{"id":2883,"date":"2026-05-26T06:08:01","date_gmt":"2026-05-26T06:08:01","guid":{"rendered":"https:\/\/www.fuyao-quartz.com\/?post_type=product&#038;p=2883"},"modified":"2026-05-26T06:11:33","modified_gmt":"2026-05-26T06:11:33","slug":"thin-film-lithium-niobate-on-insulator-lnoi-wafer-platform-for-integrated-photonics","status":"publish","type":"product","link":"https:\/\/www.fuyao-quartz.com\/de\/product\/thin-film-lithium-niobate-on-insulator-lnoi-wafer-platform-for-integrated-photonics\/","title":{"rendered":"D\u00fcnnschicht-LNOI-Wafer-Plattform (Lithium-Niobat auf Isolator) f\u00fcr die integrierte Photonik"},"content":{"rendered":"<p data-start=\"603\" data-end=\"732\">D\u00fcnnschicht-LNOI-Wafer (Lithium-Niobat auf Isolator) sind speziell entwickelte Substrate f\u00fcr integrierte photonische und elektrooptische Bauelemente.<\/p>\n<p data-start=\"734\" data-end=\"893\">Die Plattform besteht aus einer D\u00fcnnschicht aus einkristallinem Lithiumniobat, die auf eine vergrabene Oxidschicht (SiO\u2082) aufgebracht ist und von einem Silizium- oder isolierenden Tr\u00e4gerwafer getragen wird.<\/p>\n<p data-start=\"895\" data-end=\"1094\">Diese Struktur erm\u00f6glicht eine starke optische Einschr\u00e4nkung, geringere Ausbreitungsverluste und eine hohe elektrooptische Effizienz, was sie zu einer der wichtigsten Materialplattformen f\u00fcr die moderne integrierte Photonik macht.<\/p>\n<hr data-start=\"1096\" data-end=\"1099\" \/>\n<h1 data-section-id=\"z5lkn1\" data-start=\"1101\" data-end=\"1143\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2886 alignright\" src=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-300x300.png 300w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-150x150.png 150w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-768x768.png 768w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-12x12.png 12w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-600x600.png 600w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-100x100.png 100w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Das Konzept des D\u00fcnnschicht-Lithiumniobats (TFLN)<\/h1>\n<p data-start=\"1145\" data-end=\"1304\">Unter \u201eD\u00fcnnschicht-Lithiumniobat (TFLN)\u201c versteht man eine kristalline LiNbO\u2083-Schicht im Submikrometerbereich, die f\u00fcr optische Wellenleiter mit hohem Einschlussgrad und f\u00fcr die elektrooptische Modulation entwickelt wurde.<\/p>\n<p data-start=\"1306\" data-end=\"1356\">Im Vergleich zu massivem Lithiumniobat bietet TFLN folgende Vorteile:<\/p>\n<ul data-start=\"1358\" data-end=\"1511\">\n<li data-section-id=\"6eo9fa\" data-start=\"1358\" data-end=\"1396\">St\u00e4rkere optische Feldbegrenzung<\/li>\n<li data-section-id=\"maxe10\" data-start=\"1397\" data-end=\"1429\">H\u00f6here Modulationseffizienz<\/li>\n<li data-section-id=\"14izunr\" data-start=\"1430\" data-end=\"1458\">Geringerer Platzbedarf<\/li>\n<li data-section-id=\"1xsbopo\" data-start=\"1459\" data-end=\"1511\">Kompatibilit\u00e4t mit der Integration von Siliziumphotonik<\/li>\n<\/ul>\n<p data-start=\"1513\" data-end=\"1591\">TFLN wird auf LNOI-Wafern implementiert, um eine photonische Integration im Waferma\u00dfstab zu erm\u00f6glichen.<\/p>\n<hr data-start=\"1593\" data-end=\"1596\" \/>\n<h1 data-section-id=\"ju4mac\" data-start=\"1598\" data-end=\"1618\">Wafer-Architektur<\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1620\" data-end=\"1956\">\n<thead data-start=\"1620\" data-end=\"1658\">\n<tr data-start=\"1620\" data-end=\"1658\">\n<th class=\"last:pe-10\" data-start=\"1620\" data-end=\"1628\" data-col-size=\"sm\">Ebene<\/th>\n<th class=\"last:pe-10\" data-start=\"1628\" data-end=\"1639\" data-col-size=\"sm\">Material<\/th>\n<th class=\"last:pe-10\" data-start=\"1639\" data-end=\"1658\" data-col-size=\"md\">Funktionale Rolle<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1696\" data-end=\"1956\">\n<tr data-start=\"1696\" data-end=\"1783\">\n<td data-start=\"1696\" data-end=\"1711\" data-col-size=\"sm\">Ger\u00e4teebene<\/td>\n<td data-start=\"1711\" data-end=\"1737\" data-col-size=\"sm\">LiNbO\u2083-D\u00fcnnschicht (TFLN)<\/td>\n<td data-col-size=\"md\" data-start=\"1737\" data-end=\"1783\">Elektrooptische Modulation, nichtlineare Optik<\/td>\n<\/tr>\n<tr data-start=\"1784\" data-end=\"1867\">\n<td data-start=\"1784\" data-end=\"1803\" data-col-size=\"sm\">Isolierschicht<\/td>\n<td data-start=\"1803\" data-end=\"1825\" data-col-size=\"sm\">SiO\u2082 (vergrabenes Oxid)<\/td>\n<td data-start=\"1825\" data-end=\"1867\" data-col-size=\"md\">Optische Isolation und Modeneinschr\u00e4nkung<\/td>\n<\/tr>\n<tr data-start=\"1868\" data-end=\"1956\">\n<td data-start=\"1868\" data-end=\"1883\" data-col-size=\"sm\">Griffplatte<\/td>\n<td data-start=\"1883\" data-end=\"1908\" data-col-size=\"sm\">Silizium \/ Quarz \/ Saphir<\/td>\n<td data-start=\"1908\" data-end=\"1956\" data-col-size=\"md\">Mechanische Unterst\u00fctzung und Prozesskompatibilit\u00e4t<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"1958\" data-end=\"1961\" \/>\n<h1 data-section-id=\"u0ybrq\" data-start=\"1963\" data-end=\"1977\"><img decoding=\"async\" class=\"size-medium wp-image-2884 alignright\" src=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-300x300.png 300w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-150x150.png 150w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-768x768.png 768w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-12x12.png 12w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-600x600.png 600w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-100x100.png 100w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Wesentliche Merkmale<\/h1>\n<p data-start=\"1979\" data-end=\"2058\">Extrem geringer optischer \u00dcbertragungsverlust &lt; 0,05 dB\/cm bei der Telekommunikationswellenl\u00e4nge (1550 nm)<\/p>\n<p data-start=\"2060\" data-end=\"2110\">Hoher elektrooptischer Koeffizient (r\u2083\u2083 bis zu 90 pm\/V)<\/p>\n<p data-start=\"2112\" data-end=\"2179\">Kompatibilit\u00e4t mit Wellenleitern im Submikrometerbereich f\u00fcr kompakte photonische Integration<\/p>\n<p data-start=\"2181\" data-end=\"2251\">CMOS-kompatible Integration mit Silizium- und Siliziumnitrid-Plattformen<\/p>\n<p data-start=\"2253\" data-end=\"2306\">Hohe thermische Stabilit\u00e4t mit einer Curie-Temperatur von ca. 1140 \u00b0C<\/p>\n<p data-start=\"2308\" data-end=\"2368\">Verschiedene Kristallorientierungen verf\u00fcgbar: X-Schnitt, Y-Schnitt, Z-Schnitt<\/p>\n<p data-start=\"2370\" data-end=\"2412\">Wafergr\u00f6\u00dfen von 3 bis 8 Zoll<\/p>\n<hr data-start=\"2414\" data-end=\"2417\" \/>\n<h1 data-section-id=\"zjxypn\" data-start=\"2419\" data-end=\"2445\">Technische Daten<\/h1>\n<h2 data-section-id=\"14np8ub\" data-start=\"2447\" data-end=\"2472\">Parameter auf Wafer-Ebene<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2474\" data-end=\"2691\">\n<thead data-start=\"2474\" data-end=\"2503\">\n<tr data-start=\"2474\" data-end=\"2503\">\n<th class=\"last:pe-10\" data-start=\"2474\" data-end=\"2486\" data-col-size=\"sm\">Parameter<\/th>\n<th class=\"last:pe-10\" data-start=\"2486\" data-end=\"2503\" data-col-size=\"sm\">Spezifikation<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2532\" data-end=\"2691\">\n<tr data-start=\"2532\" data-end=\"2567\">\n<td data-start=\"2532\" data-end=\"2549\" data-col-size=\"sm\">Waferdurchmesser<\/td>\n<td data-col-size=\"sm\" data-start=\"2549\" data-end=\"2567\">3\u2033, 4\u2033, 6\u2033, 8\u2033<\/td>\n<\/tr>\n<tr data-start=\"2568\" data-end=\"2595\">\n<td data-start=\"2568\" data-end=\"2580\" data-col-size=\"sm\">Dicke<\/td>\n<td data-col-size=\"sm\" data-start=\"2580\" data-end=\"2595\">525 \u00b1 25 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2596\" data-end=\"2612\">\n<td data-start=\"2596\" data-end=\"2602\" data-col-size=\"sm\">Bogen<\/td>\n<td data-col-size=\"sm\" data-start=\"2602\" data-end=\"2612\">\u00b150 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2613\" data-end=\"2630\">\n<td data-start=\"2613\" data-end=\"2620\" data-col-size=\"sm\">Warp<\/td>\n<td data-start=\"2620\" data-end=\"2630\" data-col-size=\"sm\">&lt;50 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2631\" data-end=\"2691\">\n<td data-start=\"2631\" data-end=\"2665\" data-col-size=\"sm\">Lokale Dickenabweichung (LTV)<\/td>\n<td data-col-size=\"sm\" data-start=\"2665\" data-end=\"2691\">&lt;1,5 \u03bcm (5 \u00d7 5 mm\u00b2, 95%)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2693\" data-end=\"2696\" \/>\n<h2 data-section-id=\"105h6ij\" data-start=\"2698\" data-end=\"2723\">LiNbO\u2083-D\u00fcnnschicht<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2725\" data-end=\"2962\">\n<thead data-start=\"2725\" data-end=\"2754\">\n<tr data-start=\"2725\" data-end=\"2754\">\n<th class=\"last:pe-10\" data-start=\"2725\" data-end=\"2737\" data-col-size=\"sm\">Parameter<\/th>\n<th class=\"last:pe-10\" data-start=\"2737\" data-end=\"2754\" data-col-size=\"sm\">Spezifikation<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2783\" data-end=\"2962\">\n<tr data-start=\"2783\" data-end=\"2819\">\n<td data-start=\"2783\" data-end=\"2794\" data-col-size=\"sm\">Material<\/td>\n<td data-start=\"2794\" data-end=\"2819\" data-col-size=\"sm\">LiNbO\u2083-Einkristall<\/td>\n<\/tr>\n<tr data-start=\"2820\" data-end=\"2858\">\n<td data-start=\"2820\" data-end=\"2838\" data-col-size=\"sm\">Dickenbereich<\/td>\n<td data-col-size=\"sm\" data-start=\"2838\" data-end=\"2858\">300 nm \u2013 1000 nm<\/td>\n<\/tr>\n<tr data-start=\"2859\" data-end=\"2891\">\n<td data-start=\"2859\" data-end=\"2882\" data-col-size=\"sm\">Ausrichtungsgenauigkeit<\/td>\n<td data-start=\"2882\" data-end=\"2891\" data-col-size=\"sm\">\u00b10,5\u00b0<\/td>\n<\/tr>\n<tr data-start=\"2892\" data-end=\"2925\">\n<td data-start=\"2892\" data-end=\"2912\" data-col-size=\"sm\">Oberfl\u00e4chenrauhigkeit<\/td>\n<td data-col-size=\"sm\" data-start=\"2912\" data-end=\"2925\">Ra &lt; 1 nm<\/td>\n<\/tr>\n<tr data-start=\"2926\" data-end=\"2962\">\n<td data-start=\"2926\" data-end=\"2944\" data-col-size=\"sm\">Fehlerkriterien<\/td>\n<td data-start=\"2944\" data-end=\"2962\" data-col-size=\"sm\">Keine Hohlr\u00e4ume &gt; 1 mm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2964\" data-end=\"2967\" \/>\n<h2 data-section-id=\"1xdkjas\" data-start=\"2969\" data-end=\"2990\">Vergrabene Oxidschicht<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2992\" data-end=\"3135\">\n<thead data-start=\"2992\" data-end=\"3021\">\n<tr data-start=\"2992\" data-end=\"3021\">\n<th class=\"last:pe-10\" data-start=\"2992\" data-end=\"3004\" data-col-size=\"sm\">Parameter<\/th>\n<th class=\"last:pe-10\" data-start=\"3004\" data-end=\"3021\" data-col-size=\"sm\">Spezifikation<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"3050\" data-end=\"3135\">\n<tr data-start=\"3050\" data-end=\"3069\">\n<td data-start=\"3050\" data-end=\"3061\" data-col-size=\"sm\">Material<\/td>\n<td data-start=\"3061\" data-end=\"3069\" data-col-size=\"sm\">SiO\u2082<\/td>\n<\/tr>\n<tr data-start=\"3070\" data-end=\"3114\">\n<td data-start=\"3070\" data-end=\"3082\" data-col-size=\"sm\">Dicke<\/td>\n<td data-col-size=\"sm\" data-start=\"3082\" data-end=\"3114\">100 nm \u2013 2 \u03bcm (individuell anpassbar)<\/td>\n<\/tr>\n<tr data-start=\"3115\" data-end=\"3135\">\n<td data-start=\"3115\" data-end=\"3128\" data-col-size=\"sm\">Einheitlichkeit<\/td>\n<td data-col-size=\"sm\" data-start=\"3128\" data-end=\"3135\">\u00b15%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3137\" data-end=\"3140\" \/>\n<h1 data-section-id=\"xsn2bk\" data-start=\"3142\" data-end=\"3166\">Fertigungstechnik<\/h1>\n<p data-start=\"3168\" data-end=\"3236\">LNOI-Wafer werden unter Verwendung halbleiterkompatibler Verfahren hergestellt:<\/p>\n<ul data-start=\"3238\" data-end=\"3536\">\n<li data-section-id=\"13c0fvf\" data-start=\"3238\" data-end=\"3298\">Kontrollierte Ionenimplantation zur Definition von Kristallschichten<\/li>\n<li data-section-id=\"1usb3eg\" data-start=\"3299\" data-end=\"3343\">Wafer-Bonding auf isolierende Substrate<\/li>\n<li data-section-id=\"1qbyczh\" data-start=\"3344\" data-end=\"3394\">Thermisches Tempern zur Wiederherstellung der Kristallqualit\u00e4t<\/li>\n<li data-section-id=\"1erbdy1\" data-start=\"3395\" data-end=\"3460\">Chemisch-mechanisches Polieren (CMP) zur Oberfl\u00e4chenplanarisierung<\/li>\n<li data-section-id=\"qs885x\" data-start=\"3461\" data-end=\"3536\">Messtechnische Pr\u00fcfung zur optischen und strukturellen Qualit\u00e4tssicherung<\/li>\n<\/ul>\n<hr data-start=\"3538\" data-end=\"3541\" \/>\n<h1 data-section-id=\"1b9xnf1\" data-start=\"3543\" data-end=\"3563\">Anwendungsbereiche<\/h1>\n<p data-start=\"3565\" data-end=\"3667\">Integrierte optische Kommunikationssysteme mit Hochgeschwindigkeitsmodulatoren f\u00fcr die \u00dcbertragung von 100G bis 800G<\/p>\n<p data-start=\"3669\" data-end=\"3760\">Quantenphotonische Systeme zur Erzeugung verschr\u00e4nkter Photonen und zur Quanteninformationsverarbeitung<\/p>\n<p data-start=\"3762\" data-end=\"3843\">Mikrowellenphotonik f\u00fcr die HF-Signalverarbeitung und photonische Millimeterwellen-Systeme<\/p>\n<p data-start=\"3845\" data-end=\"3939\">Nichtlineare optische Bauelemente, einschlie\u00dflich Frequenzkonversion und Erzeugung optischer Frequenzk\u00e4mme<\/p>\n<p data-start=\"3941\" data-end=\"4020\">Integrierte optische Sensorsysteme f\u00fcr die biochemische und umweltbezogene \u00dcberwachung<\/p>\n<hr data-start=\"4022\" data-end=\"4025\" \/>\n<h1 data-section-id=\"15xe5if\" data-start=\"4027\" data-end=\"4051\">Leistungsvergleich<\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"4053\" data-end=\"4419\">\n<thead data-start=\"4053\" data-end=\"4105\">\n<tr data-start=\"4053\" data-end=\"4105\">\n<th class=\"last:pe-10\" data-start=\"4053\" data-end=\"4064\" data-col-size=\"sm\">Eigentum<\/th>\n<th class=\"last:pe-10\" data-start=\"4064\" data-end=\"4078\" data-col-size=\"sm\">LiNbO\u2083 in Gro\u00dfmengen<\/th>\n<th class=\"last:pe-10\" data-start=\"4078\" data-end=\"4105\" data-col-size=\"sm\">LNOI-D\u00fcnnschichtplattform<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"4160\" data-end=\"4419\">\n<tr data-start=\"4160\" data-end=\"4199\">\n<td data-start=\"4160\" data-end=\"4175\" data-col-size=\"sm\">Optischer Verlust<\/td>\n<td data-start=\"4175\" data-end=\"4184\" data-col-size=\"sm\">H\u00f6her<\/td>\n<td data-start=\"4184\" data-end=\"4199\" data-col-size=\"sm\">&lt;0,05 dB\/cm<\/td>\n<\/tr>\n<tr data-start=\"4200\" data-end=\"4247\">\n<td data-start=\"4200\" data-end=\"4219\" data-col-size=\"sm\">Ger\u00e4teabmessungen<\/td>\n<td data-start=\"4219\" data-end=\"4227\" data-col-size=\"sm\">Gro\u00df<\/td>\n<td data-start=\"4227\" data-end=\"4247\" data-col-size=\"sm\">Submikrometerbereich<\/td>\n<\/tr>\n<tr data-start=\"4248\" data-end=\"4320\">\n<td data-start=\"4248\" data-end=\"4273\" data-col-size=\"sm\">Integrationsf\u00e4higkeit<\/td>\n<td data-start=\"4273\" data-end=\"4283\" data-col-size=\"sm\">Begrenzt<\/td>\n<td data-start=\"4283\" data-end=\"4320\" data-col-size=\"sm\">Hochdichte photonische Integration<\/td>\n<\/tr>\n<tr data-start=\"4321\" data-end=\"4354\">\n<td data-start=\"4321\" data-end=\"4342\" data-col-size=\"sm\">CMOS-Kompatibilit\u00e4t<\/td>\n<td data-col-size=\"sm\" data-start=\"4342\" data-end=\"4347\">Nein<\/td>\n<td data-col-size=\"sm\" data-start=\"4347\" data-end=\"4354\">Ja<\/td>\n<\/tr>\n<tr data-start=\"4355\" data-end=\"4419\">\n<td data-start=\"4355\" data-end=\"4379\" data-col-size=\"sm\">Modulationseffizienz<\/td>\n<td data-start=\"4379\" data-end=\"4390\" data-col-size=\"sm\">M\u00e4\u00dfig<\/td>\n<td data-col-size=\"sm\" data-start=\"4390\" data-end=\"4419\">Hoch (V\u03c0 ~ 1 V erreichbar)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"4421\" data-end=\"4424\" \/>\n<h1 data-section-id=\"1ki9ggs\" data-start=\"4426\" data-end=\"4454\">Ma\u00dfgeschneiderte technische L\u00f6sungen<\/h1>\n<p data-start=\"4456\" data-end=\"4531\">Kristallorientierung w\u00e4hlbar zwischen X-, Y- und Z-Schnitt-Konfigurationen<\/p>\n<p data-start=\"4533\" data-end=\"4590\">D\u00fcnnschichtdicke im Bereich von 300 nm bis 1000 nm<\/p>\n<p data-start=\"4592\" data-end=\"4656\">Einstellbare Dicke des vergrabenen Oxids zur Abstimmung der optischen Einschr\u00e4nkung<\/p>\n<p data-start=\"4658\" data-end=\"4713\">Zu den Substratoptionen geh\u00f6ren Silizium, Quarz und Saphir<\/p>\n<p data-start=\"4715\" data-end=\"4772\">Optionale MgO-Dotierung zur Verbesserung der optischen Schadensschwelle<\/p>\n<hr data-start=\"4774\" data-end=\"4777\" \/>\n<h1 data-section-id=\"138iuoj\" data-start=\"4779\" data-end=\"4812\"><img decoding=\"async\" class=\"size-medium wp-image-2885 alignright\" src=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-300x300.png 300w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-150x150.png 150w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-768x768.png 768w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-12x12.png 12w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-600x600.png 600w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-100x100.png 100w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Qualit\u00e4tssicherung und Messtechnik<\/h1>\n<p data-start=\"4814\" data-end=\"4873\">Jeder Wafer durchl\u00e4uft eine strenge Pr\u00fcfung nach Halbleiter-Standards:<\/p>\n<p data-start=\"4875\" data-end=\"4927\">Messung optischer Verluste in Telekommunikationswellenl\u00e4ngenbereichen<\/p>\n<p data-start=\"4929\" data-end=\"4985\">Rasterkraftmikroskopie zur Beurteilung der Oberfl\u00e4chenrauheit<\/p>\n<p data-start=\"4987\" data-end=\"5038\">Infrarotpr\u00fcfung zur \u00dcberpr\u00fcfung der Unversehrtheit der Klebefl\u00e4che<\/p>\n<p data-start=\"5040\" data-end=\"5090\">Darstellung der Dicke und Gleichm\u00e4\u00dfigkeit \u00fcber den gesamten Wafer<\/p>\n<p data-start=\"5092\" data-end=\"5139\">Analyse der Wafer-Ebenheit und der Spannungsverteilung<\/p>\n<hr data-start=\"5141\" data-end=\"5144\" \/>\n<h1 data-section-id=\"1791hl0\" data-start=\"5146\" data-end=\"5188\">Technische und fertigungstechnische Kompetenzen<\/h1>\n<p data-start=\"5190\" data-end=\"5457\"><span class=\"hover:entity-accent entity-underline inline cursor-pointer align-baseline\"><span class=\"whitespace-normal\">ZMSH<\/span><\/span> bietet umfassende LNOI-Wafer-Engineering-L\u00f6sungen an, darunter Materialdesign, Entwicklung von Wafer-Bonding-Verfahren, Unterst\u00fctzung bei der Herstellung photonischer Bauelemente, Nanofabrikationsverfahren (EBL, IBE) sowie Dienstleistungen zur optischen Charakterisierung.<\/p>\n<p data-start=\"5459\" data-end=\"5641\">Die Produktionskapazit\u00e4ten decken sowohl die Prototypenfertigung im Forschungs- und Entwicklungsma\u00dfstab als auch die Fertigung kleiner bis mittlerer Losgr\u00f6\u00dfen ab, wobei eine stabile 6-Zoll-Produktion gew\u00e4hrleistet ist und die Entwicklung von 8-Zoll-LNOI-Plattformen vorangetrieben wird.<\/p>\n<hr data-start=\"5643\" data-end=\"5646\" \/>\n<h1 data-section-id=\"hkd5a4\" data-start=\"5648\" data-end=\"5676\">H\u00e4ufig gestellte Fragen<\/h1>\n<p data-start=\"5678\" data-end=\"5831\">1. Wof\u00fcr wird Lithium-Niobat-D\u00fcnnschicht verwendet?<br data-start=\"5720\" data-end=\"5723\" \/>Es findet Anwendung in der integrierten Photonik, der optischen Kommunikation, der Quantenphotonik und bei nichtlinearen optischen Bauelementen.<\/p>\n<p data-start=\"5833\" data-end=\"5990\">2. Wie dick ist eine Lithium-Niobat-D\u00fcnnschicht in der Regel?<br data-start=\"5895\" data-end=\"5898\" \/>Die Schichtdicke liegt je nach den Anforderungen des Bauteils in der Regel zwischen 300 nm und 1000 nm.<\/p>\n<p data-start=\"5992\" data-end=\"6164\">3. Welche Vorteile bietet LNOI gegen\u00fcber Lithium-Niobat in loser Form?<br data-start=\"6049\" data-end=\"6052\" \/>LNOI erm\u00f6glicht geringere optische Verluste, eine h\u00f6here Integrationsdichte und Kompatibilit\u00e4t mit Silizium-Photonik-Plattformen.<\/p>\n<p data-start=\"6166\" data-end=\"6290\">4. Ist LNOI mit Siliziumphotonik kompatibel?<br data-start=\"6207\" data-end=\"6210\" \/>Ja, LNOI l\u00e4sst sich in photonische Plattformen aus Silizium und Siliziumnitrid integrieren.<\/p>","protected":false},"excerpt":{"rendered":"<p data-start=\"603\" data-end=\"732\">D\u00fcnnschicht-LNOI-Wafer (Lithium-Niobat auf Isolator) sind speziell entwickelte Substrate f\u00fcr integrierte photonische und elektrooptische Bauelemente.<\/p>\n<p data-start=\"734\" data-end=\"893\">Die Plattform besteht aus einer D\u00fcnnschicht aus einkristallinem Lithiumniobat, die auf eine vergrabene Oxidschicht (SiO\u2082) aufgebracht ist und von einem Silizium- oder isolierenden Tr\u00e4gerwafer getragen wird.<\/p>\n<p data-start=\"895\" data-end=\"1094\">Diese Struktur erm\u00f6glicht eine starke optische Einschr\u00e4nkung, geringere Ausbreitungsverluste und eine hohe elektrooptische Effizienz, was sie zu einer der wichtigsten Materialplattformen f\u00fcr die moderne integrierte Photonik macht.<\/p>","protected":false},"featured_media":2887,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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