{"id":2563,"date":"2026-03-23T01:52:35","date_gmt":"2026-03-23T01:52:35","guid":{"rendered":"https:\/\/www.fuyao-quartz.com\/?post_type=product&p=2563"},"modified":"2026-03-23T01:52:37","modified_gmt":"2026-03-23T01:52:37","slug":"custom-high-borosilicate-glass-wafers-for-mems-semiconductor-optical-applications","status":"publish","type":"product","link":"https:\/\/www.fuyao-quartz.com\/hu\/product\/custom-high-borosilicate-glass-wafers-for-mems-semiconductor-optical-applications\/","title":{"rendered":"Egyedi nagy b\u00f3rszilik\u00e1t \u00fcveglapk\u00e1k MEMS, f\u00e9lvezet\u0151 \u00e9s optikai alkalmaz\u00e1sokhoz (2-12\u201d)"},"content":{"rendered":"

Magas b\u00f3rszilik\u00e1t \u00fcveglapk\u00e1k (3.3)<\/span><\/h2>\n

A magas boroszilik\u00e1t \u00fcveglapk\u00e1k prec\u00edzi\u00f3san megtervezett szubsztr\u00e1tumok, amelyeket sz\u00e9les k\u00f6rben haszn\u00e1lnak f\u00e9lvezet\u0151, MEMS \u00e9s optikai alkalmaz\u00e1sokban. Az alacsony h\u0151t\u00e1gul\u00e1si egy\u00fctthat\u00f3jukr\u00f3l (~3,3 \u00d7 10-\u2076\/K), a kiv\u00e1l\u00f3 k\u00e9miai stabilit\u00e1sukr\u00f3l \u00e9s a nagyfok\u00fa \u00e1tl\u00e1tsz\u00f3s\u00e1gukr\u00f3l ismert \u00fcvegszil\u00e1nkok megb\u00edzhat\u00f3 \u00e9s k\u00f6lts\u00e9ghat\u00e9kony alternat\u00edv\u00e1t jelentenek az olyan anyagok helyett, mint a szil\u00edcium-dioxid \u00e9s a kvarc k\u00f6zepes h\u0151m\u00e9rs\u00e9klet\u0171 k\u00f6rnyezetben.<\/p>\n

A float-\u00fcveg elj\u00e1r\u00e1ssal gy\u00e1rtott boroszilik\u00e1t osty\u00e1k egyenletes vastags\u00e1got, kiv\u00e1l\u00f3 laposs\u00e1got \u00e9s alacsony bels\u0151 fesz\u00fclts\u00e9get biztos\u00edtanak, \u00edgy ide\u00e1lisak a nagy pontoss\u00e1g\u00fa mikrogy\u00e1rt\u00e1si \u00e9s k\u00f6t\u00e9si folyamatokhoz.<\/p>\n

\"\"<\/p>\n

F\u0151 anyag\u00f6sszet\u00e9tel<\/span><\/h2>\n

A magas boroszilik\u00e1t \u00fcveg jellemz\u0151en a k\u00f6vetkez\u0151kb\u0151l \u00e1ll:<\/p>\n

    \n
  • Szil\u00edcium-dioxid (SiO\u2082): ~75-80%<\/li>\n
  • B\u00f3rtrioxid (B\u2082O\u2083): ~12-15%<\/li>\n
  • Alum\u00ednium-oxid (Al\u2082O\u2083): kis sz\u00e1zal\u00e9kban<\/li>\n
  • Alacsony alk\u00e1lif\u00e9m-oxidok (<5%)<\/li>\n<\/ul>\n

    Ez az optimaliz\u00e1lt \u00f6sszet\u00e9tel a hagyom\u00e1nyos sz\u00f3dabikarb\u00f3n\u00e1s \u00fcveghez k\u00e9pest fokozott h\u0151stabilit\u00e1st \u00e9s vegyi ellen\u00e1ll\u00e1st biztos\u00edt.<\/p>\n

    Legfontosabb el\u0151ny\u00f6k<\/span><\/h2>\n

    A b\u00f3rszilik\u00e1t \u00fcveglapok sz\u00e1mos teljes\u00edtm\u00e9nybeli el\u0151nyt k\u00edn\u00e1lnak:<\/p>\n

      \n
    • Alacsony h\u0151t\u00e1gul\u00e1s - ide\u00e1lis szil\u00edcium k\u00f6t\u00e9sekhez \u00e9s MEMS szerkezetekhez<\/li>\n
    • Kiv\u00e1l\u00f3 h\u0151sokk\u00e1ll\u00f3s\u00e1g - \u0394T ak\u00e1r ~120-150\u00b0C-ig (vastags\u00e1gt\u00f3l f\u00fcgg\u0151en)<\/li>\n
    • Nagy optikai \u00e1tl\u00e1that\u00f3s\u00e1g - alkalmas optikai \u00e9s fotonikai alkalmaz\u00e1sokhoz<\/li>\n
    • Er\u0151s k\u00e9miai ellen\u00e1ll\u00e1s - ellen\u00e1ll a savaknak \u00e9s a legt\u00f6bb vegyszernek<\/li>\n
    • Nagy s\u00edkoss\u00e1g \u00e9s fel\u00fcleti min\u0151s\u00e9g - t\u00e1mogatja a mikro- \u00e9s nanom\u00e9ret\u0171 gy\u00e1rt\u00e1st<\/li>\n
    • K\u00f6lts\u00e9ghat\u00e9kony - sz\u00e1mos alkalmaz\u00e1s eset\u00e9n gazdas\u00e1gosabb, mint a kvarc vagy a szil\u00edcium-dioxid.<\/li>\n<\/ul>\n

      Gy\u00e1rt\u00e1si folyamat<\/span><\/h2>\n

      A b\u00f3rszilik\u00e1t osty\u00e1kat float-\u00fcveg m\u00f3dszerrel \u00e1ll\u00edtj\u00e1k el\u0151, ahol az olvadt \u00fcveg egy olvadt \u00f3nf\u00fcrd\u0151n \u00e1tfolyik, hogy sima, egyenletes lapot k\u00e9pezzen. Az anyagot ezut\u00e1n:<\/p>\n

        \n
      1. Fokozatosan leh\u0171tve (l\u00e1gy\u00edtva) a bels\u0151 fesz\u00fclts\u00e9gek kik\u00fcsz\u00f6b\u00f6l\u00e9s\u00e9re<\/li>\n
      2. Meghat\u00e1rozott ostyam\u00e9retekre v\u00e1gva<\/li>\n
      3. Prec\u00edzi\u00f3s csiszol\u00e1s \u00e9s pol\u00edroz\u00e1s (egyoldalas vagy k\u00e9toldalas)<\/li>\n<\/ol>\n

        \"\"<\/p>\n

        Ez az elj\u00e1r\u00e1s kiv\u00e1l\u00f3 fel\u00fcleti min\u0151s\u00e9get, szoros vastags\u00e1gszab\u00e1lyoz\u00e1st \u00e9s alacsony hibas\u0171r\u0171s\u00e9get biztos\u00edt.<\/p>\n

        M\u0171szaki adatok<\/span><\/h2>\n
        \n
        \n\n\n\n\n\n\n\n\n\n\n
        Param\u00e9ter<\/th>\nTartom\u00e1ny \/ opci\u00f3k<\/th>\n<\/tr>\n<\/thead>\n
        \u00c1tm\u00e9r\u0151<\/td>\n2\u201d - 12\u201d<\/td>\n<\/tr>\n
        Vastags\u00e1g<\/td>\n0,2 - 1,1 mm (egyedi rendel\u00e9s)<\/td>\n<\/tr>\n
        Fel\u00fclet<\/td>\nSSP \/ DSP<\/td>\n<\/tr>\n
        Durvas\u00e1g<\/td>\nRa < 1,5 nm<\/td>\n<\/tr>\n
        Laposs\u00e1g (TTV)<\/td>\n< 10 \u00b5m (tipikus)<\/td>\n<\/tr>\n
        Shape<\/td>\nKerek \/ N\u00e9gyzet \/ Egyedi<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

        Tipikus alkalmaz\u00e1sok<\/span><\/h2>\n

        1. F\u00e9lvezet\u0151 \u00e9s MEMS<\/span><\/h3>\n
          \n
        • Wafer k\u00f6t\u00e9s szil\u00edciummal (an\u00f3dos k\u00f6t\u00e9s)<\/li>\n
        • MEMS eszk\u00f6z\u00f6k \u00e9s mikro\u00e9rz\u00e9kel\u0151k<\/li>\n
        • IC-csomagol\u00f3 szubsztr\u00e1tumok<\/li>\n<\/ul>\n

          2. Mikrofluidika \u00e9s biotechnol\u00f3gia<\/span><\/h3>\n
            \n
          • Lab-on-chip eszk\u00f6z\u00f6k<\/li>\n
          • Mikrofluidikai csatorn\u00e1k<\/li>\n
          • Biomedikai elemz\u0151 platformok<\/li>\n<\/ul>\n

            3. Optikai \u00e9s fotonikus rendszerek<\/span><\/h3>\n
              \n
            • Optikai ablakok \u00e9s hordoz\u00f3k<\/li>\n
            • Lencse \u00e9s prizma alkatr\u00e9szek<\/li>\n
            • \u00c1tl\u00e1tsz\u00f3 hordoz\u00f3 osty\u00e1k<\/li>\n<\/ul>\n

              4. Ipari \u00e9s tudom\u00e1nyos berendez\u00e9sek<\/span><\/h3>\n
                \n
              • Magas h\u0151m\u00e9rs\u00e9klet\u0171 megfigyel\u0151 ablakok<\/li>\n
              • Laborat\u00f3riumi berendez\u00e9sek \u00e9s analitikai eszk\u00f6z\u00f6k<\/li>\n<\/ul>\n

                \u00d6sszehasonl\u00edt\u00e1s: Boroszilik\u00e1t vs. sz\u00f3dabikarb\u00f3n\u00e1s \u00fcveg<\/span><\/h2>\n
                \n
                \n\n\n\n\n\n\n\n\n\n
                Ingatlan<\/th>\nBoroszilik\u00e1t \u00fcveg<\/th>\nSoda-Lime \u00fcveg<\/th>\n<\/tr>\n<\/thead>\n
                H\u0151t\u00e1gul\u00e1s<\/td>\nAlacsony (~3,3\u00d710-\u2076\/K)<\/td>\nMagas<\/td>\n<\/tr>\n
                H\u0151sokk-ellen\u00e1ll\u00e1s<\/td>\nKiv\u00e1l\u00f3<\/td>\nSzeg\u00e9ny<\/td>\n<\/tr>\n
                K\u00e9miai ellen\u00e1ll\u00e1s<\/td>\nMagas<\/td>\nM\u00e9rs\u00e9kelt<\/td>\n<\/tr>\n
                K\u00f6lts\u00e9gek<\/td>\nK\u00f6zepes<\/td>\nAlacsony<\/td>\n<\/tr>\n
                Alkalmaz\u00e1sok<\/td>\nMEMS, optika, laborat\u00f3rium<\/td>\nPalackok, ablakok<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

                Mi\u00e9rt v\u00e1lassza b\u00f3rszilik\u00e1t \u00fcveg osty\u00e1inkat?<\/span><\/h2>\n
                  \n
                • Stabil ell\u00e1t\u00e1s a vezet\u0151 \u00fcveggy\u00e1rt\u00f3kt\u00f3l<\/li>\n
                • Prec\u00edzi\u00f3s megmunk\u00e1l\u00e1si \u00e9s pol\u00edroz\u00e1si k\u00e9pess\u00e9gek<\/li>\n
                • Egyedi m\u00e9retek, vastags\u00e1g \u00e9s fel\u00fcletkezel\u00e9s el\u00e9rhet\u0151<\/li>\n
                • Szigor\u00fa min\u0151s\u00e9gellen\u0151rz\u00e9s \u00e9s tisztaszobai csomagol\u00e1s (100-as oszt\u00e1ly \/ ISO 5)<\/li>\n
                • Gyors sz\u00e1ll\u00edt\u00e1s a szabv\u00e1nyos specifik\u00e1ci\u00f3khoz<\/li>\n<\/ul>\n

                  GYIK<\/span><\/h2>\n

                  \"\"1. k\u00e9rd\u00e9s: Mi a 3.3 boroszilik\u00e1t \u00fcveg?
                  V: Boroszilik\u00e1t \u00fcvegre utal, amelynek h\u0151t\u00e1gul\u00e1si egy\u00fctthat\u00f3ja k\u00f6r\u00fclbel\u00fcl 3,3 \u00d7 10-\u2076\/K, \u00e9s amely kiv\u00e1l\u00f3 h\u0151stabilit\u00e1s\u00e1r\u00f3l ismert.<\/p>\n

                  2. k\u00e9rd\u00e9s: A boroszilik\u00e1t \u00fcvegszelet helyettes\u00edtheti a kvarcszeleteket?
                  V: Ezek k\u00f6lts\u00e9ghat\u00e9kony alternat\u00edvak\u00e9nt szolg\u00e1lhatnak a k\u00f6zepes h\u0151m\u00e9rs\u00e9klet\u0171 alkalmaz\u00e1sokban, de a kvarcot m\u00e9g mindig el\u0151nyben r\u00e9szes\u00edtik a sz\u00e9ls\u0151s\u00e9gesen magas h\u0151m\u00e9rs\u00e9klet\u0171 k\u00f6rnyezetekben.<\/p>\n

                  3. k\u00e9rd\u00e9s: Mi a k\u00fcl\u00f6nbs\u00e9g a boroszilik\u00e1t \u00fcvegszelet \u00e9s a kvarcszelet k\u00f6z\u00f6tt?
                  V: A b\u00f3rszilik\u00e1t \u00fcveglapk\u00e1k k\u00f6lts\u00e9ghat\u00e9konyabb megold\u00e1st k\u00edn\u00e1lnak j\u00f3 h\u0151stabilit\u00e1ssal \u00e9s k\u00e9miai ellen\u00e1ll\u00e1ssal, \u00edgy ide\u00e1lisak MEMS \u00e9s \u00e1ltal\u00e1nos f\u00e9lvezet\u0151 alkalmaz\u00e1sokhoz. A kvarc osty\u00e1k viszont kiv\u00e1l\u00f3 magas h\u0151m\u00e9rs\u00e9klet-\u00e1ll\u00f3s\u00e1got \u00e9s UV-\u00e1tbocs\u00e1t\u00e1st biztos\u00edtanak, \u00e9s el\u0151nyben r\u00e9szes\u00edtik \u0151ket sz\u00e9ls\u0151s\u00e9ges k\u00f6rnyezetben \u00e9s fejlett optikai rendszerekben.<\/p>\n

                  4. k\u00e9rd\u00e9s: Haszn\u00e1lhat\u00f3k-e boroszilik\u00e1t \u00fcvegszeleteket szil\u00edciummal val\u00f3 an\u00f3dos k\u00f6t\u00e9shez?
                  V: Igen, a 3.3 boroszilik\u00e1t \u00fcveglapokat sz\u00e9les k\u00f6rben haszn\u00e1lj\u00e1k a szil\u00edciummal val\u00f3 an\u00f3dos k\u00f6t\u00e9shez, mivel a h\u0151t\u00e1gul\u00e1si egy\u00fctthat\u00f3juk nagyon k\u00f6zel \u00e1ll egym\u00e1shoz. Ez er\u0151s k\u00f6t\u00e9si szil\u00e1rds\u00e1got biztos\u00edt \u00e9s minimaliz\u00e1lja a h\u0151fesz\u00fclts\u00e9get a MEMS \u00e9s mikrofluidikai eszk\u00f6z\u00f6k gy\u00e1rt\u00e1sa sor\u00e1n.<\/p>\n

                  5. k\u00e9rd\u00e9s: Milyen testreszab\u00e1si lehet\u0151s\u00e9gek \u00e1llnak rendelkez\u00e9sre a boroszilik\u00e1t \u00fcveglapok eset\u00e9ben?
                  V: A testreszab\u00e1si lehet\u0151s\u00e9gek sz\u00e9les sk\u00e1l\u00e1j\u00e1t k\u00edn\u00e1ljuk, bele\u00e9rtve az osty\u00e1k \u00e1tm\u00e9r\u0151j\u00e9t (2\u201d-12\u201d), vastags\u00e1g\u00e1t, egy- vagy k\u00e9toldali pol\u00edroz\u00e1st (SSP\/DSP), fel\u00fcleti \u00e9rdess\u00e9get, s\u00edkoss\u00e1got (TTV) \u00e9s egyedi form\u00e1kat, p\u00e9ld\u00e1ul n\u00e9gyzet vagy t\u00e9glalap alak\u00fa szubsztr\u00e1tokat. K\u00e9r\u00e9sre a bevonattal, f\u00far\u00e1ssal vagy mint\u00e1z\u00e1ssal kapcsolatos k\u00fcl\u00f6nleges k\u00f6vetelm\u00e9nyek is t\u00e1mogathat\u00f3k.<\/p>","protected":false},"excerpt":{"rendered":"

                  A magas boroszilik\u00e1t \u00fcveglapk\u00e1k prec\u00edzi\u00f3san megtervezett szubsztr\u00e1tumok, amelyeket sz\u00e9les k\u00f6rben haszn\u00e1lnak f\u00e9lvezet\u0151, MEMS \u00e9s optikai alkalmaz\u00e1sokban. Az alacsony h\u0151t\u00e1gul\u00e1si egy\u00fctthat\u00f3jukr\u00f3l (~3,3 \u00d7 10-\u2076\/K), a kiv\u00e1l\u00f3 k\u00e9miai stabilit\u00e1sukr\u00f3l \u00e9s a nagyfok\u00fa \u00e1tl\u00e1tsz\u00f3s\u00e1gukr\u00f3l ismert \u00fcvegszil\u00e1nkok megb\u00edzhat\u00f3 \u00e9s k\u00f6lts\u00e9ghat\u00e9kony alternat\u00edv\u00e1t jelentenek az olyan anyagok helyett, mint a szil\u00edcium-dioxid \u00e9s a kvarc k\u00f6zepes h\u0151m\u00e9rs\u00e9klet\u0171 k\u00f6rnyezetben.<\/p>","protected":false},"featured_media":2564,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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