![\"\"](\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/04\/4-inch-quartz-wafer-2-300x300.png\")
The 4 inch high purity fused silica quartz wafer is a precision engineered optical and semiconductor substrate designed for advanced MEMS, photonic, and microelectronic applications. Manufactured from ultra-low impurity SiO\u2082 material, this wafer provides excellent optical transmission, outstanding thermal stability, and superior surface quality.<\/p>\n
With a diameter of 100 mm, the wafer supports custom thickness ranging from 0.5 mm to 1.5 mm, making it highly flexible for different device structures and integration requirements. The double-side polished (DSP) surface ensures ultra-smooth flatness with surface roughness as low as Ra \u2264 0.5 nm, significantly reducing optical scattering and improving device accuracy.<\/p>\n
Compared with standard glass or ceramic substrates, fused silica offers much higher thermal resistance, lower thermal expansion, and better chemical stability, making it suitable for demanding environments such as high-temperature processing, UV lithography, and precision optical systems.<\/p>\n
![\"\"](\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/04\/4-inch-quartz-wafer-300x300.png\")
Key Features<\/h2>\n| Parameter<\/th>\n | Value<\/th>\n<\/tr>\n<\/thead>\n |
|---|---|
| Diameter<\/td>\n | 4 inch (100 mm)<\/td>\n<\/tr>\n |
| Material<\/td>\n | High Purity Fused Silica (SiO\u2082)<\/td>\n<\/tr>\n |
| Thickness Range<\/td>\n | 0.5 mm \u2013 1.5 mm<\/td>\n<\/tr>\n |
| Surface Finish<\/td>\n | Double Side Polished (DSP)<\/td>\n<\/tr>\n |
| Surface Roughness<\/td>\n | Ra \u2264 0.5 nm<\/td>\n<\/tr>\n |
| Transmittance<\/td>\n | >92% @ 185\u20133500 nm<\/td>\n<\/tr>\n |
| Thermal Expansion (CTE)<\/td>\n | 0.55 \u00d7 10\u207b\u2076\/\u00b0C (20\u2013300\u00b0C)<\/td>\n<\/tr>\n |
| Parallelism<\/td>\n | \u2264 3 \u03bcm<\/td>\n<\/tr>\n |
| Resistivity (350\u00b0C)<\/td>\n | >7 \u00d7 10\u2077 \u03a9\u00b7cm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n \n Material Properties<\/h2>\n\n <\/div>\n<\/div>\n \n \n ![\"\"](\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/04\/wave-300x202.jpg\") <\/div>\n<\/div>\n<\/div>\n\n \n <\/div>\n<\/div>\n<\/div>\n<\/div>\n Fused silica is widely recognized as one of the most stable and high-performance optical materials available today. Its structure is composed of highly pure silicon dioxide, which provides excellent optical, thermal, and mechanical properties.<\/p>\n The material exhibits extremely low optical absorption across a wide spectral range, making it suitable for UV lithography, laser optics, and photonic devices. Its low thermal expansion ensures minimal deformation under temperature variations, which is critical for high-precision semiconductor processes.<\/p>\n In addition, fused silica offers excellent resistance to most acids and chemical environments, ensuring long-term durability in industrial and laboratory applications.<\/p>\n \n Application Fields<\/h2>\n |
Used in pressure sensors, gyroscopes, inkjet systems, and micro-actuators. The wafer\u2019s stability and precision surface quality support multi-layer microfabrication and high reliability operation.<\/p>\n
Applied in UV laser components, optical collimators, and fiber communication devices. Its high transmittance ensures low optical loss and stable signal performance.<\/p>\n
Used as wafer-level packaging substrate for CMOS sensors, RF devices, and advanced integrated circuits. Supports high-density integration and TSV structures.<\/p>\n
Suitable for quantum sensing, NV center research, and advanced photonic systems requiring ultra-low defect density and high optical uniformity.<\/p>\n
This product supports full customization based on customer requirements, including precision machining and advanced surface treatment technologies.<\/p>\n
Precision cutting and polishing allow dimensional accuracy within micrometer-level tolerances. Optional surface coatings such as anti-reflective (AR) coatings or hydrophobic layers can be applied to enhance optical or environmental performance.<\/p>\n
Prototype development is available for rapid testing and evaluation, supporting complex geometries such as notches, holes, and stepped structures for specialized device integration.<\/p>\n
Q1 Why choose fused silica for high precision applications
Fused silica provides a unique combination of ultra-low thermal expansion, high optical transmission, and excellent chemical resistance, making it ideal for precision optical and semiconductor systems.<\/p>\n
Q2 What is the advantage of Ra \u2264 0.5 nm surface roughness
Ultra-smooth surfaces significantly reduce light scattering and improve optical performance. This is critical in UV lithography, laser systems, and photonic devices where signal loss must be minimized.<\/p>\n
Q3 Can thickness be customized for different applications
Yes, the wafer supports a thickness range from 0.5 mm to 1.5 mm, allowing flexibility for different mechanical strength, optical path length, and integration requirements.<\/p>\n","protected":false},"excerpt":{"rendered":"
The 4 inch high purity fused silica quartz wafer is a precision engineered optical and semiconductor substrate designed for advanced MEMS, photonic, and microelectronic applications. Manufactured from ultra-low impurity SiO\u2082 material, this wafer provides excellent optical transmission, outstanding thermal stability, and superior surface quality.<\/p>","protected":false},"featured_media":2709,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[119],"product_tag":[834,837,840,178,158,835,501,842,827,829,841,839,836,838,828],"class_list":{"0":"post-2707","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-quartz-wafer","7":"product_tag-4-inch-quartz-wafer","8":"product_tag-4-inch-sio2-wafer","9":"product_tag-custom-thickness-quartz-wafer","10":"product_tag-dsp-quartz-wafer","11":"product_tag-fused-silica-wafer","12":"product_tag-high-purity-quartz-substrate","13":"product_tag-low-thermal-expansion-quartz","14":"product_tag-mems-quartz-wafer","15":"product_tag-optical-quartz-substrate","16":"product_tag-optical-window-material","17":"product_tag-photonic-substrate","18":"product_tag-ra-0-5-nm-wafer","19":"product_tag-semiconductor-wafer-100mm","20":"product_tag-ultra-smooth-quartz-wafer","21":"product_tag-uv-grade-fused-silica","22":"desktop-align-left","23":"tablet-align-left","24":"mobile-align-left","25":"ast-product-gallery-layout-horizontal","26":"ast-product-tabs-layout-horizontal","28":"first","29":"instock","30":"shipping-taxable","31":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.fuyao-quartz.com\/hu\/wp-json\/wp\/v2\/product\/2707","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.fuyao-quartz.com\/hu\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.fuyao-quartz.com\/hu\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/hu\/wp-json\/wp\/v2\/comments?post=2707"}],"version-history":[{"count":2,"href":"https:\/\/www.fuyao-quartz.com\/hu\/wp-json\/wp\/v2\/product\/2707\/revisions"}],"predecessor-version":[{"id":2713,"href":"https:\/\/www.fuyao-quartz.com\/hu\/wp-json\/wp\/v2\/product\/2707\/revisions\/2713"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/hu\/wp-json\/wp\/v2\/media\/2709"}],"wp:attachment":[{"href":"https:\/\/www.fuyao-quartz.com\/hu\/wp-json\/wp\/v2\/media?parent=2707"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/hu\/wp-json\/wp\/v2\/product_brand?post=2707"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/hu\/wp-json\/wp\/v2\/product_cat?post=2707"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/hu\/wp-json\/wp\/v2\/product_tag?post=2707"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}