{"id":3359,"date":"2026-07-14T06:03:13","date_gmt":"2026-07-14T06:03:13","guid":{"rendered":"https:\/\/www.fuyao-quartz.com\/?post_type=product&p=3359"},"modified":"2026-07-14T06:19:53","modified_gmt":"2026-07-14T06:19:53","slug":"fused-quartz-vacuum-suction-plate","status":"publish","type":"product","link":"https:\/\/www.fuyao-quartz.com\/cs\/product\/fused-quartz-vacuum-suction-plate\/","title":{"rendered":"Custom Fused Quartz Vacuum Suction Plate for Semiconductor Wafer Handling"},"content":{"rendered":"

The fused quartz vacuum suction plate is a precision quartz component designed for wafer handling, s<\/p>\n

\"Custom<\/p>\n

ubstrate positioning, vacuum adsorption, and semiconductor processing equipment.<\/p>\n

Manufactured from high-purity fused quartz, the plate features a large circular body with custom-designed quartz ports and connection openings. Its excellent thermal stability, chemical resistance, low contamination characteristics, and dimensional accuracy make it suitable for demanding semiconductor, photovoltaic, optical, and laboratory applications.<\/p>\n

The diameter, thickness, port quantity, port position, opening size, surface finish, and connection structure can all be customized according to equipment drawings and operating requirements.<\/p>\n

\n

Kl\u00ed\u010dov\u00e9 vlastnosti<\/h2>\n

Taven\u00fd k\u0159emen vysok\u00e9 \u010distoty<\/h3>\n

Manufactured from high-quality fused silica with low metallic impurity content, helping reduce contamination during wafer and substrate processing.<\/p>\n

Vynikaj\u00edc\u00ed tepeln\u00e1 stabilita<\/h3>\n

The low coefficient of thermal expansion allows the quartz suction plate to maintain dimensional stability during temperature changes.<\/p>\n

Strong Chemical Resistance<\/h3>\n

Quartz offers excellent resistance to most acids and process chemicals, making it suitable for wet processing, cleaning, etching, and other corrosive environments.<\/p>\n

Precision Vacuum Connections<\/h3>\n

The suction plate can be manufactured with multiple quartz ports, vacuum interfaces, gas connections, or liquid transfer openings according to the equipment design.<\/p>\n

Smooth and Uniform Surface<\/h3>\n

Precision grinding, polishing, fire polishing, and surface cleaning processes are available to improve flatness, sealing performance, and product cleanliness.<\/p>\n

Custom Manufacturing<\/h3>\n

Each quartz suction plate can be produced according to customer drawings, samples, equipment dimensions, and application conditions.<\/p>\n

\n

Specifikace produktu<\/h1>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Polo\u017eka<\/th>\nAvailable Specification<\/th>\n<\/tr>\n<\/thead>\n
N\u00e1zev produktu<\/td>\nFused Quartz Vacuum Suction Plate<\/td>\n<\/tr>\n
Alternative Name<\/td>\nQuartz Vacuum Chuck, Quartz Suction Disc, Quartz Vacuum Plate<\/td>\n<\/tr>\n
Materi\u00e1l<\/td>\nHigh-Purity Fused Quartz \/ Fused Silica<\/td>\n<\/tr>\n
Tvar<\/td>\nRound, square, or custom shape<\/td>\n<\/tr>\n
Plate Diameter<\/td>\nNa m\u00edru<\/td>\n<\/tr>\n
Plate Thickness<\/td>\nNa m\u00edru<\/td>\n<\/tr>\n
Main Opening Diameter<\/td>\nNa m\u00edru<\/td>\n<\/tr>\n
Quartz Port Quantity<\/td>\n1\u201310 ports or customized<\/td>\n<\/tr>\n
Port Diameter<\/td>\nNa m\u00edru<\/td>\n<\/tr>\n
Port Position<\/td>\nCustomized according to drawing<\/td>\n<\/tr>\n
Povrchov\u00e1 \u00faprava<\/td>\nGround, matte, polished, or fire-polished<\/td>\n<\/tr>\n
Plochost<\/td>\nCustomized according to application<\/td>\n<\/tr>\n
Edge Treatment<\/td>\nChamfered, rounded, ground, or polished<\/td>\n<\/tr>\n
Connection Type<\/td>\nStraight port, flanged port, stepped port, or custom joint<\/td>\n<\/tr>\n
Pracovn\u00ed teplota<\/td>\nSubject to quartz grade and equipment conditions<\/td>\n<\/tr>\n
Processing Method<\/td>\nCutting, grinding, drilling, welding, polishing, and cleaning<\/td>\n<\/tr>\n
Customization<\/td>\nOEM and drawing-based manufacturing available<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n

Specific tolerances, maximum dimensions, operating pressure, and working temperature should be confirmed according to the customer\u2019s drawing and application.<\/p>\n<\/blockquote>\n

\n

\"CustomTypick\u00e9 aplikace<\/h1>\n
    \n
  • Semiconductor wafer handling equipment<\/li>\n
  • Wafer vacuum adsorption and positioning<\/li>\n
  • Quartz process chambers and reaction systems<\/li>\n
  • Wet benches and chemical processing equipment<\/li>\n
  • Solar wafer and photovoltaic substrate processing<\/li>\n
  • Glass substrate handling systems<\/li>\n
  • Optical component positioning<\/li>\n
  • Laboratory vacuum systems<\/li>\n
  • High-purity chemical equipment<\/li>\n
  • Customized semiconductor quartz assemblies<\/li>\n<\/ul>\n
    \n

    \"CustomV\u00fdrobn\u00ed kapacity<\/h1>\n

    We provide integrated quartz processing services, including:<\/p>\n

      \n
    • Large-diameter quartz plate fabrication<\/li>\n
    • Precision CNC machining<\/li>\n
    • Quartz drilling and opening<\/li>\n
    • Quartz tube and port welding<\/li>\n
    • Quartz flange fabrication<\/li>\n
    • Surface grinding and polishing<\/li>\n
    • Edge chamfering and rounding<\/li>\n
    • Vysokoteplotn\u00ed \u017e\u00edh\u00e1n\u00ed<\/li>\n
    • Ultrazvukov\u00e9 \u010di\u0161t\u011bn\u00ed<\/li>\n
    • Dimensional and visual inspection<\/li>\n<\/ul>\n

      Complex port layouts and welded quartz structures can be manufactured according to technical drawings.<\/p>\n

      \n

      Advantages of Quartz Vacuum Suction Plates<\/h1>\n

      Compared with metal, plastic, or ordinary glass components, fused quartz provides several advantages in semiconductor environments:<\/p>\n

        \n
      • Lower particle and metal contamination risk<\/li>\n
      • Better resistance to high temperatures<\/li>\n
      • Excellent chemical durability<\/li>\n
      • Stable dimensions during temperature fluctuations<\/li>\n
      • Suitable for cleanroom and high-purity processing<\/li>\n
      • Transparent or translucent structure for process observation<\/li>\n
      • Long service life under appropriate operating conditions<\/li>\n<\/ul>\n
        \n

        Customization Information Required<\/h1>\n

        To provide an accurate quotation, please send the following information:<\/p>\n

          \n
        1. Overall diameter and thickness<\/li>\n
        2. Main opening diameter and height<\/li>\n
        3. Number, diameter, and position of small ports<\/li>\n
        4. Port or flange connection dimensions<\/li>\n
        5. Surface finish requirements<\/li>\n
        6. Flatness and dimensional tolerances<\/li>\n
        7. Working temperature and operating environment<\/li>\n
        8. Vacuum or pressure conditions<\/li>\n
        9. Required quantity<\/li>\n
        10. Technical drawing, sample, or equipment photo<\/li>\n<\/ol>\n
          \n

          Quality Control<\/h1>\n

          Each quartz suction plate can be inspected for:<\/p>\n

            \n
          • Overall diameter and thickness<\/li>\n
          • Opening and port dimensions<\/li>\n
          • Port position accuracy<\/li>\n
          • Surface condition<\/li>\n
          • Plochost<\/li>\n
          • Weld integrity<\/li>\n
          • Edge condition<\/li>\n
          • Visual defects<\/li>\n
          • Cleanliness<\/li>\n
          • Packaging protection<\/li>\n<\/ul>\n

            Products are individually protected with foam or customized packaging to reduce the risk of scratching, impact, and breakage during transportation.<\/p>\n

            \n

            \u010cASTO KLADEN\u00c9 DOTAZY<\/h1>\n

            1. Can the diameter and port positions be customized?<\/h2>\n

            Yes. The plate diameter, thickness, opening size, port quantity, port diameter, and port position can all be manufactured according to customer drawings.<\/p>\n

            2. Can you manufacture the quartz suction plate from a sample?<\/h2>\n

            Yes. We can evaluate and reproduce the component based on a physical sample, but a dimensional drawing is recommended for better accuracy.<\/p>\n

            3. Can the surface be polished?<\/h2>\n

            Yes. Ground, matte, mechanically polished, and fire-polished surfaces are available depending on the application.<\/p>\n

            4. Is this product suitable for semiconductor equipment?<\/h2>\n

            Yes. High-purity fused quartz is commonly selected for semiconductor equipment because of its thermal stability, chemical resistance, and low contamination characteristics.<\/p>\n

            5. Can additional quartz tubes or ports be welded onto the plate?<\/h2>\n

            Yes. Different quartz tubes, ports, joints, and flange structures can be welded according to the required vacuum, gas, or liquid connection design.<\/p>","protected":false},"excerpt":{"rendered":"

            Custom fused quartz vacuum suction plate for semiconductor wafer handling and precision substrate positioning. Available with customized diameters, thicknesses, openings, quartz ports, connection structures, surface finishes, and dimensional tolerances.<\/p>","protected":false},"featured_media":3362,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[150],"product_tag":[1805,1802,385,1808,1807,1731,1804,1801,539,1806,694,1803],"class_list":["post-3359","product","type-product","status-publish","has-post-thumbnail","product_cat-quartz-plate","product_tag-custom-quartz-component","product_tag-fused-quartz-suction-disc","product_tag-fused-silica-plate","product_tag-precision-quartz-fabrication","product_tag-quartz-suction-cup","product_tag-quartz-vacuum-chuck","product_tag-quartz-vacuum-plate","product_tag-quartz-vacuum-suction-plate","product_tag-quartz-wafer-holder","product_tag-semiconductor-equipment-quartz","product_tag-semiconductor-quartz-parts","product_tag-wafer-vacuum-chuck","desktop-align-left","tablet-align-left","mobile-align-left","ast-product-gallery-layout-horizontal","ast-product-tabs-layout-horizontal","first","instock","shipping-taxable","product-type-simple"],"_links":{"self":[{"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/product\/3359","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/comments?post=3359"}],"version-history":[{"count":3,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/product\/3359\/revisions"}],"predecessor-version":[{"id":3364,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/product\/3359\/revisions\/3364"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/media\/3362"}],"wp:attachment":[{"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/media?parent=3359"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/product_brand?post=3359"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/product_cat?post=3359"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/product_tag?post=3359"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}