FUYAO QUARTZ manufactures high-purity quartz flanges designed for semiconductor processing systems, vacuum chambers, and high-temperature industrial equipment. These components are produced from premium fused quartz materials and processed using precision machining and thermal treatment techniques to ensure excellent dimensional stability and high structural reliability.
Quartz flanges play an important role in connecting quartz tubes, chambers, and vacuum pipelines in semiconductor fabrication equipment. Because fused quartz offers exceptional thermal resistance, chemical stability, and ultra-low contamination characteristics, it is widely used in high-purity environments such as wafer processing, thin-film deposition, and laboratory systems.
Through strict material selection and quality inspection procedures, FUYAO QUARTZ ensures that every quartz flange meets the demanding requirements of modern semiconductor and optical industries.
Material Description
Quartz flanges are manufactured from fused silica, an amorphous form of silicon dioxide (SiO₂). Unlike crystalline quartz minerals, fused quartz does not contain a long-range crystal structure, which provides several important advantages for high-precision industrial components.
The material exhibits extremely low thermal expansion, excellent optical transparency, and strong resistance to chemical corrosion. These properties allow quartz flanges to maintain structural integrity in high-temperature and high-purity processing environments.
Because fused quartz also demonstrates high electrical insulation and excellent thermal shock resistance, quartz flanges are widely used in vacuum sealing systems and semiconductor equipment where contamination control and material stability are essential.
Mechanical Properties
| 속성 | 가치 |
|---|---|
| 밀도 | 2.2g/cm³ |
| 모스 경도 | 6–7 |
| 압축 강도 | 1100 MPa |
| 인장 강도 | 50 MPa |
| 굽힘 강도 | 65 MPa |
| 영의 계수 | 7.5 × 10⁴ MPa |
| 푸아송 비율 | 0.17 |
열 속성
| 속성 | 가치 |
|---|---|
| Thermal Expansion Coefficient (20–320°C) | 5.5 × 10⁻⁷ K⁻¹ |
| 열 전도성(20°C) | 1.4 W·m⁻¹·K⁻¹ |
| 연화 포인트 | 1630°C |
| Annealing Temperature | 1180°C |
| 스트레인 포인트 | 1080°C |
| Maximum Continuous Operating Temperature | ~1100°C |
Typical Dimensions
| 매개변수 | Range |
|---|---|
| Outer Diameter | 50 mm – 500 mm |
| Inner Diameter | Customizable |
| 두께 | 10 mm – 80 mm |
| 표면 마감 | Polished / Precision Machined |
| 평탄도 | ≤0.05 mm |
| Tolerance | ±0.05 mm |
Custom designs can be manufactured according to drawings or semiconductor equipment specifications.
주요 기능
High purity material
Quartz flanges are manufactured from high-purity fused silica to minimize contamination in semiconductor and vacuum environments.
Excellent thermal stability
The material maintains stable mechanical properties even at temperatures exceeding 1000°C.
낮은 열 팽창
Quartz glass exhibits extremely low thermal expansion, which helps maintain precise sealing performance under thermal cycling.
Outstanding chemical resistance
Quartz flanges are resistant to most acids, corrosive gases, and chemical reagents used in semiconductor processing.
High dimensional precision
Advanced machining technology ensures excellent flatness and dimensional accuracy for vacuum sealing systems.
애플리케이션
Quartz flanges produced by FUYAO QUARTZ are widely used in various high-tech industries, including:
Semiconductor wafer processing equipment
Vacuum chambers and vacuum pipeline systems
Chemical vapor deposition (CVD) equipment
광학 및 레이저 시스템
High-temperature industrial furnaces
Laboratory analytical instruments
품질 보증
FUYAO QUARTZ follows strict manufacturing and inspection standards to ensure the reliability of every quartz component. Each quartz flange undergoes dimensional inspection, material verification, and visual quality checks before shipment. Our manufacturing experience in high-purity quartz components enables us to meet the technical requirements of semiconductor and advanced industrial applications.
자주 묻는 질문
1. Can quartz flanges be customized according to equipment drawings?
Yes. FUYAO QUARTZ supports full customization according to customer drawings or technical specifications, including flange diameter, thickness, hole patterns, and surface finish.
2. Are quartz flanges suitable for vacuum systems?
Yes. Quartz flanges have excellent thermal stability, chemical resistance, and dimensional precision, making them suitable for vacuum sealing systems and semiconductor processing equipment.
3. What industries typically use quartz flanges?
Quartz flanges are commonly used in semiconductor manufacturing, optical equipment, laboratory systems, vacuum technology, and high-temperature industrial processing.
4. What is the maximum operating temperature of quartz flanges?
Quartz flanges typically operate continuously at temperatures up to about 1100°C and can tolerate higher temperatures for short periods depending on the application environment.
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