anh nung ch\u1ea3y (silica nung ch\u1ea3y) l\u00e0 m\u1ed9t d\u1ea1ng v\u00f4 \u0111\u1ecbnh h\u00ecnh c\u1ee7a dioxit silic (SiO\u2082) c\u00f3 \u0111\u1ed9 tinh khi\u1ebft c\u1ef1c cao:<\/p>\n\n\n\n

    \n
  • Lo\u1ea1i c\u00f4ng nghi\u1ec7p: \u226599,91% SiO\u2082<\/li>\n\n\n\n
  • Lo\u1ea1i d\u00f9ng trong ng\u00e0nh b\u00e1n d\u1eabn: \u226599,991% SiO\u2082<\/li>\n\n\n\n
  • Lo\u1ea1i quang h\u1ecdc c\u00f3 \u0111\u1ed9 tinh khi\u1ebft c\u1ef1c cao: l\u00ean \u0111\u1ebfn 99,9991% SiO\u2082<\/li>\n<\/ul>\n\n\n\n

    Kh\u00f4ng gi\u1ed1ng nh\u01b0 th\u1ea1ch anh tinh th\u1ec3, silica nung ch\u1ea3y kh\u00f4ng c\u00f3 ranh gi\u1edbi h\u1ea1t, \u0111i\u1ec1u n\u00e0y gi\u00fap gi\u1ea3m \u0111\u00e1ng k\u1ec3 m\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt v\u00e0 n\u00e2ng cao \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u00e0 quang h\u1ecdc.<\/p>\n\n\n\n

    C\u00e1c t\u00ednh ch\u1ea5t v\u1eadt l\u00fd ch\u00ednh<\/h3>\n\n\n\n
      \n
    • H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t: ~0,5 \u00d7 10\u207b\u2076 \/K (20\u2013300\u00b0C)<\/li>\n\n\n\n
    • \u0110i\u1ec3m n\u00f3ng ch\u1ea3y: ~1665\u00b0C<\/li>\n\n\n\n
    • Nhi\u1ec7t \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng li\u00ean t\u1ee5c: 1100\u20131200\u00b0C<\/li>\n\n\n\n
    • Gi\u1edbi h\u1ea1n truy\u1ec1n qua tia UV: ~180 nm<\/li>\n\n\n\n
    • M\u1eadt \u0111\u1ed9: ~2,2 g\/cm\u00b3<\/li>\n<\/ul>\n\n\n\n

      \ud83d\udccc Ngu\u1ed3n d\u1eef li\u1ec7u: B\u1ea3ng d\u1eef li\u1ec7u k\u1ef9 thu\u1eadt v\u1ec1 th\u1ee7y tinh silic h\u1ee3p nh\u1ea5t c\u1ee7a Corning, C\u1ea9m nang v\u1ec1 th\u1ee7y tinh th\u1ea1ch anh c\u1ee7a Heraeus<\/p>\n\n\n\n

      3. Quy tr\u00ecnh s\u1ea3n xu\u1ea5t v\u00e0 ti\u00eau chu\u1ea9n ng\u00e0nh<\/h2>\n\n\n\n

      C\u00e1c s\u1ea3n ph\u1ea9m th\u1ee7y tinh th\u1ea1ch anh v\u00e0 c\u00e1c b\u1ed9 ph\u1eadn th\u1ea1ch anh gia c\u00f4ng \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t theo c\u00e1c ti\u00eau chu\u1ea9n c\u00f4ng nghi\u1ec7p nghi\u00eam ng\u1eb7t nh\u1eb1m \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 tinh khi\u1ebft, t\u00ednh \u0111\u1ed3ng nh\u1ea5t v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c v\u1ec1 k\u00edch th\u01b0\u1edbc.<\/p>\n\n\n\n

      3.1 C\u00e1c ti\u00eau chu\u1ea9n ch\u00ednh c\u1ee7a ng\u00e0nh<\/h3>\n\n\n\n
        \n
      • ASTM C1663 \u2013 Ti\u00eau chu\u1ea9n k\u1ef9 thu\u1eadt cho v\u1eadt li\u1ec7u silica nung ch\u1ea3y<\/li>\n\n\n\n
      • ISO 9001 \u2013 H\u1ec7 th\u1ed1ng qu\u1ea3n l\u00fd ch\u1ea5t l\u01b0\u1ee3ng<\/li>\n\n\n\n
      • SEMI F57 \u2013 Ti\u00eau chu\u1ea9n k\u1ef9 thu\u1eadt cho v\u1eadt li\u1ec7u th\u1ea1ch anh c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao d\u00f9ng trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn<\/li>\n<\/ul>\n\n\n\n

        C\u00e1c ti\u00eau chu\u1ea9n n\u00e0y quy \u0111\u1ecbnh:<\/p>\n\n\n\n

          \n
        • H\u00e0m l\u01b0\u1ee3ng t\u1ea1p ch\u1ea5t kim lo\u1ea1i (Fe, Al, Na, K, v.v.)<\/li>\n\n\n\n
        • M\u1eadt \u0111\u1ed9 b\u1ecdt v\u00e0 t\u1ea1p ch\u1ea5t<\/li>\n\n\n\n
        • H\u00e0m l\u01b0\u1ee3ng hydroxyl (OH) \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn \u0111\u1ed9 truy\u1ec1n s\u00e1ng<\/li>\n\n\n\n
        • Dung sai k\u00edch th\u01b0\u1edbc v\u00e0 y\u00eau c\u1ea7u v\u1ec1 \u0111\u1ed9 s\u1ea1ch<\/li>\n<\/ul>\n\n\n\n

          3.2 Quy tr\u00ecnh s\u1ea3n xu\u1ea5t<\/h3>\n\n\n\n
            \n
          1. L\u1ecdc nguy\u00ean li\u1ec7u th\u00f4<\/strong>
            Th\u1ea1ch anh t\u1ef1 nhi\u00ean c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao ho\u1eb7c silica t\u1ed5ng h\u1ee3p \u0111\u01b0\u1ee3c tinh ch\u1ebf h\u00f3a h\u1ecdc \u0111\u1ec3 lo\u1ea1i b\u1ecf c\u00e1c t\u1ea1p ch\u1ea5t kim lo\u1ea1i t\u1ed3n d\u01b0.<\/li>\n\n\n\n
          2. H\u1ee3p kim nhi\u1ec7t \u0111\u1ed9 cao (>1800\u00b0C)<\/strong>
            C\u00e1c quy tr\u00ecnh th\u1ee7y ph\u00e2n b\u1eb1ng h\u1ed3 quang \u0111i\u1ec7n ho\u1eb7c ng\u1ecdn l\u1eeda \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 s\u1ea3n xu\u1ea5t th\u1ee7y tinh silic v\u00f4 \u0111\u1ecbnh h\u00ecnh.<\/li>\n\n\n\n
          3. Quy tr\u00ecnh t\u1ea1o h\u00ecnh<\/strong>
            Bao g\u1ed3m c\u00e1c c\u00f4ng \u0111o\u1ea1n k\u00e9o \u1ed1ng, \u00e9p v\u00e0 \u0111\u00fac ly t\u00e2m \u0111\u1ec3 s\u1ea3n xu\u1ea5t \u0111\u1ed3 th\u1ee7y tinh c\u01a1 b\u1ea3n.<\/li>\n\n\n\n
          4. Gia c\u00f4ng ch\u00ednh x\u00e1c (CNC \/ Laser \/ Si\u00eau \u00e2m)<\/strong>
            \u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 s\u1ea3n xu\u1ea5t m\u1eb7t b\u00edch, c\u1eeda s\u1ed5 quang h\u1ecdc, \u1ed1ng ph\u1ea3n \u1ee9ng v\u00e0 c\u00e1c b\u1ed9 ph\u1eadn k\u1ebft c\u1ea5u.<\/li>\n\n\n\n
          5. Quy tr\u00ecnh \u1ee7<\/strong>
            Qu\u00e1 tr\u00ecnh l\u00e0m ngu\u1ed9i c\u00f3 ki\u1ec3m so\u00e1t gi\u00fap gi\u1ea3m \u1ee9ng su\u1ea5t b\u00ean trong v\u00e0 t\u0103ng c\u01b0\u1eddng \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc.<\/li>\n<\/ol>\n\n\n\n

            \ud83d\udccc Ghi ch\u00fa ng\u00e0nh: Vi\u1ec7c gia c\u00f4ng th\u1ea1ch anh c\u1ea5p b\u00e1n d\u1eabn th\u01b0\u1eddng \u0111\u01b0\u1ee3c th\u1ef1c hi\u1ec7n trong m\u00f4i tr\u01b0\u1eddng ph\u00f2ng s\u1ea1ch \u0111\u1ea1t ti\u00eau chu\u1ea9n ISO Class 5\u20137 \u0111\u1ec3 ng\u0103n ng\u1eeba \u00f4 nhi\u1ec5m h\u1ea1t.<\/p>\n\n\n\n

            4. C\u00e1c b\u1ed9 ph\u1eadn th\u1ea1ch anh gia c\u00f4ng<\/h2>\n\n\n\n

            C\u00e1c b\u1ed9 ph\u1eadn th\u1ea1ch anh gia c\u00f4ng l\u00e0 nh\u1eefng chi ti\u1ebft k\u1ef9 thu\u1eadt ch\u1ee9c n\u0103ng \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u00f2i h\u1ecfi \u0111\u1ed9 ch\u00ednh x\u00e1c cao v\u00e0 \u0111\u1ed9 tin c\u1eady cao, ch\u1ee9 kh\u00f4ng ph\u1ea3i l\u00e0 nh\u1eefng s\u1ea3n ph\u1ea9m th\u1ee7y tinh th\u00f4ng th\u01b0\u1eddng.<\/p>\n\n\n\n

            4.1 C\u00e1c th\u00e0nh ph\u1ea7n \u0111i\u1ec3n h\u00ecnh<\/h3>\n\n\n\n
              \n
            • \u1ed0ng ph\u1ea3n \u1ee9ng b\u00e1n d\u1eabn<\/li>\n\n\n\n
            • C\u1eeda s\u1ed5 quang h\u1ecdc v\u00e0 c\u1eeda s\u1ed5 quan s\u00e1t laser<\/li>\n\n\n\n
            • C\u1eeda s\u1ed5 bu\u1ed3ng ch\u00e2n kh\u00f4ng<\/li>\n\n\n\n
            • M\u1eb7t b\u00edch v\u00e0 v\u00f2ng \u0111\u1ec7m b\u1eb1ng th\u1ea1ch anh<\/li>\n\n\n\n
            • Gi\u00e1 \u0111\u1ee1 k\u1ebft c\u1ea5u ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n<\/ul>\n\n\n\n

              4.2 Y\u00eau c\u1ea7u v\u1ec1 \u0111\u1ed9 ch\u00ednh x\u00e1c<\/h3>\n\n\n\n
                \n
              • Dung sai k\u00edch th\u01b0\u1edbc: \u00b10,01 mm (lo\u1ea1i ch\u00ednh x\u00e1c)<\/li>\n\n\n\n
              • \u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t: Ra \u2264 0,2\u20130,4 \u03bcm (lo\u1ea1i d\u00f9ng trong quang h\u1ecdc)<\/li>\n\n\n\n
              • \u0110\u1ed9 ph\u1eb3ng: l\u00ean \u0111\u1ebfn \u03bb\/10 cho c\u00e1c \u1ee9ng d\u1ee5ng quang h\u1ecdc cao c\u1ea5p<\/li>\n<\/ul>\n\n\n\n

                \ud83d\udccc T\u00e0i li\u1ec7u tham kh\u1ea3o k\u1ef9 thu\u1eadt: H\u01b0\u1edbng d\u1eabn gia c\u00f4ng th\u1ea1ch anh c\u1ee7a Heraeus, Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt c\u1ee7a Momentive<\/p>\n\n\n\n

                5. \u1ee8ng d\u1ee5ng trong k\u1ef9 thu\u1eadt<\/h2>\n\n\n\n

                5.1 S\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn<\/h3>\n\n\n\n

                C\u00e1c linh ki\u1ec7n th\u1ea1ch anh \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong:<\/p>\n\n\n\n

                  \n
                • H\u1ec7 th\u1ed1ng l\u00f2 khu\u1ebfch t\u00e1n<\/li>\n\n\n\n
                • Bu\u1ed3ng l\u1eafng \u0111\u1ecdng h\u00f3a h\u1ecdc t\u1eeb pha h\u01a1i (CVD)<\/li>\n\n\n\n
                • Thi\u1ebft b\u1ecb kh\u1eafc plasma<\/li>\n\n\n\n
                • C\u00e1c quy tr\u00ecnh oxy h\u00f3a t\u1ea5m wafer<\/li>\n<\/ul>\n\n\n\n

                  D\u1eef li\u1ec7u ng\u00e0nh t\u1eeb SEMI cho th\u1ea5y c\u00e1c v\u1eadt t\u01b0 ti\u00eau hao b\u1eb1ng th\u1ea1ch anh chi\u1ebfm m\u1ed9t ph\u1ea7n \u0111\u00e1ng k\u1ec3 trong c\u00e1c v\u1eadt li\u1ec7u b\u1ea3o tr\u00ec c\u1ee7a thi\u1ebft b\u1ecb x\u1eed l\u00fd nhi\u1ec7t, v\u1edbi s\u1ef1 suy gi\u1ea3m ch\u1ee7 y\u1ebfu do qu\u00e1 tr\u00ecnh thay \u0111\u1ed5i nhi\u1ec7t \u0111\u1ed9 l\u1eb7p \u0111i l\u1eb7p l\u1ea1i \u1edf nhi\u1ec7t \u0111\u1ed9 tr\u00ean 1000\u00b0C v\u00e0 s\u1ef1 nhi\u1ec5m b\u1ea9n b\u1ec1 m\u1eb7t.<\/p>\n\n\n\n

                  5.2 H\u1ec7 th\u1ed1ng quang h\u1ecdc v\u00e0 laser<\/h3>\n\n\n\n

                  Th\u1ee7y tinh th\u1ea1ch anh c\u00f3 kh\u1ea3 n\u0103ng truy\u1ec1n s\u00e1ng tuy\u1ec7t v\u1eddi trong d\u1ea3i b\u01b0\u1edbc s\u00f3ng t\u1eeb tia c\u1ef1c t\u00edm s\u00e2u \u0111\u1ebfn tia h\u1ed3ng ngo\u1ea1i g\u1ea7n:<\/p>\n\n\n\n

                    \n
                  • \u0110\u1ed9 trong su\u1ed1t cao \u0111\u1ed1i v\u1edbi tia UV (xu\u1ed1ng \u0111\u1ebfn ~180 nm)<\/li>\n\n\n\n
                  • N\u1ec1n hu\u1ef3nh quang th\u1ea5p<\/li>\n\n\n\n
                  • Ng\u01b0\u1ee1ng ch\u1ecbu t\u00e1c \u0111\u1ed9ng c\u1ee7a tia laser cao<\/li>\n<\/ul>\n\n\n\n

                    C\u00e1c \u1ee9ng d\u1ee5ng bao g\u1ed3m:<\/p>\n\n\n\n

                      \n
                    • Laser Excimer (193 nm, 248 nm)<\/li>\n\n\n\n
                    • H\u1ec7 th\u1ed1ng quang ph\u1ed5<\/li>\n\n\n\n
                    • Thi\u1ebft b\u1ecb quang h\u1ecdc h\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5<\/li>\n<\/ul>\n\n\n\n

                      5.3 H\u1ec7 th\u1ed1ng ch\u00e2n kh\u00f4ng v\u00e0 n\u0103ng l\u01b0\u1ee3ng cao<\/h3>\n\n\n\n

                      V\u1eadt li\u1ec7u th\u1ea1ch anh \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong:<\/p>\n\n\n\n

                        \n
                      • Bu\u1ed3ng ch\u00e2n kh\u00f4ng<\/li>\n\n\n\n
                      • H\u1ec7 th\u1ed1ng x\u1eed l\u00fd plasma<\/li>\n\n\n\n
                      • Thi\u1ebft b\u1ecb v\u1eadt l\u00fd n\u0103ng l\u01b0\u1ee3ng cao<\/li>\n<\/ul>\n\n\n\n

                        C\u00e1c b\u00e1o c\u00e1o nghi\u00ean c\u1ee9u v\u1eadt li\u1ec7u c\u1ee7a NASA nh\u1ea5n m\u1ea1nh r\u1eb1ng silica nung ch\u1ea3y l\u00e0 v\u1eadt li\u1ec7u \u0111\u01b0\u1ee3c \u01b0a chu\u1ed9ng cho c\u00e1c h\u1ec7 th\u1ed1ng quang h\u1ecdc v\u0169 tr\u1ee5 nh\u1edd t\u00ednh \u1ed5n \u0111\u1ecbnh trong m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng b\u1ee9c x\u1ea1.<\/p>\n\n\n\n

                        5.4 H\u1ec7 th\u1ed1ng c\u00f4ng nghi\u1ec7p nhi\u1ec7t \u0111\u1ed9 cao<\/h3>\n\n\n\n

                        C\u00e1c linh ki\u1ec7n th\u1ea1ch anh ho\u1ea1t \u0111\u1ed9ng \u1ed5n \u0111\u1ecbnh trong m\u00f4i tr\u01b0\u1eddng c\u00f3 nhi\u1ec7t \u0111\u1ed9 tr\u00ean 1100\u00b0C, bao g\u1ed3m:<\/p>\n\n\n\n

                          \n
                        • \u1ed0ng l\u00f2<\/li>\n\n\n\n
                        • L\u00f2 ph\u1ea3n \u1ee9ng nhi\u1ec7t<\/li>\n\n\n\n
                        • H\u1ec7 th\u1ed1ng \u0111\u1ed1t ch\u00e1y<\/li>\n<\/ul>\n\n\n\n

                          So v\u1edbi th\u1ee7y tinh borosilicat, th\u1ea1ch anh nung ch\u1ea3y c\u00f3 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t cao h\u01a1n \u0111\u00e1ng k\u1ec3 v\u00e0 nguy c\u01a1 bi\u1ebfn d\u1ea1ng th\u1ea5p h\u01a1n.<\/p>\n\n\n\n

                          6. So s\u00e1nh v\u1eadt li\u1ec7u \u0111\u1ec3 l\u1ef1a ch\u1ecdn trong k\u1ef9 thu\u1eadt<\/h2>\n\n\n\n

                          Th\u1ee7y tinh th\u1ea1ch anh so v\u1edbi th\u1ee7y tinh borosilicat<\/h3>\n\n\n\n
                          B\u1ea5t \u0111\u1ed9ng s\u1ea3n<\/th>Th\u1ee7y tinh th\u1ea1ch anh<\/th>Th\u1ee7y tinh borosilicat<\/th><\/tr><\/thead>
                          Nhi\u1ec7t \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng li\u00ean t\u1ee5c<\/td>1.100\u20131.200\u00b0C<\/td>~500\u00b0C<\/td><\/tr>
                          H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t<\/td>R\u1ea5t th\u1ea5p<\/td>Trung b\u00ecnh<\/td><\/tr>
                          \u0110\u1ed9 truy\u1ec1n qua tia UV<\/td>Tuy\u1ec7t v\u1eddi<\/td>S\u1ed1 l\u01b0\u1ee3ng c\u00f3 h\u1ea1n<\/td><\/tr>
                          \u0110\u1ed9 tinh khi\u1ebft h\u00f3a h\u1ecdc<\/td>R\u1ea5t cao<\/td>Trung b\u00ecnh<\/td><\/tr>
                          Chi ph\u00ed<\/td>Cao<\/td>Th\u1ea5p h\u01a1n<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

                          \ud83d\udccc T\u00e0i li\u1ec7u tham kh\u1ea3o: D\u1eef li\u1ec7u v\u1ec1 k\u00ednh k\u1ef9 thu\u1eadt c\u1ee7a Schott AG, B\u1ea3ng so s\u00e1nh v\u1eadt li\u1ec7u c\u1ee7a Corning<\/p>\n\n\n\n

                          7. Nh\u1eefng h\u1ea1n ch\u1ebf v\u00e0 c\u00e1c v\u1ea5n \u0111\u1ec1 k\u1ef9 thu\u1eadt<\/h2>\n\n\n\n

                          M\u1eb7c d\u00f9 c\u00f3 hi\u1ec7u su\u1ea5t tuy\u1ec7t v\u1eddi, th\u1ee7y tinh th\u1ea1ch anh v\u1eabn c\u00f3 m\u1ed9t s\u1ed1 h\u1ea1n ch\u1ebf:<\/p>\n\n\n\n

                            \n
                          • H\u00e0nh vi g\u00e3y gi\u00f2n d\u01b0\u1edbi t\u00e1c \u0111\u1ed9ng c\u01a1 h\u1ecdc<\/li>\n\n\n\n
                          • Chi ph\u00ed s\u1ea3n xu\u1ea5t v\u00e0 gia c\u00f4ng cao<\/li>\n\n\n\n
                          • \u0110\u1ed9 nh\u1ea1y c\u1ea3m h\u00f3a h\u1ecdc v\u1edbi axit hydrofluoric (HF)<\/li>\n\n\n\n
                          • \u0110\u1ed9 nh\u1ea1y c\u1ea3m v\u1edbi s\u1ef1 h\u00ecnh th\u00e0nh c\u00e1c v\u1ebft n\u1ee9t vi m\u00f4 d\u01b0\u1edbi t\u00e1c \u0111\u1ed9ng c\u1ee7a \u1ee9ng su\u1ea5t<\/li>\n<\/ul>\n\n\n\n

                            C\u00e1c chi\u1ebfn l\u01b0\u1ee3c gi\u1ea3m thi\u1ec3u v\u1ec1 m\u1eb7t k\u1ef9 thu\u1eadt bao g\u1ed3m:<\/p>\n\n\n\n

                              \n
                            • Thi\u1ebft k\u1ebf k\u1ebft c\u1ea5u \u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a nh\u1eb1m gi\u1ea3m s\u1ef1 t\u1eadp trung \u1ee9ng su\u1ea5t<\/li>\n\n\n\n
                            • \u0110\u1ed9 d\u00e0y t\u0103ng l\u00ean \u1edf c\u00e1c v\u00f9ng ch\u1ecbu l\u1ef1c<\/li>\n\n\n\n
                            • C\u00e1c quy tr\u00ecnh t\u0103ng nhi\u1ec7t v\u00e0 gi\u1ea3m nhi\u1ec7t c\u00f3 ki\u1ec3m so\u00e1t<\/li>\n<\/ul>\n\n\n\n

                              8. Tri\u1ec3n v\u1ecdng ng\u00e0nh<\/h2>\n\n\n\n

                              Nhu c\u1ea7u v\u1ec1 c\u00e1c linh ki\u1ec7n th\u1ea1ch anh c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao ti\u1ebfp t\u1ee5c gia t\u0103ng do:<\/p>\n\n\n\n

                                \n
                              • M\u1edf r\u1ed9ng c\u00e1c nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t chip b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn (c\u00e1c th\u1ebf h\u1ec7 3\u20137 nm)<\/li>\n\n\n\n
                              • T\u0103ng c\u01b0\u1eddng s\u1ea3n xu\u1ea5t chip AI<\/li>\n\n\n\n
                              • S\u1ef1 ph\u00e1t tri\u1ec3n c\u1ee7a \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t v\u00e0 h\u1ec7 th\u1ed1ng quang t\u1eed<\/li>\n\n\n\n
                              • Nhu c\u1ea7u ng\u00e0y c\u00e0ng t\u0103ng \u0111\u1ed1i v\u1edbi c\u00e1c linh ki\u1ec7n th\u1ea1ch anh ch\u00ednh x\u00e1c \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t theo y\u00eau c\u1ea7u<\/li>\n<\/ul>\n\n\n\n

                                Theo nh\u1eadn \u0111\u1ecbnh chung c\u1ee7a ng\u00e0nh, c\u00e1c v\u1eadt t\u01b0 ti\u00eau hao l\u00e0m t\u1eeb th\u1ea1ch anh v\u1eabn l\u00e0 m\u1ed9t lo\u1ea1i v\u1eadt li\u1ec7u quan tr\u1ecdng trong s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn do t\u00e1c \u0111\u1ed9ng tr\u1ef1c ti\u1ebfp c\u1ee7a ch\u00fang \u0111\u1ebfn s\u1ef1 \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh v\u00e0 hi\u1ec7u su\u1ea5t s\u1ea3n l\u01b0\u1ee3ng.<\/p>\n\n\n\n

                                9. K\u1ebft lu\u1eadn<\/h2>\n\n\n\n

                                \u0110\u1ed3 th\u1ee7y tinh th\u1ea1ch anh v\u00e0 c\u00e1c b\u1ed9 ph\u1eadn th\u1ea1ch anh gia c\u00f4ng \u0111\u00f3ng vai tr\u00f2 c\u01a1 b\u1ea3n trong c\u00e1c h\u1ec7 th\u1ed1ng k\u1ef9 thu\u1eadt hi\u1ec7n \u0111\u1ea1i. S\u1ef1 k\u1ebft h\u1ee3p gi\u1eefa kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t, \u0111\u1ed9 trong su\u1ed1t quang h\u1ecdc v\u00e0 t\u00ednh \u1ed5n \u0111\u1ecbnh h\u00f3a h\u1ecdc khi\u1ebfn ch\u00fang tr\u1edf n\u00ean kh\u00f4ng th\u1ec3 thi\u1ebfu trong qu\u00e1 tr\u00ecnh ch\u1ebf t\u1ea1o ch\u1ea5t b\u00e1n d\u1eabn, c\u00f4ng ngh\u1ec7 quang h\u1ecdc v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng c\u00f4ng nghi\u1ec7p nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n\n\n\n

                                V\u1edbi nh\u1eefng ti\u1ebfn b\u1ed9 kh\u00f4ng ng\u1eebng trong l\u0129nh v\u1ef1c s\u1ea3n xu\u1ea5t ch\u00ednh x\u00e1c v\u00e0 m\u00f4i tr\u01b0\u1eddng ch\u1ebf t\u1ea1o si\u00eau s\u1ea1ch, nhu c\u1ea7u v\u1ec1 c\u00e1c linh ki\u1ec7n th\u1ea1ch anh \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf theo y\u00eau c\u1ea7u d\u1ef1 ki\u1ebfn s\u1ebd t\u0103ng tr\u01b0\u1edfng \u1ed5n \u0111\u1ecbnh trong c\u00e1c ng\u00e0nh c\u00f4ng nghi\u1ec7p c\u00f4ng ngh\u1ec7 cao.<\/p>","protected":false},"excerpt":{"rendered":"

                                1. Introduction Quartz glassware and machined quartz components are widely used in semiconductor manufacturing, optical engineering, high-temperature processing, and vacuum systems. As semiconductor technology advances toward sub-7nm nodes and high-performance photonic systems expand, demand for ultra-high-purity quartz materials continues to increase. According to industry insights from the Semiconductor Equipment and Materials International (SEMI), quartz-based components […]<\/p>\n","protected":false},"author":1,"featured_media":2664,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[1],"tags":[678,789,66,794,563,780,669,786,48,787,784,793,785,792,788,791,131,62,790],"class_list":["post-2661","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-cleanroom-manufacturing","tag-cnc-machining","tag-cvd-process","tag-diffusion-furnace","tag-fused-silica","tag-high-purity-materials","tag-high-temperature-materials-2","tag-industrial-engineering","tag-laboratory-equipment","tag-laser-system-components","tag-machined-quartz-components","tag-optical-engineering","tag-optical-window","tag-precision-machining","tag-quartz-glassware","tag-quartz-parts","tag-semiconductor-equipment","tag-semiconductor-manufacturing","tag-vacuum-chamber-components"],"_links":{"self":[{"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/posts\/2661","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/comments?post=2661"}],"version-history":[{"count":3,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/posts\/2661\/revisions"}],"predecessor-version":[{"id":2666,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/posts\/2661\/revisions\/2666"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/media\/2664"}],"wp:attachment":[{"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/media?parent=2661"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/categories?post=2661"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/vi\/wp-json\/wp\/v2\/tags?post=2661"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}