{"id":2563,"date":"2026-03-23T01:52:35","date_gmt":"2026-03-23T01:52:35","guid":{"rendered":"https:\/\/www.fuyao-quartz.com\/?post_type=product&p=2563"},"modified":"2026-03-23T01:52:37","modified_gmt":"2026-03-23T01:52:37","slug":"custom-high-borosilicate-glass-wafers-for-mems-semiconductor-optical-applications","status":"publish","type":"product","link":"https:\/\/www.fuyao-quartz.com\/cs\/product\/custom-high-borosilicate-glass-wafers-for-mems-semiconductor-optical-applications\/","title":{"rendered":"Zak\u00e1zkov\u00e9 desky z vysoce borosilik\u00e1tov\u00e9ho skla pro MEMS, polovodi\u010de a optick\u00e9 aplikace (2-12\u201d)"},"content":{"rendered":"

St\u0159\u00edpky z vysoce borosilik\u00e1tov\u00e9ho skla (3.3)<\/span><\/h2>\n

Desky z vysoce borosilik\u00e1tov\u00e9ho skla jsou p\u0159esn\u00e9 substr\u00e1ty, kter\u00e9 se \u0161iroce pou\u017e\u00edvaj\u00ed v polovodi\u010dov\u00fdch, MEMS a optick\u00fdch aplikac\u00edch. Tyto desti\u010dky jsou zn\u00e1m\u00e9 sv\u00fdm n\u00edzk\u00fdm koeficientem tepeln\u00e9 rozta\u017enosti (~3,3 \u00d7 10-\u2076\/K), vynikaj\u00edc\u00ed chemickou stabilitou a vysokou pr\u016fhlednost\u00ed a p\u0159edstavuj\u00ed spolehlivou a cenov\u011b v\u00fdhodnou alternativu k materi\u00e1l\u016fm, jako je taven\u00fd oxid k\u0159emi\u010dit\u00fd a k\u0159emen, v prost\u0159ed\u00ed se st\u0159edn\u00ed teplotou.<\/p>\n

Borosilik\u00e1tov\u00e9 desti\u010dky, vyr\u00e1b\u011bn\u00e9 procesem plaven\u00e9ho skla, se vyzna\u010duj\u00ed rovnom\u011brnou tlou\u0161\u0165kou, vynikaj\u00edc\u00ed rovinnost\u00ed a n\u00edzk\u00fdm vnit\u0159n\u00edm pnut\u00edm, tak\u017ee jsou ide\u00e1ln\u00ed pro vysoce p\u0159esn\u00e9 procesy mikrofabrikace a lepen\u00ed.<\/p>\n

\"\"<\/p>\n

Slo\u017een\u00ed kl\u00ed\u010dov\u00fdch materi\u00e1l\u016f<\/span><\/h2>\n

Vysoce borosilik\u00e1tov\u00e9 sklo se obvykle skl\u00e1d\u00e1 z:<\/p>\n

    \n
  • Oxid k\u0159emi\u010dit\u00fd (SiO\u2082): ~75-80%<\/li>\n
  • Trioxid boru (B\u2082O\u2083): ~12-15%<\/li>\n
  • Oxid hlinit\u00fd (Al\u2082O\u2083): mal\u00e9 procento<\/li>\n
  • Oxidy n\u00edzkoalkalick\u00fdch kov\u016f (<5%)<\/li>\n<\/ul>\n

    Toto optimalizovan\u00e9 slo\u017een\u00ed zaji\u0161\u0165uje vy\u0161\u0161\u00ed tepelnou stabilitu a chemickou odolnost ve srovn\u00e1n\u00ed s b\u011b\u017en\u00fdm sodnov\u00e1penat\u00fdm sklem.<\/p>\n

    Hlavn\u00ed v\u00fdhody<\/span><\/h2>\n

    Borosilik\u00e1tov\u00e9 sklen\u011bn\u00e9 desti\u010dky maj\u00ed n\u011bkolik v\u00fdhod:<\/p>\n

      \n
    • N\u00edzk\u00e1 tepeln\u00e1 rozta\u017enost - ide\u00e1ln\u00ed pro lepen\u00ed k\u0159em\u00edku a struktury MEMS<\/li>\n
    • Vynikaj\u00edc\u00ed odolnost proti teplotn\u00edm \u0161ok\u016fm - \u0394T a\u017e ~120-150 \u00b0C (v z\u00e1vislosti na tlou\u0161\u0165ce)<\/li>\n
    • Vysok\u00e1 optick\u00e1 pr\u016fhlednost - vhodn\u00e9 pro optick\u00e9 a fotonick\u00e9 aplikace<\/li>\n
    • Siln\u00e1 chemick\u00e1 odolnost - odoln\u00fd v\u016f\u010di kyselin\u00e1m a v\u011bt\u0161in\u011b chemik\u00e1li\u00ed<\/li>\n
    • Vysok\u00e1 rovinnost a kvalita povrchu - podporuje v\u00fdrobu v mikro- a nano-rozm\u011brech<\/li>\n
    • Cenov\u00e1 v\u00fdhodnost - pro mnoho aplikac\u00ed je ekonomi\u010dt\u011bj\u0161\u00ed ne\u017e k\u0159emen nebo taven\u00fd oxid k\u0159emi\u010dit\u00fd.<\/li>\n<\/ul>\n

      V\u00fdrobn\u00ed proces<\/span><\/h2>\n

      Borosilik\u00e1tov\u00e9 desti\u010dky se vyr\u00e1b\u011bj\u00ed metodou plaven\u00e9ho skla, kdy roztaven\u00e9 sklo te\u010de p\u0159es l\u00e1ze\u0148 roztaven\u00e9ho c\u00ednu a vytv\u00e1\u0159\u00ed hladk\u00fd, stejnom\u011brn\u00fd pl\u00e1t. Materi\u00e1l se pot\u00e9:<\/p>\n

        \n
      1. postupn\u00e9 ochlazov\u00e1n\u00ed (\u017e\u00edh\u00e1n\u00ed) pro odstran\u011bn\u00ed vnit\u0159n\u00edho pnut\u00ed<\/li>\n
      2. \u0158ez\u00e1n\u00ed na ur\u010den\u00e9 rozm\u011bry pl\u00e1tk\u016f<\/li>\n
      3. P\u0159esn\u00e9 brou\u0161en\u00ed a le\u0161t\u011bn\u00ed (jednostrann\u00e9 nebo oboustrann\u00e9)<\/li>\n<\/ol>\n

        \"\"<\/p>\n

        Tento proces zaji\u0161\u0165uje vynikaj\u00edc\u00ed kvalitu povrchu, p\u0159\u00edsnou kontrolu tlou\u0161\u0165ky a n\u00edzkou hustotu defekt\u016f.<\/p>\n

        Specifikace<\/span><\/h2>\n
        \n
        \n\n\n\n\n\n\n\n\n\n\n
        Parametr<\/th>\nRozsah \/ mo\u017enosti<\/th>\n<\/tr>\n<\/thead>\n
        Pr\u016fm\u011br<\/td>\n2\u201d - 12\u201d<\/td>\n<\/tr>\n
        Tlou\u0161\u0165ka<\/td>\n0,2 - 1,1 mm (na zak\u00e1zku)<\/td>\n<\/tr>\n
        Povrch<\/td>\nSSP \/ DSP<\/td>\n<\/tr>\n
        Drsnost<\/td>\nRa < 1,5 nm<\/td>\n<\/tr>\n
        Plochost (TTV)<\/td>\n< 10 \u00b5m (typicky)<\/td>\n<\/tr>\n
        Tvar<\/td>\nKulat\u00e9 \/ \u010dtvercov\u00e9 \/ vlastn\u00ed<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

        Typick\u00e9 aplikace<\/span><\/h2>\n

        1. Polovodi\u010de a MEMS<\/span><\/h3>\n
          \n
        • Lepen\u00ed k\u0159em\u00edkov\u00fdch desti\u010dek (anodick\u00e9 lepen\u00ed)<\/li>\n
        • Za\u0159\u00edzen\u00ed MEMS a mikrosenzory<\/li>\n
        • Substr\u00e1ty pro balen\u00ed integrovan\u00fdch obvod\u016f<\/li>\n<\/ul>\n

          2. Mikrofluidika a biotechnologie<\/span><\/h3>\n
            \n
          • Za\u0159\u00edzen\u00ed typu \"laborato\u0159 na \u010dipu<\/li>\n
          • Mikrofluidn\u00ed kan\u00e1ly<\/li>\n
          • Platformy pro biomedic\u00ednskou anal\u00fdzu<\/li>\n<\/ul>\n

            3. Optick\u00e9 a fotonick\u00e9 syst\u00e9my<\/span><\/h3>\n
              \n
            • Optick\u00e1 okna a substr\u00e1ty<\/li>\n
            • Sou\u010d\u00e1sti \u010do\u010dek a hranol\u016f<\/li>\n
            • Pr\u016fhledn\u00e9 nosn\u00e9 desti\u010dky<\/li>\n<\/ul>\n

              4. Pr\u016fmyslov\u00e1 a v\u011bdeck\u00e1 za\u0159\u00edzen\u00ed<\/span><\/h3>\n
                \n
              • Pozorovac\u00ed okna pro vysok\u00e9 teploty<\/li>\n
              • Laboratorn\u00ed vybaven\u00ed a analytick\u00e9 p\u0159\u00edstroje<\/li>\n<\/ul>\n

                Srovn\u00e1n\u00ed: Borosilik\u00e1tov\u00e9 sklo vs. sodnov\u00e1penat\u00e9 sklo<\/span><\/h2>\n
                \n
                \n\n\n\n\n\n\n\n\n\n
                Majetek<\/th>\nBorosilik\u00e1tov\u00e9 sklo<\/th>\nSklenice na sodovku a v\u00e1pno<\/th>\n<\/tr>\n<\/thead>\n
                Tepeln\u00e1 rozta\u017enost<\/td>\nN\u00edzk\u00e1 (~3,3\u00d710-\u2076\/K)<\/td>\nVysok\u00e1<\/td>\n<\/tr>\n
                Odolnost proti teplotn\u00edm \u0161ok\u016fm<\/td>\nVynikaj\u00edc\u00ed<\/td>\n\u0160patn\u00fd<\/td>\n<\/tr>\n
                Chemick\u00e1 odolnost<\/td>\nVysok\u00e1<\/td>\nM\u00edrn\u00e1<\/td>\n<\/tr>\n
                N\u00e1klady<\/td>\nSt\u0159edn\u00ed<\/td>\nN\u00edzk\u00e1<\/td>\n<\/tr>\n
                Aplikace<\/td>\nMEMS, optika, laborato\u0159<\/td>\nL\u00e1hve, okna<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

                Pro\u010d si vybrat na\u0161e borosilik\u00e1tov\u00e9 sklen\u011bn\u00e9 pl\u00e1tky?<\/span><\/h2>\n
                  \n
                • Stabiln\u00ed dod\u00e1vky od p\u0159edn\u00edch v\u00fdrobc\u016f skla<\/li>\n
                • P\u0159esn\u00e9 obr\u00e1b\u011bn\u00ed a le\u0161t\u011bn\u00ed<\/li>\n
                • K dispozici jsou vlastn\u00ed velikosti, tlou\u0161\u0165ky a povrchov\u00e9 \u00fapravy<\/li>\n
                • P\u0159\u00edsn\u00e1 kontrola kvality a balen\u00ed do \u010dist\u00fdch prostor (t\u0159\u00edda 100 \/ ISO 5)<\/li>\n
                • Rychl\u00e9 dod\u00e1n\u00ed pro standardn\u00ed specifikace<\/li>\n<\/ul>\n

                  \u010cASTO KLADEN\u00c9 DOTAZY<\/span><\/h2>\n

                  \"\"Ot\u00e1zka 1: Co je to borosilik\u00e1tov\u00e9 sklo 3.3?
                  Odpov\u011b\u010f: Jedn\u00e1 se o borosilik\u00e1tov\u00e9 sklo s koeficientem tepeln\u00e9 rozta\u017enosti p\u0159ibli\u017en\u011b 3,3 \u00d7 10-\u2076\/K, kter\u00e9 je zn\u00e1m\u00e9 svou vynikaj\u00edc\u00ed tepelnou stabilitou.<\/p>\n

                  Ot\u00e1zka 2: Mohou desti\u010dky z borok\u0159emi\u010dit\u00e9ho skla nahradit k\u0159emenn\u00e9 desti\u010dky?
                  Odpov\u011b\u010f: Mohou slou\u017eit jako cenov\u011b v\u00fdhodn\u00e1 alternativa v aplikac\u00edch p\u0159i st\u0159edn\u00edch teplot\u00e1ch, ale k\u0159emen je st\u00e1le preferov\u00e1n pro prost\u0159ed\u00ed s extr\u00e9mn\u011b vysok\u00fdmi teplotami.<\/p>\n

                  Ot\u00e1zka 3: Jak\u00fd je rozd\u00edl mezi desti\u010dkami z borosilik\u00e1tov\u00e9ho skla a k\u0159emenn\u00fdmi desti\u010dkami?
                  Odpov\u011b\u010f: Desky z borosilik\u00e1tov\u00e9ho skla nab\u00edzej\u00ed cenov\u011b v\u00fdhodn\u011bj\u0161\u00ed \u0159e\u0161en\u00ed s dobrou tepelnou stabilitou a chemickou odolnost\u00ed, tak\u017ee jsou ide\u00e1ln\u00ed pro MEMS a obecn\u00e9 polovodi\u010dov\u00e9 aplikace. K\u0159emenn\u00e9 desti\u010dky naproti tomu poskytuj\u00ed vynikaj\u00edc\u00ed odolnost v\u016f\u010di vysok\u00fdm teplot\u00e1m a propustnost UV z\u00e1\u0159en\u00ed a jsou preferov\u00e1ny pro extr\u00e9mn\u00ed prost\u0159ed\u00ed a pokro\u010dil\u00e9 optick\u00e9 syst\u00e9my.<\/p>\n

                  Ot\u00e1zka 4: Mohou b\u00fdt desti\u010dky z borosilik\u00e1tov\u00e9ho skla pou\u017eity pro anodick\u00e9 spojov\u00e1n\u00ed s k\u0159em\u00edkem?
                  Odpov\u011b\u010f: Ano, desti\u010dky z borosilik\u00e1tov\u00e9ho skla 3.3 se \u0161iroce pou\u017e\u00edvaj\u00ed k anodick\u00e9mu spojov\u00e1n\u00ed s k\u0159em\u00edkem d\u00edky sv\u00e9mu bl\u00edzk\u00e9mu koeficientu tepeln\u00e9 rozta\u017enosti. To zaji\u0161\u0165uje pevnost spojen\u00ed a minimalizuje tepeln\u00e9 nam\u00e1h\u00e1n\u00ed p\u0159i v\u00fdrob\u011b MEMS a mikrofluidn\u00edch za\u0159\u00edzen\u00ed.<\/p>\n

                  Ot\u00e1zka 5: Jak\u00e9 mo\u017enosti p\u0159izp\u016fsoben\u00ed jsou k dispozici pro desti\u010dky z borosilik\u00e1tov\u00e9ho skla?
                  Odpov\u011b\u010f: Nab\u00edz\u00edme \u0161irokou \u0161k\u00e1lu mo\u017enost\u00ed p\u0159izp\u016fsoben\u00ed, v\u010detn\u011b pr\u016fm\u011bru desti\u010dky (2\u201d-12\u201d), tlou\u0161\u0165ky, jednostrann\u00e9ho nebo oboustrann\u00e9ho le\u0161t\u011bn\u00ed (SSP\/DSP), drsnosti povrchu, rovinnosti (TTV) a vlastn\u00edch tvar\u016f, jako jsou \u010dtvercov\u00e9 nebo obd\u00e9ln\u00edkov\u00e9 substr\u00e1ty. Na vy\u017e\u00e1d\u00e1n\u00ed lze rovn\u011b\u017e podporovat speci\u00e1ln\u00ed po\u017eadavky na povrchovou \u00fapravu, vrt\u00e1n\u00ed nebo vzorov\u00e1n\u00ed.<\/p>","protected":false},"excerpt":{"rendered":"

                  Desky z vysoce borosilik\u00e1tov\u00e9ho skla jsou p\u0159esn\u00e9 substr\u00e1ty, kter\u00e9 se \u0161iroce pou\u017e\u00edvaj\u00ed v polovodi\u010dov\u00fdch, MEMS a optick\u00fdch aplikac\u00edch. Tyto desti\u010dky jsou zn\u00e1m\u00e9 sv\u00fdm n\u00edzk\u00fdm koeficientem tepeln\u00e9 rozta\u017enosti (~3,3 \u00d7 10-\u2076\/K), vynikaj\u00edc\u00ed chemickou stabilitou a vysokou pr\u016fhlednost\u00ed a p\u0159edstavuj\u00ed spolehlivou a cenov\u011b v\u00fdhodnou alternativu k materi\u00e1l\u016fm, jako je taven\u00fd oxid k\u0159emi\u010dit\u00fd a k\u0159emen, v prost\u0159ed\u00ed se st\u0159edn\u00ed teplotou.<\/p>","protected":false},"featured_media":2564,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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