{"id":2883,"date":"2026-05-26T06:08:01","date_gmt":"2026-05-26T06:08:01","guid":{"rendered":"https:\/\/www.fuyao-quartz.com\/?post_type=product&#038;p=2883"},"modified":"2026-05-26T06:11:33","modified_gmt":"2026-05-26T06:11:33","slug":"thin-film-lithium-niobate-on-insulator-lnoi-wafer-platform-for-integrated-photonics","status":"publish","type":"product","link":"https:\/\/www.fuyao-quartz.com\/fr\/product\/thin-film-lithium-niobate-on-insulator-lnoi-wafer-platform-for-integrated-photonics\/","title":{"rendered":"Plateforme de plaquettes \u00e0 couche mince de niobate de lithium sur isolant (LNOI) pour la photonique int\u00e9gr\u00e9e"},"content":{"rendered":"<p data-start=\"603\" data-end=\"732\">Les plaquettes de niobate de lithium sur isolant (LNOI) \u00e0 couche mince sont des substrats sp\u00e9cialement con\u00e7us pour les dispositifs photoniques et \u00e9lectro-optiques int\u00e9gr\u00e9s.<\/p>\n<p data-start=\"734\" data-end=\"893\">La plateforme se compose d'un film mince de niobate de lithium monocristallin li\u00e9 \u00e0 une couche d'oxyde enterr\u00e9e (SiO\u2082), le tout support\u00e9 par une plaquette de silicium ou une plaquette isolante.<\/p>\n<p data-start=\"895\" data-end=\"1094\">Cette structure permet un confinement optique \u00e9lev\u00e9, une perte de propagation r\u00e9duite et un rendement \u00e9lectro-optique \u00e9lev\u00e9, ce qui en fait l'une des plateformes mat\u00e9rielles les plus importantes pour la photonique int\u00e9gr\u00e9e moderne.<\/p>\n<hr data-start=\"1096\" data-end=\"1099\" \/>\n<h1 data-section-id=\"z5lkn1\" data-start=\"1101\" data-end=\"1143\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2886 alignright\" src=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-300x300.png 300w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-150x150.png 150w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-768x768.png 768w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-12x12.png 12w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-600x600.png 600w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-100x100.png 100w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Concept du niobate de lithium en couche mince (TFLN)<\/h1>\n<p data-start=\"1145\" data-end=\"1304\">Le niobate de lithium en couche mince (TFLN) d\u00e9signe une couche cristalline de LiNbO\u2083 d'\u00e9paisseur inf\u00e9rieure au micron, con\u00e7ue pour les guides d'ondes optiques \u00e0 fort confinement et la modulation \u00e9lectro-optique.<\/p>\n<p data-start=\"1306\" data-end=\"1356\">Par rapport au niobate de lithium en vrac, le TFLN offre :<\/p>\n<ul data-start=\"1358\" data-end=\"1511\">\n<li data-section-id=\"6eo9fa\" data-start=\"1358\" data-end=\"1396\">Un confinement optique plus efficace<\/li>\n<li data-section-id=\"maxe10\" data-start=\"1397\" data-end=\"1429\">Meilleur rendement de modulation<\/li>\n<li data-section-id=\"14izunr\" data-start=\"1430\" data-end=\"1458\">Encombrement r\u00e9duit<\/li>\n<li data-section-id=\"1xsbopo\" data-start=\"1459\" data-end=\"1511\">Compatibilit\u00e9 avec l'int\u00e9gration photonique sur silicium<\/li>\n<\/ul>\n<p data-start=\"1513\" data-end=\"1591\">La technologie TFLN est mise en \u0153uvre sur des plaquettes LNOI afin de permettre l'int\u00e9gration photonique \u00e0 l'\u00e9chelle de la plaquette.<\/p>\n<hr data-start=\"1593\" data-end=\"1596\" \/>\n<h1 data-section-id=\"ju4mac\" data-start=\"1598\" data-end=\"1618\">Architecture de la plaquette<\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1620\" data-end=\"1956\">\n<thead data-start=\"1620\" data-end=\"1658\">\n<tr data-start=\"1620\" data-end=\"1658\">\n<th class=\"last:pe-10\" data-start=\"1620\" data-end=\"1628\" data-col-size=\"sm\">Couche<\/th>\n<th class=\"last:pe-10\" data-start=\"1628\" data-end=\"1639\" data-col-size=\"sm\">Mat\u00e9riau<\/th>\n<th class=\"last:pe-10\" data-start=\"1639\" data-end=\"1658\" data-col-size=\"md\">R\u00f4le fonctionnel<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1696\" data-end=\"1956\">\n<tr data-start=\"1696\" data-end=\"1783\">\n<td data-start=\"1696\" data-end=\"1711\" data-col-size=\"sm\">Couche mat\u00e9rielle<\/td>\n<td data-start=\"1711\" data-end=\"1737\" data-col-size=\"sm\">Couche mince de LiNbO\u2083 (TFLN)<\/td>\n<td data-col-size=\"md\" data-start=\"1737\" data-end=\"1783\">Modulation \u00e9lectro-optique, optique non lin\u00e9aire<\/td>\n<\/tr>\n<tr data-start=\"1784\" data-end=\"1867\">\n<td data-start=\"1784\" data-end=\"1803\" data-col-size=\"sm\">Couche isolante<\/td>\n<td data-start=\"1803\" data-end=\"1825\" data-col-size=\"sm\">SiO\u2082 (oxyde enterr\u00e9)<\/td>\n<td data-start=\"1825\" data-end=\"1867\" data-col-size=\"md\">Isolation optique et confinement modal<\/td>\n<\/tr>\n<tr data-start=\"1868\" data-end=\"1956\">\n<td data-start=\"1868\" data-end=\"1883\" data-col-size=\"sm\">Plaquette de poign\u00e9e<\/td>\n<td data-start=\"1883\" data-end=\"1908\" data-col-size=\"sm\">Silicium \/ Quartz \/ Saphir<\/td>\n<td data-start=\"1908\" data-end=\"1956\" data-col-size=\"md\">Compatibilit\u00e9 m\u00e9canique et compatibilit\u00e9 des proc\u00e9d\u00e9s<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"1958\" data-end=\"1961\" \/>\n<h1 data-section-id=\"u0ybrq\" data-start=\"1963\" data-end=\"1977\"><img decoding=\"async\" class=\"size-medium wp-image-2884 alignright\" src=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-300x300.png 300w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-150x150.png 150w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-768x768.png 768w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-12x12.png 12w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-600x600.png 600w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-100x100.png 100w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Caract\u00e9ristiques principales<\/h1>\n<p data-start=\"1979\" data-end=\"2058\">Perte de propagation optique ultra-faible &lt; 0,05 dB\/cm \u00e0 la longueur d&#039;onde de t\u00e9l\u00e9communication (1 550 nm)<\/p>\n<p data-start=\"2060\" data-end=\"2110\">Coefficient \u00e9lectro-optique \u00e9lev\u00e9 (r\u2083\u2083 pouvant atteindre 90 pm\/V)<\/p>\n<p data-start=\"2112\" data-end=\"2179\">Compatibilit\u00e9 avec les guides d'ondes submicroniques pour l'int\u00e9gration photonique compacte<\/p>\n<p data-start=\"2181\" data-end=\"2251\">Int\u00e9gration compatible CMOS avec des plateformes en silicium et en nitrure de silicium<\/p>\n<p data-start=\"2253\" data-end=\"2306\">Grande stabilit\u00e9 thermique avec une temp\u00e9rature de Curie d'environ 1 140 \u00b0C<\/p>\n<p data-start=\"2308\" data-end=\"2368\">Plusieurs orientations cristallines disponibles : coupe X, coupe Y, coupe Z<\/p>\n<p data-start=\"2370\" data-end=\"2412\">Tailles de plaquettes adaptables de 3 \u00e0 8 pouces<\/p>\n<hr data-start=\"2414\" data-end=\"2417\" \/>\n<h1 data-section-id=\"zjxypn\" data-start=\"2419\" data-end=\"2445\">Sp\u00e9cifications techniques<\/h1>\n<h2 data-section-id=\"14np8ub\" data-start=\"2447\" data-end=\"2472\">Param\u00e8tres au niveau de la plaquette<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2474\" data-end=\"2691\">\n<thead data-start=\"2474\" data-end=\"2503\">\n<tr data-start=\"2474\" data-end=\"2503\">\n<th class=\"last:pe-10\" data-start=\"2474\" data-end=\"2486\" data-col-size=\"sm\">Param\u00e8tres<\/th>\n<th class=\"last:pe-10\" data-start=\"2486\" data-end=\"2503\" data-col-size=\"sm\">Sp\u00e9cifications<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2532\" data-end=\"2691\">\n<tr data-start=\"2532\" data-end=\"2567\">\n<td data-start=\"2532\" data-end=\"2549\" data-col-size=\"sm\">Diam\u00e8tre de la plaquette<\/td>\n<td data-col-size=\"sm\" data-start=\"2549\" data-end=\"2567\">3 pouces, 4 pouces, 6 pouces, 8 pouces<\/td>\n<\/tr>\n<tr data-start=\"2568\" data-end=\"2595\">\n<td data-start=\"2568\" data-end=\"2580\" data-col-size=\"sm\">\u00c9paisseur<\/td>\n<td data-col-size=\"sm\" data-start=\"2580\" data-end=\"2595\">525 \u00b1 25 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2596\" data-end=\"2612\">\n<td data-start=\"2596\" data-end=\"2602\" data-col-size=\"sm\">Arc<\/td>\n<td data-col-size=\"sm\" data-start=\"2602\" data-end=\"2612\">\u00b150 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2613\" data-end=\"2630\">\n<td data-start=\"2613\" data-end=\"2620\" data-col-size=\"sm\">Distorsion<\/td>\n<td data-start=\"2620\" data-end=\"2630\" data-col-size=\"sm\">&lt; 50 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2631\" data-end=\"2691\">\n<td data-start=\"2631\" data-end=\"2665\" data-col-size=\"sm\">Variation locale d'\u00e9paisseur (LTV)<\/td>\n<td data-col-size=\"sm\" data-start=\"2665\" data-end=\"2691\">&lt; 1,5 \u03bcm (5 \u00d7 5 mm\u00b2, 95%)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2693\" data-end=\"2696\" \/>\n<h2 data-section-id=\"105h6ij\" data-start=\"2698\" data-end=\"2723\">Couche mince de LiNbO\u2083<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2725\" data-end=\"2962\">\n<thead data-start=\"2725\" data-end=\"2754\">\n<tr data-start=\"2725\" data-end=\"2754\">\n<th class=\"last:pe-10\" data-start=\"2725\" data-end=\"2737\" data-col-size=\"sm\">Param\u00e8tres<\/th>\n<th class=\"last:pe-10\" data-start=\"2737\" data-end=\"2754\" data-col-size=\"sm\">Sp\u00e9cifications<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2783\" data-end=\"2962\">\n<tr data-start=\"2783\" data-end=\"2819\">\n<td data-start=\"2783\" data-end=\"2794\" data-col-size=\"sm\">Mat\u00e9riau<\/td>\n<td data-start=\"2794\" data-end=\"2819\" data-col-size=\"sm\">LiNbO\u2083 monocristallin<\/td>\n<\/tr>\n<tr data-start=\"2820\" data-end=\"2858\">\n<td data-start=\"2820\" data-end=\"2838\" data-col-size=\"sm\">Plage d'\u00e9paisseurs<\/td>\n<td data-col-size=\"sm\" data-start=\"2838\" data-end=\"2858\">300 nm \u2013 1 000 nm<\/td>\n<\/tr>\n<tr data-start=\"2859\" data-end=\"2891\">\n<td data-start=\"2859\" data-end=\"2882\" data-col-size=\"sm\">Pr\u00e9cision de l'orientation<\/td>\n<td data-start=\"2882\" data-end=\"2891\" data-col-size=\"sm\">\u00b10,5\u00b0<\/td>\n<\/tr>\n<tr data-start=\"2892\" data-end=\"2925\">\n<td data-start=\"2892\" data-end=\"2912\" data-col-size=\"sm\">Rugosit\u00e9 de surface<\/td>\n<td data-col-size=\"sm\" data-start=\"2912\" data-end=\"2925\">Ra &lt; 1 nm<\/td>\n<\/tr>\n<tr data-start=\"2926\" data-end=\"2962\">\n<td data-start=\"2926\" data-end=\"2944\" data-col-size=\"sm\">Crit\u00e8res de d\u00e9faut<\/td>\n<td data-start=\"2944\" data-end=\"2962\" data-col-size=\"sm\">Pas de vides &gt; 1 mm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2964\" data-end=\"2967\" \/>\n<h2 data-section-id=\"1xdkjas\" data-start=\"2969\" data-end=\"2990\">Couche d'oxyde enterr\u00e9e<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2992\" data-end=\"3135\">\n<thead data-start=\"2992\" data-end=\"3021\">\n<tr data-start=\"2992\" data-end=\"3021\">\n<th class=\"last:pe-10\" data-start=\"2992\" data-end=\"3004\" data-col-size=\"sm\">Param\u00e8tres<\/th>\n<th class=\"last:pe-10\" data-start=\"3004\" data-end=\"3021\" data-col-size=\"sm\">Sp\u00e9cifications<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"3050\" data-end=\"3135\">\n<tr data-start=\"3050\" data-end=\"3069\">\n<td data-start=\"3050\" data-end=\"3061\" data-col-size=\"sm\">Mat\u00e9riau<\/td>\n<td data-start=\"3061\" data-end=\"3069\" data-col-size=\"sm\">SiO\u2082<\/td>\n<\/tr>\n<tr data-start=\"3070\" data-end=\"3114\">\n<td data-start=\"3070\" data-end=\"3082\" data-col-size=\"sm\">\u00c9paisseur<\/td>\n<td data-col-size=\"sm\" data-start=\"3082\" data-end=\"3114\">100 nm \u2013 2 \u03bcm (personnalisable)<\/td>\n<\/tr>\n<tr data-start=\"3115\" data-end=\"3135\">\n<td data-start=\"3115\" data-end=\"3128\" data-col-size=\"sm\">Uniformit\u00e9<\/td>\n<td data-col-size=\"sm\" data-start=\"3128\" data-end=\"3135\">\u00b15%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3137\" data-end=\"3140\" \/>\n<h1 data-section-id=\"xsn2bk\" data-start=\"3142\" data-end=\"3166\">Technologie de fabrication<\/h1>\n<p data-start=\"3168\" data-end=\"3236\">Les plaquettes LNOI sont fabriqu\u00e9es \u00e0 l'aide de proc\u00e9d\u00e9s compatibles avec les semi-conducteurs :<\/p>\n<ul data-start=\"3238\" data-end=\"3536\">\n<li data-section-id=\"13c0fvf\" data-start=\"3238\" data-end=\"3298\">Implantation ionique contr\u00f4l\u00e9e pour la d\u00e9finition de couches cristallines<\/li>\n<li data-section-id=\"1usb3eg\" data-start=\"3299\" data-end=\"3343\">Collage de plaquettes sur des substrats isolants<\/li>\n<li data-section-id=\"1qbyczh\" data-start=\"3344\" data-end=\"3394\">Recuit thermique pour la restauration de la qualit\u00e9 cristalline<\/li>\n<li data-section-id=\"1erbdy1\" data-start=\"3395\" data-end=\"3460\">Polissage m\u00e9cano-chimique (CMP) pour la planarisation de surface<\/li>\n<li data-section-id=\"qs885x\" data-start=\"3461\" data-end=\"3536\">Contr\u00f4le m\u00e9trologique pour l'assurance qualit\u00e9 optique et structurelle<\/li>\n<\/ul>\n<hr data-start=\"3538\" data-end=\"3541\" \/>\n<h1 data-section-id=\"1b9xnf1\" data-start=\"3543\" data-end=\"3563\">Domaines d'application<\/h1>\n<p data-start=\"3565\" data-end=\"3667\">Syst\u00e8mes de communication optique int\u00e9gr\u00e9s comprenant des modulateurs \u00e0 haut d\u00e9bit pour la transmission de 100G \u00e0 800G<\/p>\n<p data-start=\"3669\" data-end=\"3760\">Syst\u00e8mes photoniques quantiques pour la g\u00e9n\u00e9ration de photons intriqu\u00e9s et le traitement de l'information quantique<\/p>\n<p data-start=\"3762\" data-end=\"3843\">La photonique micro-ondes pour le traitement des signaux RF et les syst\u00e8mes photoniques \u00e0 ondes millim\u00e9triques<\/p>\n<p data-start=\"3845\" data-end=\"3939\">Dispositifs optiques non lin\u00e9aires, notamment pour la conversion de fr\u00e9quence et la g\u00e9n\u00e9ration de peignes de fr\u00e9quences optiques<\/p>\n<p data-start=\"3941\" data-end=\"4020\">Syst\u00e8mes de d\u00e9tection optique int\u00e9gr\u00e9s pour la surveillance biochimique et environnementale<\/p>\n<hr data-start=\"4022\" data-end=\"4025\" \/>\n<h1 data-section-id=\"15xe5if\" data-start=\"4027\" data-end=\"4051\">Comparaison des performances<\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"4053\" data-end=\"4419\">\n<thead data-start=\"4053\" data-end=\"4105\">\n<tr data-start=\"4053\" data-end=\"4105\">\n<th class=\"last:pe-10\" data-start=\"4053\" data-end=\"4064\" data-col-size=\"sm\">Propri\u00e9t\u00e9<\/th>\n<th class=\"last:pe-10\" data-start=\"4064\" data-end=\"4078\" data-col-size=\"sm\">LiNbO\u2083 en vrac<\/th>\n<th class=\"last:pe-10\" data-start=\"4078\" data-end=\"4105\" data-col-size=\"sm\">Plateforme \u00e0 couche mince LNOI<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"4160\" data-end=\"4419\">\n<tr data-start=\"4160\" data-end=\"4199\">\n<td data-start=\"4160\" data-end=\"4175\" data-col-size=\"sm\">Perte optique<\/td>\n<td data-start=\"4175\" data-end=\"4184\" data-col-size=\"sm\">Plus \u00e9lev\u00e9<\/td>\n<td data-start=\"4184\" data-end=\"4199\" data-col-size=\"sm\">&lt; 0,05 dB\/cm<\/td>\n<\/tr>\n<tr data-start=\"4200\" data-end=\"4247\">\n<td data-start=\"4200\" data-end=\"4219\" data-col-size=\"sm\">Encombrement de l'appareil<\/td>\n<td data-start=\"4219\" data-end=\"4227\" data-col-size=\"sm\">Grand<\/td>\n<td data-start=\"4227\" data-end=\"4247\" data-col-size=\"sm\">\u00c0 l'\u00e9chelle submicronique<\/td>\n<\/tr>\n<tr data-start=\"4248\" data-end=\"4320\">\n<td data-start=\"4248\" data-end=\"4273\" data-col-size=\"sm\">Capacit\u00e9 d'int\u00e9gration<\/td>\n<td data-start=\"4273\" data-end=\"4283\" data-col-size=\"sm\">Limit\u00e9e<\/td>\n<td data-start=\"4283\" data-end=\"4320\" data-col-size=\"sm\">Int\u00e9gration photonique \u00e0 haute densit\u00e9<\/td>\n<\/tr>\n<tr data-start=\"4321\" data-end=\"4354\">\n<td data-start=\"4321\" data-end=\"4342\" data-col-size=\"sm\">Compatibilit\u00e9 CMOS<\/td>\n<td data-col-size=\"sm\" data-start=\"4342\" data-end=\"4347\">Non<\/td>\n<td data-col-size=\"sm\" data-start=\"4347\" data-end=\"4354\">Oui<\/td>\n<\/tr>\n<tr data-start=\"4355\" data-end=\"4419\">\n<td data-start=\"4355\" data-end=\"4379\" data-col-size=\"sm\">Rendement de modulation<\/td>\n<td data-start=\"4379\" data-end=\"4390\" data-col-size=\"sm\">Mod\u00e9r\u00e9<\/td>\n<td data-col-size=\"sm\" data-start=\"4390\" data-end=\"4419\">\u00c9lev\u00e9e (tension de cr\u00eate d'environ 1 V possible)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"4421\" data-end=\"4424\" \/>\n<h1 data-section-id=\"1ki9ggs\" data-start=\"4426\" data-end=\"4454\">Options d'ing\u00e9nierie sur mesure<\/h1>\n<p data-start=\"4456\" data-end=\"4531\">Orientation cristalline s\u00e9lectionnable parmi les configurations de coupe X, Y et Z<\/p>\n<p data-start=\"4533\" data-end=\"4590\">\u00c9paisseur de la couche mince comprise entre 300 nm et 1 000 nm<\/p>\n<p data-start=\"4592\" data-end=\"4656\">\u00c9paisseur de l'oxyde enterr\u00e9 r\u00e9glable pour le r\u00e9glage du confinement optique<\/p>\n<p data-start=\"4658\" data-end=\"4713\">Les options de substrat comprennent le silicium, le quartz et le saphir<\/p>\n<p data-start=\"4715\" data-end=\"4772\">Dopage facultatif au MgO pour am\u00e9liorer le seuil de dommage optique<\/p>\n<hr data-start=\"4774\" data-end=\"4777\" \/>\n<h1 data-section-id=\"138iuoj\" data-start=\"4779\" data-end=\"4812\"><img decoding=\"async\" class=\"size-medium wp-image-2885 alignright\" src=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-300x300.png 300w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-150x150.png 150w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-768x768.png 768w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-12x12.png 12w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-600x600.png 600w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-100x100.png 100w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Assurance qualit\u00e9 et m\u00e9trologie<\/h1>\n<p data-start=\"4814\" data-end=\"4873\">Chaque plaquette est soumise \u00e0 un contr\u00f4le rigoureux de qualit\u00e9 semi-conductrice :<\/p>\n<p data-start=\"4875\" data-end=\"4927\">Mesure des pertes optiques dans les bandes de longueurs d'onde des t\u00e9l\u00e9communications<\/p>\n<p data-start=\"4929\" data-end=\"4985\">Microscopie \u00e0 force atomique pour l'\u00e9valuation de la rugosit\u00e9 de surface<\/p>\n<p data-start=\"4987\" data-end=\"5038\">Inspection par infrarouge pour v\u00e9rifier l'int\u00e9grit\u00e9 de l'interface de collage<\/p>\n<p data-start=\"5040\" data-end=\"5090\">Cartographie de l'\u00e9paisseur et de l'uniformit\u00e9 sur l'ensemble de la plaquette<\/p>\n<p data-start=\"5092\" data-end=\"5139\">Analyse de la plan\u00e9it\u00e9 des plaquettes et de la r\u00e9partition des contraintes<\/p>\n<hr data-start=\"5141\" data-end=\"5144\" \/>\n<h1 data-section-id=\"1791hl0\" data-start=\"5146\" data-end=\"5188\">Comp\u00e9tences en ing\u00e9nierie et en fabrication<\/h1>\n<p data-start=\"5190\" data-end=\"5457\"><span class=\"hover:entity-accent entity-underline inline cursor-pointer align-baseline\"><span class=\"whitespace-normal\">ZMSH<\/span><\/span> propose des solutions d'ing\u00e9nierie compl\u00e8tes pour les plaquettes LNOI, notamment la conception des mat\u00e9riaux, le d\u00e9veloppement de proc\u00e9d\u00e9s de collage de plaquettes, l'accompagnement dans la fabrication de dispositifs photoniques, les proc\u00e9d\u00e9s de nanofabrication (EBL, IBE) et les services de caract\u00e9risation optique.<\/p>\n<p data-start=\"5459\" data-end=\"5641\">Les capacit\u00e9s de production permettent \u00e0 la fois le prototypage \u00e0 l'\u00e9chelle de la R&amp;D et la fabrication de lots de petite et moyenne taille, avec une production stable en 6 pouces et le d\u00e9veloppement continu de plateformes LNOI en 8 pouces.<\/p>\n<hr data-start=\"5643\" data-end=\"5646\" \/>\n<h1 data-section-id=\"hkd5a4\" data-start=\"5648\" data-end=\"5676\">Questions fr\u00e9quemment pos\u00e9es<\/h1>\n<p data-start=\"5678\" data-end=\"5831\">1. \u00c0 quoi sert le niobate de lithium en couche mince ?<br data-start=\"5720\" data-end=\"5723\" \/>Il est utilis\u00e9 en photonique int\u00e9gr\u00e9e, en t\u00e9l\u00e9communications optiques, en photonique quantique et dans les dispositifs optiques non lin\u00e9aires.<\/p>\n<p data-start=\"5833\" data-end=\"5990\">2. Quelle est l'\u00e9paisseur habituelle d'un film mince de niobate de lithium ?<br data-start=\"5895\" data-end=\"5898\" \/>L'\u00e9paisseur du film varie g\u00e9n\u00e9ralement entre 300 nm et 1 000 nm, en fonction des sp\u00e9cifications du dispositif.<\/p>\n<p data-start=\"5992\" data-end=\"6164\">3. Quels sont les avantages du LNOI par rapport au niobate de lithium en vrac ?<br data-start=\"6049\" data-end=\"6052\" \/>La technologie LNOI permet de r\u00e9duire les pertes optiques, d'augmenter la densit\u00e9 d'int\u00e9gration et d'assurer la compatibilit\u00e9 avec les plateformes de photonique sur silicium.<\/p>\n<p data-start=\"6166\" data-end=\"6290\">4. La technologie LNOI est-elle compatible avec la photonique sur silicium ?<br data-start=\"6207\" data-end=\"6210\" \/>Oui, la technologie LNOI peut \u00eatre int\u00e9gr\u00e9e \u00e0 des plateformes photoniques en silicium et en nitrure de silicium.<\/p>","protected":false},"excerpt":{"rendered":"<p data-start=\"603\" data-end=\"732\">Les plaquettes de niobate de lithium sur isolant (LNOI) \u00e0 couche mince sont des substrats sp\u00e9cialement con\u00e7us pour les dispositifs photoniques et \u00e9lectro-optiques int\u00e9gr\u00e9s.<\/p>\n<p data-start=\"734\" data-end=\"893\">La plateforme se compose d'un film mince de niobate de lithium monocristallin li\u00e9 \u00e0 une couche d'oxyde enterr\u00e9e (SiO\u2082), le tout support\u00e9 par une plaquette de silicium ou une plaquette isolante.<\/p>\n<p data-start=\"895\" data-end=\"1094\">Cette structure permet un confinement optique \u00e9lev\u00e9, une perte de propagation r\u00e9duite et un rendement \u00e9lectro-optique \u00e9lev\u00e9, ce qui en fait l'une des plateformes mat\u00e9rielles les plus importantes pour la photonique int\u00e9gr\u00e9e moderne.<\/p>","protected":false},"featured_media":2887,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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