{"id":2883,"date":"2026-05-26T06:08:01","date_gmt":"2026-05-26T06:08:01","guid":{"rendered":"https:\/\/www.fuyao-quartz.com\/?post_type=product&#038;p=2883"},"modified":"2026-05-26T06:11:33","modified_gmt":"2026-05-26T06:11:33","slug":"thin-film-lithium-niobate-on-insulator-lnoi-wafer-platform-for-integrated-photonics","status":"publish","type":"product","link":"https:\/\/www.fuyao-quartz.com\/cs\/product\/thin-film-lithium-niobate-on-insulator-lnoi-wafer-platform-for-integrated-photonics\/","title":{"rendered":"Platforma tenkovrstv\u00fdch desti\u010dek z niob\u00e1tu lithn\u00e9ho na izol\u00e1toru (LNOI) pro integrovanou fotoniku"},"content":{"rendered":"<p data-start=\"603\" data-end=\"732\">Tenkovrstv\u00e9 desti\u010dky z niob\u00e1tu lithn\u00e9ho na izol\u00e1toru (LNOI) jsou speci\u00e1ln\u011b vyvinut\u00e9 substr\u00e1ty pro integrovan\u00e1 fotonick\u00e1 a elektrooptick\u00e1 za\u0159\u00edzen\u00ed.<\/p>\n<p data-start=\"734\" data-end=\"893\">Platforma se skl\u00e1d\u00e1 z tenk\u00e9 vrstvy monokrystalick\u00e9ho niob\u00e1tu lithn\u00e9ho nanesen\u00e9 na vrstvu zakryt\u00e9 oxidov\u00e9 vrstvy (SiO\u2082), kter\u00e1 je upevn\u011bna na k\u0159em\u00edkov\u00e9m nebo izola\u010dn\u00edm nosn\u00e9m substr\u00e1tu.<\/p>\n<p data-start=\"895\" data-end=\"1094\">Tato struktura umo\u017e\u0148uje siln\u00e9 optick\u00e9 omezen\u00ed, sn\u00ed\u017een\u00e9 ztr\u00e1ty p\u0159i \u0161\u00ed\u0159en\u00ed a vysokou elektrooptickou \u00fa\u010dinnost, co\u017e z n\u00ed \u010din\u00ed jednu z nejd\u016fle\u017eit\u011bj\u0161\u00edch materi\u00e1lov\u00fdch platforem pro modern\u00ed integrovanou fotoniku.<\/p>\n<hr data-start=\"1096\" data-end=\"1099\" \/>\n<h1 data-section-id=\"z5lkn1\" data-start=\"1101\" data-end=\"1143\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2886 alignright\" src=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-300x300.png 300w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-150x150.png 150w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-768x768.png 768w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-12x12.png 12w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-600x600.png 600w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1-100x100.png 100w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Koncepce tenkovrstv\u00e9ho niob\u00e1tu lithn\u00e9ho (TFLN)<\/h1>\n<p data-start=\"1145\" data-end=\"1304\">Term\u00edn \u201etenkovrstv\u00fd niob\u00e1t lithn\u00fd\u201c (TFLN) ozna\u010duje submikrometrovou krystalickou vrstvu LiNbO\u2083 ur\u010denou pro optick\u00e9 vlnovody s vysok\u00fdm stupn\u011bm ohrani\u010den\u00ed a pro elektrooptickou modulaci.<\/p>\n<p data-start=\"1306\" data-end=\"1356\">Ve srovn\u00e1n\u00ed s voln\u011b sypan\u00fdm niob\u00e1tem lithn\u00fdm nab\u00edz\u00ed TFLN:<\/p>\n<ul data-start=\"1358\" data-end=\"1511\">\n<li data-section-id=\"6eo9fa\" data-start=\"1358\" data-end=\"1396\">Siln\u011bj\u0161\u00ed optick\u00e9 omezen\u00ed pole<\/li>\n<li data-section-id=\"maxe10\" data-start=\"1397\" data-end=\"1429\">Vy\u0161\u0161\u00ed \u00fa\u010dinnost modulace<\/li>\n<li data-section-id=\"14izunr\" data-start=\"1430\" data-end=\"1458\">Men\u0161\u00ed rozm\u011bry za\u0159\u00edzen\u00ed<\/li>\n<li data-section-id=\"1xsbopo\" data-start=\"1459\" data-end=\"1511\">Kompatibilita s integrac\u00ed k\u0159em\u00edkov\u00e9 fotoniky<\/li>\n<\/ul>\n<p data-start=\"1513\" data-end=\"1591\">Technologie TFLN je implementov\u00e1na na desti\u010dk\u00e1ch LNOI, aby umo\u017enila fotonickou integraci v m\u011b\u0159\u00edtku desti\u010dky.<\/p>\n<hr data-start=\"1593\" data-end=\"1596\" \/>\n<h1 data-section-id=\"ju4mac\" data-start=\"1598\" data-end=\"1618\">Architektura \u010dip\u016f<\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1620\" data-end=\"1956\">\n<thead data-start=\"1620\" data-end=\"1658\">\n<tr data-start=\"1620\" data-end=\"1658\">\n<th class=\"last:pe-10\" data-start=\"1620\" data-end=\"1628\" data-col-size=\"sm\">Vrstva<\/th>\n<th class=\"last:pe-10\" data-start=\"1628\" data-end=\"1639\" data-col-size=\"sm\">Materi\u00e1l<\/th>\n<th class=\"last:pe-10\" data-start=\"1639\" data-end=\"1658\" data-col-size=\"md\">Funk\u010dn\u00ed role<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1696\" data-end=\"1956\">\n<tr data-start=\"1696\" data-end=\"1783\">\n<td data-start=\"1696\" data-end=\"1711\" data-col-size=\"sm\">\u00darove\u0148 za\u0159\u00edzen\u00ed<\/td>\n<td data-start=\"1711\" data-end=\"1737\" data-col-size=\"sm\">Tenk\u00e1 vrstva LiNbO\u2083 (TFLN)<\/td>\n<td data-col-size=\"md\" data-start=\"1737\" data-end=\"1783\">Elektrooptick\u00e1 modulace, neline\u00e1rn\u00ed optika<\/td>\n<\/tr>\n<tr data-start=\"1784\" data-end=\"1867\">\n<td data-start=\"1784\" data-end=\"1803\" data-col-size=\"sm\">Izola\u010dn\u00ed vrstva<\/td>\n<td data-start=\"1803\" data-end=\"1825\" data-col-size=\"sm\">SiO\u2082 (poh\u0159ben\u00fd oxid)<\/td>\n<td data-start=\"1825\" data-end=\"1867\" data-col-size=\"md\">Optick\u00e1 izolace a omezen\u00ed mod\u016f<\/td>\n<\/tr>\n<tr data-start=\"1868\" data-end=\"1956\">\n<td data-start=\"1868\" data-end=\"1883\" data-col-size=\"sm\">Rukoje\u0165<\/td>\n<td data-start=\"1883\" data-end=\"1908\" data-col-size=\"sm\">K\u0159em\u00edk \/ K\u0159emen \/ Saf\u00edr<\/td>\n<td data-start=\"1908\" data-end=\"1956\" data-col-size=\"md\">Mechanick\u00e1 podpora a kompatibilita proces\u016f<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"1958\" data-end=\"1961\" \/>\n<h1 data-section-id=\"u0ybrq\" data-start=\"1963\" data-end=\"1977\"><img decoding=\"async\" class=\"size-medium wp-image-2884 alignright\" src=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-300x300.png 300w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-150x150.png 150w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-768x768.png 768w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-12x12.png 12w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-600x600.png 600w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3-100x100.png 100w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-3.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Kl\u00ed\u010dov\u00e9 vlastnosti<\/h1>\n<p data-start=\"1979\" data-end=\"2058\">Extr\u00e9mn\u011b n\u00edzk\u00e1 optick\u00e1 ztr\u00e1ta p\u0159i \u0161\u00ed\u0159en\u00ed &lt; 0,05 dB\/cm na telekomunika\u010dn\u00ed vlnov\u00e9 d\u00e9lce (1550 nm)<\/p>\n<p data-start=\"2060\" data-end=\"2110\">Vysok\u00fd elektrooptick\u00fd koeficient (r\u2083\u2083 a\u017e 90 pm\/V)<\/p>\n<p data-start=\"2112\" data-end=\"2179\">Kompatibilita s vlnovody v submikronov\u00e9m m\u011b\u0159\u00edtku pro kompaktn\u00ed fotonickou integraci<\/p>\n<p data-start=\"2181\" data-end=\"2251\">Integrace kompatibiln\u00ed s technologi\u00ed CMOS s platformami na b\u00e1zi k\u0159em\u00edku a nitridu k\u0159em\u00edku<\/p>\n<p data-start=\"2253\" data-end=\"2306\">Vysok\u00e1 tepeln\u00e1 stabilita s Curieovou teplotou ~1140 \u00b0C<\/p>\n<p data-start=\"2308\" data-end=\"2368\">K dispozici jsou r\u016fzn\u00e9 orientace krystal\u016f: X-\u0159ez, Y-\u0159ez, Z-\u0159ez<\/p>\n<p data-start=\"2370\" data-end=\"2412\">Velikosti desti\u010dek lze volit v rozmez\u00ed od 3 do 8 palc\u016f<\/p>\n<hr data-start=\"2414\" data-end=\"2417\" \/>\n<h1 data-section-id=\"zjxypn\" data-start=\"2419\" data-end=\"2445\">Technick\u00e9 specifikace<\/h1>\n<h2 data-section-id=\"14np8ub\" data-start=\"2447\" data-end=\"2472\">Parametry na \u00farovni \u010dipu<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2474\" data-end=\"2691\">\n<thead data-start=\"2474\" data-end=\"2503\">\n<tr data-start=\"2474\" data-end=\"2503\">\n<th class=\"last:pe-10\" data-start=\"2474\" data-end=\"2486\" data-col-size=\"sm\">Parametr<\/th>\n<th class=\"last:pe-10\" data-start=\"2486\" data-end=\"2503\" data-col-size=\"sm\">Specifikace<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2532\" data-end=\"2691\">\n<tr data-start=\"2532\" data-end=\"2567\">\n<td data-start=\"2532\" data-end=\"2549\" data-col-size=\"sm\">Pr\u016fm\u011br desti\u010dky<\/td>\n<td data-col-size=\"sm\" data-start=\"2549\" data-end=\"2567\">3\u2033, 4\u2033, 6\u2033, 8\u2033<\/td>\n<\/tr>\n<tr data-start=\"2568\" data-end=\"2595\">\n<td data-start=\"2568\" data-end=\"2580\" data-col-size=\"sm\">Tlou\u0161\u0165ka<\/td>\n<td data-col-size=\"sm\" data-start=\"2580\" data-end=\"2595\">525 \u00b1 25 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2596\" data-end=\"2612\">\n<td data-start=\"2596\" data-end=\"2602\" data-col-size=\"sm\">Luk<\/td>\n<td data-col-size=\"sm\" data-start=\"2602\" data-end=\"2612\">\u00b150 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2613\" data-end=\"2630\">\n<td data-start=\"2613\" data-end=\"2620\" data-col-size=\"sm\">Warp<\/td>\n<td data-start=\"2620\" data-end=\"2630\" data-col-size=\"sm\">&lt;50 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2631\" data-end=\"2691\">\n<td data-start=\"2631\" data-end=\"2665\" data-col-size=\"sm\">M\u00edstn\u00ed kol\u00eds\u00e1n\u00ed tlou\u0161\u0165ky (LTV)<\/td>\n<td data-col-size=\"sm\" data-start=\"2665\" data-end=\"2691\">&lt;1,5 \u03bcm (5\u00d75 mm\u00b2, 95%)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2693\" data-end=\"2696\" \/>\n<h2 data-section-id=\"105h6ij\" data-start=\"2698\" data-end=\"2723\">Tenk\u00e1 vrstva LiNbO\u2083<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2725\" data-end=\"2962\">\n<thead data-start=\"2725\" data-end=\"2754\">\n<tr data-start=\"2725\" data-end=\"2754\">\n<th class=\"last:pe-10\" data-start=\"2725\" data-end=\"2737\" data-col-size=\"sm\">Parametr<\/th>\n<th class=\"last:pe-10\" data-start=\"2737\" data-end=\"2754\" data-col-size=\"sm\">Specifikace<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2783\" data-end=\"2962\">\n<tr data-start=\"2783\" data-end=\"2819\">\n<td data-start=\"2783\" data-end=\"2794\" data-col-size=\"sm\">Materi\u00e1l<\/td>\n<td data-start=\"2794\" data-end=\"2819\" data-col-size=\"sm\">Monokrystal LiNbO\u2083<\/td>\n<\/tr>\n<tr data-start=\"2820\" data-end=\"2858\">\n<td data-start=\"2820\" data-end=\"2838\" data-col-size=\"sm\">Rozsah tlou\u0161\u0165ky<\/td>\n<td data-col-size=\"sm\" data-start=\"2838\" data-end=\"2858\">300 nm \u2013 1000 nm<\/td>\n<\/tr>\n<tr data-start=\"2859\" data-end=\"2891\">\n<td data-start=\"2859\" data-end=\"2882\" data-col-size=\"sm\">P\u0159esnost orientace<\/td>\n<td data-start=\"2882\" data-end=\"2891\" data-col-size=\"sm\">\u00b10,5\u00b0<\/td>\n<\/tr>\n<tr data-start=\"2892\" data-end=\"2925\">\n<td data-start=\"2892\" data-end=\"2912\" data-col-size=\"sm\">Drsnost povrchu<\/td>\n<td data-col-size=\"sm\" data-start=\"2912\" data-end=\"2925\">Ra &lt; 1 nm<\/td>\n<\/tr>\n<tr data-start=\"2926\" data-end=\"2962\">\n<td data-start=\"2926\" data-end=\"2944\" data-col-size=\"sm\">Krit\u00e9ria vad<\/td>\n<td data-start=\"2944\" data-end=\"2962\" data-col-size=\"sm\">\u017d\u00e1dn\u00e9 mezery v\u011bt\u0161\u00ed ne\u017e 1 mm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2964\" data-end=\"2967\" \/>\n<h2 data-section-id=\"1xdkjas\" data-start=\"2969\" data-end=\"2990\">Vlo\u017een\u00e1 oxidov\u00e1 vrstva<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2992\" data-end=\"3135\">\n<thead data-start=\"2992\" data-end=\"3021\">\n<tr data-start=\"2992\" data-end=\"3021\">\n<th class=\"last:pe-10\" data-start=\"2992\" data-end=\"3004\" data-col-size=\"sm\">Parametr<\/th>\n<th class=\"last:pe-10\" data-start=\"3004\" data-end=\"3021\" data-col-size=\"sm\">Specifikace<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"3050\" data-end=\"3135\">\n<tr data-start=\"3050\" data-end=\"3069\">\n<td data-start=\"3050\" data-end=\"3061\" data-col-size=\"sm\">Materi\u00e1l<\/td>\n<td data-start=\"3061\" data-end=\"3069\" data-col-size=\"sm\">SiO\u2082<\/td>\n<\/tr>\n<tr data-start=\"3070\" data-end=\"3114\">\n<td data-start=\"3070\" data-end=\"3082\" data-col-size=\"sm\">Tlou\u0161\u0165ka<\/td>\n<td data-col-size=\"sm\" data-start=\"3082\" data-end=\"3114\">100 nm \u2013 2 \u03bcm (lze p\u0159izp\u016fsobit)<\/td>\n<\/tr>\n<tr data-start=\"3115\" data-end=\"3135\">\n<td data-start=\"3115\" data-end=\"3128\" data-col-size=\"sm\">Jednotnost<\/td>\n<td data-col-size=\"sm\" data-start=\"3128\" data-end=\"3135\">\u00b15%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3137\" data-end=\"3140\" \/>\n<h1 data-section-id=\"xsn2bk\" data-start=\"3142\" data-end=\"3166\">Technologie v\u00fdroby<\/h1>\n<p data-start=\"3168\" data-end=\"3236\">Pl\u00e1tky LNOI se vyr\u00e1b\u011bj\u00ed pomoc\u00ed proces\u016f kompatibiln\u00edch s polovodi\u010dovou technologi\u00ed:<\/p>\n<ul data-start=\"3238\" data-end=\"3536\">\n<li data-section-id=\"13c0fvf\" data-start=\"3238\" data-end=\"3298\">\u0158\u00edzen\u00e1 iontov\u00e1 implantace pro definici krystalick\u00e9 vrstvy<\/li>\n<li data-section-id=\"1usb3eg\" data-start=\"3299\" data-end=\"3343\">Lepen\u00ed desti\u010dek na izola\u010dn\u00ed podklady<\/li>\n<li data-section-id=\"1qbyczh\" data-start=\"3344\" data-end=\"3394\">Tepeln\u00e9 \u017e\u00edh\u00e1n\u00ed za \u00fa\u010delem obnoven\u00ed kvality krystal\u016f<\/li>\n<li data-section-id=\"1erbdy1\" data-start=\"3395\" data-end=\"3460\">Chemicko-mechanick\u00e9 le\u0161t\u011bn\u00ed (CMP) pro vyrovn\u00e1n\u00ed povrchu<\/li>\n<li data-section-id=\"qs885x\" data-start=\"3461\" data-end=\"3536\">Metrologick\u00e1 kontrola pro zaji\u0161t\u011bn\u00ed optick\u00e9 a konstruk\u010dn\u00ed kvality<\/li>\n<\/ul>\n<hr data-start=\"3538\" data-end=\"3541\" \/>\n<h1 data-section-id=\"1b9xnf1\" data-start=\"3543\" data-end=\"3563\">Oblasti pou\u017eit\u00ed<\/h1>\n<p data-start=\"3565\" data-end=\"3667\">Integrovan\u00e9 optick\u00e9 komunika\u010dn\u00ed syst\u00e9my v\u010detn\u011b vysokorychlostn\u00edch modul\u00e1tor\u016f pro p\u0159enos v p\u00e1smu 100G a\u017e 800G<\/p>\n<p data-start=\"3669\" data-end=\"3760\">Kvantov\u00e9 fotonick\u00e9 syst\u00e9my pro generov\u00e1n\u00ed prov\u00e1zan\u00fdch foton\u016f a zpracov\u00e1n\u00ed kvantov\u00fdch informac\u00ed<\/p>\n<p data-start=\"3762\" data-end=\"3843\">Mikrovlnn\u00e1 fotonika pro zpracov\u00e1n\u00ed vysokofrekven\u010dn\u00edch sign\u00e1l\u016f a fotonick\u00e9 syst\u00e9my pracuj\u00edc\u00ed v milimetrov\u00e9m p\u00e1smu<\/p>\n<p data-start=\"3845\" data-end=\"3939\">Neline\u00e1rn\u00ed optick\u00e1 za\u0159\u00edzen\u00ed, v\u010detn\u011b za\u0159\u00edzen\u00ed pro frekven\u010dn\u00ed konverzi a generov\u00e1n\u00ed optick\u00fdch frekven\u010dn\u00edch h\u0159eben\u016f<\/p>\n<p data-start=\"3941\" data-end=\"4020\">Integrovan\u00e9 optick\u00e9 sn\u00edmac\u00ed syst\u00e9my pro biochemick\u00e9 a environment\u00e1ln\u00ed monitorov\u00e1n\u00ed<\/p>\n<hr data-start=\"4022\" data-end=\"4025\" \/>\n<h1 data-section-id=\"15xe5if\" data-start=\"4027\" data-end=\"4051\">Srovn\u00e1n\u00ed v\u00fdkonu<\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"4053\" data-end=\"4419\">\n<thead data-start=\"4053\" data-end=\"4105\">\n<tr data-start=\"4053\" data-end=\"4105\">\n<th class=\"last:pe-10\" data-start=\"4053\" data-end=\"4064\" data-col-size=\"sm\">Majetek<\/th>\n<th class=\"last:pe-10\" data-start=\"4064\" data-end=\"4078\" data-col-size=\"sm\">LiNbO\u2083 ve velk\u00e9m mno\u017estv\u00ed<\/th>\n<th class=\"last:pe-10\" data-start=\"4078\" data-end=\"4105\" data-col-size=\"sm\">Platforma LNOI pro tenkovrstv\u00e9 technologie<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"4160\" data-end=\"4419\">\n<tr data-start=\"4160\" data-end=\"4199\">\n<td data-start=\"4160\" data-end=\"4175\" data-col-size=\"sm\">Optick\u00e9 ztr\u00e1ty<\/td>\n<td data-start=\"4175\" data-end=\"4184\" data-col-size=\"sm\">Vy\u0161\u0161\u00ed<\/td>\n<td data-start=\"4184\" data-end=\"4199\" data-col-size=\"sm\">&lt;0,05 dB\/cm<\/td>\n<\/tr>\n<tr data-start=\"4200\" data-end=\"4247\">\n<td data-start=\"4200\" data-end=\"4219\" data-col-size=\"sm\">Rozm\u011bry za\u0159\u00edzen\u00ed<\/td>\n<td data-start=\"4219\" data-end=\"4227\" data-col-size=\"sm\">Velk\u00fd<\/td>\n<td data-start=\"4227\" data-end=\"4247\" data-col-size=\"sm\">V \u0159\u00e1du submikron\u016f<\/td>\n<\/tr>\n<tr data-start=\"4248\" data-end=\"4320\">\n<td data-start=\"4248\" data-end=\"4273\" data-col-size=\"sm\">Mo\u017enosti integrace<\/td>\n<td data-start=\"4273\" data-end=\"4283\" data-col-size=\"sm\">Omezen\u00e9<\/td>\n<td data-start=\"4283\" data-end=\"4320\" data-col-size=\"sm\">Fot\u00f3nov\u00e1 integrace s vysokou hustotou<\/td>\n<\/tr>\n<tr data-start=\"4321\" data-end=\"4354\">\n<td data-start=\"4321\" data-end=\"4342\" data-col-size=\"sm\">Kompatibilita s CMOS<\/td>\n<td data-col-size=\"sm\" data-start=\"4342\" data-end=\"4347\">Ne<\/td>\n<td data-col-size=\"sm\" data-start=\"4347\" data-end=\"4354\">Ano<\/td>\n<\/tr>\n<tr data-start=\"4355\" data-end=\"4419\">\n<td data-start=\"4355\" data-end=\"4379\" data-col-size=\"sm\">\u00da\u010dinnost modulace<\/td>\n<td data-start=\"4379\" data-end=\"4390\" data-col-size=\"sm\">M\u00edrn\u00e1<\/td>\n<td data-col-size=\"sm\" data-start=\"4390\" data-end=\"4419\">Vysok\u00e9 (lze dos\u00e1hnout V\u03c0 ~ 1 V)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"4421\" data-end=\"4424\" \/>\n<h1 data-section-id=\"1ki9ggs\" data-start=\"4426\" data-end=\"4454\">Mo\u017enosti p\u0159izp\u016fsoben\u00e9ho technick\u00e9ho \u0159e\u0161en\u00ed<\/h1>\n<p data-start=\"4456\" data-end=\"4531\">Mo\u017enost volby orientace krystalu mezi konfiguracemi X-cut, Y-cut a Z-cut<\/p>\n<p data-start=\"4533\" data-end=\"4590\">Tlou\u0161\u0165ka tenk\u00e9 vrstvy v rozmez\u00ed 300 nm a\u017e 1000 nm<\/p>\n<p data-start=\"4592\" data-end=\"4656\">Nastaviteln\u00e1 tlou\u0161\u0165ka zakryt\u00e9 oxidov\u00e9 vrstvy pro lad\u011bn\u00ed optick\u00e9ho ohrani\u010den\u00ed<\/p>\n<p data-start=\"4658\" data-end=\"4713\">Mezi mo\u017en\u00e9 materi\u00e1ly podkladu pat\u0159\u00ed k\u0159em\u00edk, k\u0159emen a saf\u00edr<\/p>\n<p data-start=\"4715\" data-end=\"4772\">Voliteln\u00e9 dopov\u00e1n\u00ed MgO pro zv\u00fd\u0161en\u00ed prahu optick\u00e9ho po\u0161kozen\u00ed<\/p>\n<hr data-start=\"4774\" data-end=\"4777\" \/>\n<h1 data-section-id=\"138iuoj\" data-start=\"4779\" data-end=\"4812\"><img decoding=\"async\" class=\"size-medium wp-image-2885 alignright\" src=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-300x300.png 300w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-150x150.png 150w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-768x768.png 768w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-12x12.png 12w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-600x600.png 600w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2-100x100.png 100w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/05\/Thin-Film-Lithium-Niobate-on-Insulator-LNOI-Wafer-Platform-for-Integrated-Photonics-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Zaji\u0161t\u011bn\u00ed kvality a metrologie<\/h1>\n<p data-start=\"4814\" data-end=\"4873\">Ka\u017ed\u00e1 desti\u010dka proch\u00e1z\u00ed p\u0159\u00edsnou kontrolou v souladu s normami pro polovodi\u010de:<\/p>\n<p data-start=\"4875\" data-end=\"4927\">M\u011b\u0159en\u00ed optick\u00fdch ztr\u00e1t v telekomunika\u010dn\u00edch vlnov\u00fdch p\u00e1smech<\/p>\n<p data-start=\"4929\" data-end=\"4985\">Atomov\u00e1 mikroskopie pro m\u011b\u0159en\u00ed drsnosti povrchu<\/p>\n<p data-start=\"4987\" data-end=\"5038\">Infra\u010derven\u00e1 kontrola integrity spojovac\u00edho rozhran\u00ed<\/p>\n<p data-start=\"5040\" data-end=\"5090\">Zmapov\u00e1n\u00ed tlou\u0161\u0165ky a rovnom\u011brnosti po cel\u00e9 plo\u0161e desti\u010dky<\/p>\n<p data-start=\"5092\" data-end=\"5139\">Anal\u00fdza rovinnosti desti\u010dky a rozlo\u017een\u00ed nap\u011bt\u00ed<\/p>\n<hr data-start=\"5141\" data-end=\"5144\" \/>\n<h1 data-section-id=\"1791hl0\" data-start=\"5146\" data-end=\"5188\">Technick\u00e9 a v\u00fdrobn\u00ed kapacity<\/h1>\n<p data-start=\"5190\" data-end=\"5457\"><span class=\"hover:entity-accent entity-underline inline cursor-pointer align-baseline\"><span class=\"whitespace-normal\">ZMSH<\/span><\/span> nab\u00edz\u00ed komplexn\u00ed in\u017een\u00fdrsk\u00e1 \u0159e\u0161en\u00ed pro LNOI desti\u010dky, v\u010detn\u011b n\u00e1vrhu materi\u00e1l\u016f, v\u00fdvoje proces\u016f lepen\u00ed desti\u010dek, podpory p\u0159i v\u00fdrob\u011b fotonick\u00fdch za\u0159\u00edzen\u00ed, proces\u016f nanov\u00fdroby (EBL, IBE) a slu\u017eeb v oblasti optick\u00e9 charakterizace.<\/p>\n<p data-start=\"5459\" data-end=\"5641\">Na\u0161e v\u00fdrobn\u00ed kapacity pokr\u00fdvaj\u00ed jak prototypov\u00e1n\u00ed v r\u00e1mci v\u00fdzkumu a v\u00fdvoje, tak v\u00fdrobu mal\u00fdch a\u017e st\u0159edn\u00edch s\u00e9ri\u00ed, a to v\u010detn\u011b stabiln\u00ed v\u00fdroby na 6palcov\u00fdch desk\u00e1ch a pokra\u010duj\u00edc\u00edho v\u00fdvoje 8palcov\u00fdch platforem LNOI.<\/p>\n<hr data-start=\"5643\" data-end=\"5646\" \/>\n<h1 data-section-id=\"hkd5a4\" data-start=\"5648\" data-end=\"5676\">\u010casto kladen\u00e9 ot\u00e1zky<\/h1>\n<p data-start=\"5678\" data-end=\"5831\">1. K \u010demu se tenkovrstv\u00fd niob\u00e1t lithn\u00fd pou\u017e\u00edv\u00e1<br data-start=\"5720\" data-end=\"5723\" \/>Pou\u017e\u00edv\u00e1 se v integrovan\u00e9 fotonice, optick\u00e9 komunikaci, kvantov\u00e9 fotonice a v za\u0159\u00edzen\u00edch pro neline\u00e1rn\u00ed optiku.<\/p>\n<p data-start=\"5833\" data-end=\"5990\">2. Jak\u00e1 je obvykl\u00e1 tlou\u0161\u0165ka tenk\u00e9 vrstvy niob\u00e1tu lithn\u00e9ho?<br data-start=\"5895\" data-end=\"5898\" \/>Tlou\u0161\u0165ka vrstvy se obvykle pohybuje v rozmez\u00ed 300 nm a\u017e 1000 nm v z\u00e1vislosti na po\u017eadavc\u00edch dan\u00e9ho za\u0159\u00edzen\u00ed.<\/p>\n<p data-start=\"5992\" data-end=\"6164\">3. Jak\u00e9 jsou v\u00fdhody LNOI oproti hromadn\u011b vyr\u00e1b\u011bn\u00e9mu niob\u00e1tu lithn\u00e9mu?<br data-start=\"6049\" data-end=\"6052\" \/>Technologie LNOI umo\u017e\u0148uje ni\u017e\u0161\u00ed optick\u00e9 ztr\u00e1ty, vy\u0161\u0161\u00ed integra\u010dn\u00ed hustotu a kompatibilitu s platformami k\u0159em\u00edkov\u00e9 fotoniky.<\/p>\n<p data-start=\"6166\" data-end=\"6290\">4. Je LNOI kompatibiln\u00ed se silikonovou fotonikou?<br data-start=\"6207\" data-end=\"6210\" \/>Ano, technologii LNOI lze integrovat do fotonick\u00fdch platforem na b\u00e1zi k\u0159em\u00edku a nitridu k\u0159em\u00edku.<\/p>","protected":false},"excerpt":{"rendered":"<p data-start=\"603\" data-end=\"732\">Tenkovrstv\u00e9 desti\u010dky z niob\u00e1tu lithn\u00e9ho na izol\u00e1toru (LNOI) jsou speci\u00e1ln\u011b vyvinut\u00e9 substr\u00e1ty pro integrovan\u00e1 fotonick\u00e1 a elektrooptick\u00e1 za\u0159\u00edzen\u00ed.<\/p>\n<p data-start=\"734\" data-end=\"893\">Platforma se skl\u00e1d\u00e1 z tenk\u00e9 vrstvy monokrystalick\u00e9ho niob\u00e1tu lithn\u00e9ho nanesen\u00e9 na vrstvu zakryt\u00e9 oxidov\u00e9 vrstvy (SiO\u2082), kter\u00e1 je upevn\u011bna na k\u0159em\u00edkov\u00e9m nebo izola\u010dn\u00edm nosn\u00e9m substr\u00e1tu.<\/p>\n<p data-start=\"895\" data-end=\"1094\">Tato struktura umo\u017e\u0148uje siln\u00e9 optick\u00e9 omezen\u00ed, sn\u00ed\u017een\u00e9 ztr\u00e1ty p\u0159i \u0161\u00ed\u0159en\u00ed a vysokou elektrooptickou \u00fa\u010dinnost, co\u017e z n\u00ed \u010din\u00ed jednu z nejd\u016fle\u017eit\u011bj\u0161\u00edch materi\u00e1lov\u00fdch platforem pro modern\u00ed integrovanou fotoniku.<\/p>","protected":false},"featured_media":2887,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[155],"product_tag":[1189,1190,1186,1185,855,1183,1187,1188,1184,858],"class_list":["post-2883","product","type-product","status-publish","has-post-thumbnail","product_cat-semiconductor-wafer","product_tag-6-inch-lnoi-wafer","product_tag-8-inch-photonic-wafer","product_tag-electro-optic-modulator-wafer","product_tag-integrated-photonics-substrate","product_tag-lithium-niobate-on-insulator","product_tag-lnoi-wafer","product_tag-optical-communication-photonics","product_tag-quantum-photonics-material","product_tag-tfln-photonics-platform","product_tag-thin-film-lithium-niobate","desktop-align-left","tablet-align-left","mobile-align-left","ast-product-gallery-layout-horizontal","ast-product-tabs-layout-horizontal","first","instock","shipping-taxable","product-type-simple"],"_links":{"self":[{"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/product\/2883","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/comments?post=2883"}],"version-history":[{"count":4,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/product\/2883\/revisions"}],"predecessor-version":[{"id":2890,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/product\/2883\/revisions\/2890"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/media\/2887"}],"wp:attachment":[{"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/media?parent=2883"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/product_brand?post=2883"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/product_cat?post=2883"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/product_tag?post=2883"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}