Fused Quartz Windows are precision optical components manufactured from high-purity fused silica. They offer exceptional optical transparency, outstanding thermal stability, and strong resistance to chemical corrosion. These optical windows are widely used as protective barriers or transmission interfaces in semiconductor equipment, laser systems, vacuum chambers, and scientific instruments.
With excellent transmission from ultraviolet (UV) to infrared (IR) wavelengths, fused quartz windows maintain stable optical performance even under extreme temperatures and harsh chemical environments.
Belangrijkste kenmerken
Wide Spectral Transmission
High optical transmittance from 190 nm to 2500 nm, suitable for UV, visible, and infrared optical systems.
High Thermal Stability
Capable of withstanding temperatures above 1000°C without deformation, ideal for high-temperature industrial and laser applications.
Precision Surface Quality
High-precision polishing with surface roughness <10 Å RMS and flatness up to λ/10, minimizing optical distortion.
Excellent Chemical Resistance
Fused quartz is highly resistant to acids, alkalis, and most chemical solvents, ensuring long service life in corrosive environments.
Low Thermal Expansion
Outstanding dimensional stability during rapid temperature changes, maintaining accurate optical alignment.
Toepassingen
Optische instrumenten
Spectrometers, imaging systems, optical sensors, and analytical instruments.
Semiconductor Manufacturing
Process chamber windows, viewports, wafer inspection covers used in CVD, PVD, and plasma etching systems.
Laser & Photonics Systems
Protective laser windows, beam delivery optics, and high-power laser transmission components.
Scientific Research Equipment
Vacuum chamber viewports, laboratory optical devices, and precision measurement systems.
Specifications (Customizable)
| Parameter | Specificatie |
|---|---|
| Materiaal | Fused Silica (JGS1, JGS2, UV-grade) |
| Shape Types | Circular, elliptical, polygon, arc, stepped, notched |
| Size Tolerance | ±0.05 mm or better |
| Thickness Range | 0.5 mm – 10 mm |
| Surface Roughness | <10 Å RMS |
| Vlakheid oppervlak | λ/10 @ 632.8 nm |
| Parallelism | <30 arcsec |
| Transmission Range | 185 – 2500 nm |
| Coating Options | AR, HR, dielectric, DLC |
Advantages of Fused Quartz Windows
Compared with ordinary glass or borosilicate windows, fused quartz windows offer:
-
Higher UV transparency
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Better thermal shock resistance
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Lower optical distortion
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Greater chemical durability
These advantages make them the preferred optical solution for high-precision instruments, semiconductor equipment, and laser systems.
FAQ
Q1: What is the difference between JGS1, JGS2, and JGS3 fused quartz?
JGS1 is synthetic UV-grade fused silica with excellent transmission below 260 nm.
JGS2 is optical-grade fused silica with strong transmission in the visible spectrum.
JGS3 is infrared-grade material commonly used for IR and industrial optical applications.
Q2: Can fused quartz windows be used in vacuum environments?
Yes. Due to their low outgassing rate and high mechanical strength, fused quartz windows are widely used as vacuum chamber viewports in semiconductor and research equipment.
Q3: Are optical coatings available?
Yes. Anti-reflective (AR), high-reflective (HR), dielectric, and DLC coatings can be applied based on specific wavelength requirements.
Q4: Can custom shapes or holes be manufactured?
Yes. Custom shapes, edge bevels, slots, and precision drilled holes can be produced according to customer drawings or technical specifications.
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