Quartz boats, also known as fused silica wafer carriers, are essential components for high-temperature and high-purity processing environments. Manufactured from ultra-high purity silicon dioxide (SiO₂ ≥99.99%), they are specifically designed to hold and transport semiconductor wafers during critical processes such as diffusion, LPCVD, oxidation, annealing, and epitaxy.
With excellent thermal stability, chemical resistance, and dimensional accuracy, quartz boats can operate continuously at temperatures up to 1100°C and withstand short-term exposure up to 1450°C. Their low thermal expansion and high purity make them ideal for contamination-sensitive applications in semiconductor fabrication, photovoltaics, and advanced laboratory research.
As demand grows in SiC, GaN, and next-generation semiconductor technologies, quartz boats continue to play a key role in ensuring process stability and production yield.
Technical Specifications
| Parameter | Wert |
|---|---|
| Material | Fused Quartz (SiO₂) |
| Purity | ≥99.99% |
| Dichte | 2,2 g/cm³ |
| Mohs-Härte | 6.6 |
| Continuous Operating Temperature | 1100°C |
| Max Short-Term Temperature | 1450°C |
| Melting Point | ~1730°C |
| Thermische Ausdehnung | 0.55 × 10⁻⁶ /°C |
| Wärmeleitfähigkeit | ~1.3–1.4 W/m·K |
| Visible Light Transmittance | >93% |
| UV Transmittance | ~80% |
| Electrical Resistivity | Extremely high (≈10⁴× conventional glass) |
| Surface Roughness | Ra ≤0.1 μm (customizable) |
| Chemische Beständigkeit | Strong acids (except HF), high corrosion resistance |
Material Types & Customization
To meet diverse process requirements, we offer multiple quartz material options:
-
Transparent Quartz (JGS1, UV Grade)
High UV transmittance, suitable for lithography and optical applications -
Opaque Quartz
Enhanced thermal shock resistance, ideal for diffusion and annealing -
Synthetic Quartz (CVD Quartz)
Ultra-low impurities (<0.1 ppm), excellent plasma resistance -
Doped Quartz (Ti/Ce)
Improved crystallization resistance for ultra-high temperature environments
Customization Options
-
Wafer sizes: 100mm / 150mm / 200mm / 300mm
-
Slot spacing and thickness
-
U-type, V-type, or custom geometries
-
Surface finish optimization (Ra ≤0.05 μm available)
-
Special coatings and structural enhancements
Anwendungen
Halbleiterindustrie
-
Diffusion and oxidation processes
-
LPCVD and epitaxial growth
-
Ion implantation and etching
Photovoltaic Industry
-
PERC and TOPCon cell processing
-
High-temperature doping
LED & Optoelectronics
-
MOCVD wafer carriers
-
Optical device support
Research & Advanced Systems
-
Ultra-high vacuum (UHV) environments
-
Synchrotron and MBE systems
Die wichtigsten Vorteile
1. Exceptional Thermal Performance
-
Stable at high temperatures up to 1100°C
-
Resistant to rapid thermal cycling without cracking
2. Superior Chemical Stability
-
Resistant to strong acids and corrosive gases
-
Significantly outperforms metals and ceramics in harsh environments
3. High Cleanliness
-
Cleanroom manufacturing standards
-
Low particle generation for semiconductor-grade processes
4. Precision & Reliability
-
Tight tolerances (±0.01 mm achievable)
-
Smooth surface for wafer protection and alignment
FUYAO Manufacturing Capabilities
FUYAO provides full-process customization services, including:
-
Structural design and optimization
-
Thermal simulation support
-
Precision machining and polishing
-
Cleanroom production (Class 10)
-
Repair and refurbishment services
We support both R&D prototyping and large-scale production, ensuring fast delivery and consistent quality.
FAQ
Q1: What is a quartz boat used for?
A quartz boat is used to hold and transport wafers during high-temperature semiconductor and laboratory processes.
Q2: Why choose quartz instead of ceramics or metals?
Quartz provides superior purity, thermal stability, and chemical resistance, making it ideal for semiconductor applications.
Q3: What is the typical lifespan of a quartz boat?
Depending on process conditions, quartz boats can withstand hundreds of thermal cycles. Proper cleaning and handling significantly extend their lifespan.
Q4: Can quartz boats be used in plasma environments?
Yes. Synthetic quartz (CVD quartz) offers excellent resistance to plasma and reactive gases.
Q5: Do you support custom designs?
Yes. We provide full customization including dimensions, slot configuration, wafer size compatibility, and special process requirements.
Q6: What is your MOQ and delivery time?
MOQ typically starts from 10 pieces, with delivery time of 2–4 weeks depending on customization complexity.
Rezensionen
Es gibt noch keine Rezensionen.