{"id":2508,"date":"2026-03-16T01:53:19","date_gmt":"2026-03-16T01:53:19","guid":{"rendered":"https:\/\/www.fuyao-quartz.com\/"},"modified":"2026-03-16T01:53:20","modified_gmt":"2026-03-16T01:53:20","slug":"custom-quartz-boats-for-semiconductor-processing-high-purity-fused-silica-wafer-carriers","status":"publish","type":"product","link":"https:\/\/www.fuyao-quartz.com\/pl\/product\/custom-quartz-boats-for-semiconductor-processing-high-purity-fused-silica-wafer-carriers\/","title":{"rendered":"Niestandardowe \u0142odzie kwarcowe do przetwarzania p\u00f3\u0142przewodnik\u00f3w No\u015bniki wafli z topionej krzemionki o wysokiej czysto\u015bci"},"content":{"rendered":"

\"\"Quartz boats, also known as fused silica wafer carriers, are essential components for high-temperature and high-purity processing environments. Manufactured from ultra-high purity silicon dioxide (SiO\u2082 \u226599.99%), they are specifically designed to hold and transport semiconductor wafers during critical processes such as diffusion, LPCVD, oxidation, annealing, and epitaxy.<\/p>\n

With excellent thermal stability, chemical resistance, and dimensional accuracy, quartz boats can operate continuously at temperatures up to 1100\u00b0C and withstand short-term exposure up to 1450\u00b0C. Their low thermal expansion and high purity make them ideal for contamination-sensitive applications in semiconductor fabrication, photovoltaics, and advanced laboratory research.<\/p>\n

As demand grows in SiC, GaN, and next-generation semiconductor technologies, quartz boats continue to play a key role in ensuring process stability and production yield.<\/p>\n

Technical Specifications<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Parametr<\/th>\nWarto\u015b\u0107<\/th>\n<\/tr>\n<\/thead>\n
Materia\u0142<\/td>\nFused Quartz (SiO\u2082)<\/td>\n<\/tr>\n
Purity<\/td>\n\u226599.99%<\/td>\n<\/tr>\n
G\u0119sto\u015b\u0107<\/td>\n2,2 g\/cm\u00b3<\/td>\n<\/tr>\n
Twardo\u015b\u0107 w skali Mohsa<\/td>\n6.6<\/td>\n<\/tr>\n
Continuous Operating Temperature<\/td>\n1100\u00b0C<\/td>\n<\/tr>\n
Max Short-Term Temperature<\/td>\n1450\u00b0C<\/td>\n<\/tr>\n
Melting Point<\/td>\n~1730\u00b0C<\/td>\n<\/tr>\n
Rozszerzalno\u015b\u0107 cieplna<\/td>\n0.55 \u00d7 10\u207b\u2076 \/\u00b0C<\/td>\n<\/tr>\n
Przewodno\u015b\u0107 cieplna<\/td>\n~1.3\u20131.4 W\/m\u00b7K<\/td>\n<\/tr>\n
Visible Light Transmittance<\/td>\n>93%<\/td>\n<\/tr>\n
UV Transmittance<\/td>\n~80%<\/td>\n<\/tr>\n
Electrical Resistivity<\/td>\nExtremely high (\u224810\u2074\u00d7 conventional glass)<\/td>\n<\/tr>\n
Surface Roughness<\/td>\nRa \u22640.1 \u03bcm (customizable)<\/td>\n<\/tr>\n
Odporno\u015b\u0107 chemiczna<\/td>\nStrong acids (except HF), high corrosion resistance<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

Material Types & Customization<\/h2>\n

\"\"To meet diverse process requirements, we offer multiple quartz material options:<\/p>\n

    \n
  • \n

    Transparent Quartz (JGS1, UV Grade)
    High UV transmittance, suitable for lithography and optical applications<\/p>\n<\/li>\n

  • \n

    Opaque Quartz
    Enhanced thermal shock resistance, ideal for diffusion and annealing<\/p>\n<\/li>\n

  • \n

    Synthetic Quartz (CVD Quartz)
    Ultra-low impurities (<0.1 ppm), excellent plasma resistance<\/p>\n<\/li>\n

  • \n

    Doped Quartz (Ti\/Ce)
    Improved crystallization resistance for ultra-high temperature environments<\/p>\n<\/li>\n<\/ul>\n

    Customization Options<\/h3>\n
      \n
    • \n

      Wafer sizes: 100mm \/ 150mm \/ 200mm \/ 300mm<\/p>\n<\/li>\n

    • \n

      Slot spacing and thickness<\/p>\n<\/li>\n

    • \n

      U-type, V-type, or custom geometries<\/p>\n<\/li>\n

    • \n

      Surface finish optimization (Ra \u22640.05 \u03bcm available)<\/p>\n<\/li>\n

    • \n

      Special coatings and structural enhancements<\/p>\n<\/li>\n<\/ul>\n

      Zastosowania<\/h2>\n

      Przemys\u0142 p\u00f3\u0142przewodnik\u00f3w\"\"<\/h3>\n
        \n
      • \n

        Diffusion and oxidation processes<\/p>\n<\/li>\n

      • \n

        LPCVD and epitaxial growth<\/p>\n<\/li>\n

      • \n

        Ion implantation and etching<\/p>\n<\/li>\n<\/ul>\n

        Photovoltaic Industry<\/h3>\n
          \n
        • \n

          PERC and TOPCon cell processing<\/p>\n<\/li>\n

        • \n

          High-temperature doping<\/p>\n<\/li>\n<\/ul>\n

          LED & Optoelectronics<\/h3>\n
            \n
          • \n

            MOCVD wafer carriers<\/p>\n<\/li>\n

          • \n

            Optical device support<\/p>\n<\/li>\n<\/ul>\n

            Research & Advanced Systems<\/h3>\n
              \n
            • \n

              Ultra-high vacuum (UHV) environments<\/p>\n<\/li>\n

            • \n

              Synchrotron and MBE systems<\/p>\n<\/li>\n<\/ul>\n

              G\u0142\u00f3wne zalety<\/h2>\n

              1. Exceptional Thermal Performance<\/h3>\n
                \n
              • \n

                Stable at high temperatures up to 1100\u00b0C<\/p>\n<\/li>\n

              • \n

                Resistant to rapid thermal cycling without cracking<\/p>\n<\/li>\n<\/ul>\n

                2. Superior Chemical Stability<\/h3>\n
                  \n
                • \n

                  Resistant to strong acids and corrosive gases<\/p>\n<\/li>\n

                • \n

                  Significantly outperforms metals and ceramics in harsh environments<\/p>\n<\/li>\n<\/ul>\n

                  3. High Cleanliness<\/h3>\n
                    \n
                  • \n

                    Cleanroom manufacturing standards<\/p>\n<\/li>\n

                  • \n

                    Low particle generation for semiconductor-grade processes<\/p>\n<\/li>\n<\/ul>\n

                    4. Precision & Reliability<\/h3>\n
                      \n
                    • \n

                      Tight tolerances (\u00b10.01 mm achievable)<\/p>\n<\/li>\n

                    • \n

                      Smooth surface for wafer protection and alignment<\/p>\n<\/li>\n<\/ul>\n

                      FUYAO Manufacturing Capabilities<\/h2>\n

                      FUYAO provides full-process customization services, including:<\/p>\n

                        \n
                      • \n

                        Structural design and optimization<\/p>\n<\/li>\n

                      • \n

                        Thermal simulation support<\/p>\n<\/li>\n

                      • \n

                        Precision machining and polishing<\/p>\n<\/li>\n

                      • \n

                        Cleanroom production (Class 10)<\/p>\n<\/li>\n

                      • \n

                        Repair and refurbishment services<\/p>\n<\/li>\n<\/ul>\n

                        We support both R&D prototyping and large-scale production, ensuring fast delivery and consistent quality.<\/p>\n

                        FAQ<\/h2>\n

                        Q1: What is a quartz boat used for?
                        A quartz boat is used to hold and transport wafers during high-temperature semiconductor and laboratory processes.<\/p>\n

                        Q2: Why choose quartz instead of ceramics or metals?
                        Quartz provides superior purity, thermal stability, and chemical resistance, making it ideal for semiconductor applications.<\/p>\n

                        Q3: What is the typical lifespan of a quartz boat?
                        Depending on process conditions, quartz boats can withstand hundreds of thermal cycles. Proper cleaning and handling significantly extend their lifespan.<\/p>\n

                        Q4: Can quartz boats be used in plasma environments?
                        Yes. Synthetic quartz (CVD quartz) offers excellent resistance to plasma and reactive gases.<\/p>\n

                        Q5: Do you support custom designs?
                        Yes. We provide full customization including dimensions, slot configuration, wafer size compatibility, and special process requirements.<\/p>\n

                        Q6: What is your MOQ and delivery time?
                        MOQ typically starts from 10 pieces, with delivery time of 2\u20134 weeks depending on customization complexity.<\/p>","protected":false},"excerpt":{"rendered":"

                        Our custom quartz boats are precision-engineered for advanced semiconductor and high-temperature processing environments. Manufactured from 99.99% high-purity fused quartz (SiO\u2082), these wafer carriers ensure ultra-low contamination, excellent thermal stability, and long service life.<\/p>","protected":false},"featured_media":2509,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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