{"id":3037,"date":"2026-06-08T08:41:10","date_gmt":"2026-06-08T08:41:10","guid":{"rendered":"https:\/\/www.fuyao-quartz.com\/?p=3037"},"modified":"2026-06-08T08:41:18","modified_gmt":"2026-06-08T08:41:18","slug":"semiconductor-grade-quartz-requirements-standards-and-material-selection-guide","status":"publish","type":"post","link":"https:\/\/www.fuyao-quartz.com\/cs\/semiconductor-grade-quartz-requirements-standards-and-material-selection-guide\/","title":{"rendered":"K\u0159emen pro polovodi\u010dov\u00e9 \u00fa\u010dely: Po\u017eadavky, normy a pr\u016fvodce v\u00fdb\u011brem materi\u00e1lu"},"content":{"rendered":"<p class=\"wp-block-paragraph\">K\u0159emen je jedn\u00edm z nejd\u016fle\u017eit\u011bj\u0161\u00edch materi\u00e1l\u016f pou\u017e\u00edvan\u00fdch p\u0159i v\u00fdrob\u011b polovodi\u010d\u016f. \u0160iroce se vyu\u017e\u00edv\u00e1 v dif\u00fazn\u00edch pec\u00edch, oxida\u010dn\u00edch syst\u00e9mech, za\u0159\u00edzen\u00edch pro chemickou depozici z plynn\u00e9 f\u00e1ze (CVD), nosi\u010d\u00edch desti\u010dek, procesn\u00edch komor\u00e1ch, syst\u00e9mech optick\u00e9 kontroly a sou\u010d\u00e1stech pro manipulaci s chemik\u00e1liemi.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Ne v\u0161echny k\u0159emenn\u00e9 materi\u00e1ly jsou v\u0161ak vhodn\u00e9 pro pou\u017eit\u00ed v polovodi\u010dov\u00e9m pr\u016fmyslu. V z\u00e1vislosti na procesn\u00edm prost\u0159ed\u00ed mohou k\u0159emenn\u00e9 sou\u010d\u00e1sti vy\u017eadovat r\u016fzn\u00e9 \u00farovn\u011b \u010distoty, tepeln\u00e9 stability, obsahu hydroxylov\u00fdch skupin, optick\u00fdch vlastnost\u00ed a rozm\u011brov\u00e9 p\u0159esnosti.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">V\u00fdb\u011br vhodn\u00e9ho k\u0159emenn\u00e9ho materi\u00e1lu m\u00e1 z\u00e1sadn\u00ed v\u00fdznam pro minimalizaci kontaminace, zaji\u0161t\u011bn\u00ed stability procesu a maximalizaci v\u00fdt\u011b\u017enosti desti\u010dek.<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"683\" src=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/06\/Semiconductor-Grade-Quartz-Requirements-Standards-and-Material-Selection-Guide-1024x683.png\" alt=\"\" class=\"wp-image-3038\" srcset=\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/06\/Semiconductor-Grade-Quartz-Requirements-Standards-and-Material-Selection-Guide-1024x683.png 1024w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/06\/Semiconductor-Grade-Quartz-Requirements-Standards-and-Material-Selection-Guide-300x200.png 300w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/06\/Semiconductor-Grade-Quartz-Requirements-Standards-and-Material-Selection-Guide-768x512.png 768w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/06\/Semiconductor-Grade-Quartz-Requirements-Standards-and-Material-Selection-Guide-18x12.png 18w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/06\/Semiconductor-Grade-Quartz-Requirements-Standards-and-Material-Selection-Guide-600x400.png 600w, https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/06\/Semiconductor-Grade-Quartz-Requirements-Standards-and-Material-Selection-Guide.png 1536w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h1 class=\"wp-block-heading\">Pro\u010d se p\u0159i v\u00fdrob\u011b polovodi\u010d\u016f vyu\u017e\u00edv\u00e1 k\u0159i\u0161\u0165\u00e1l vysok\u00e9 \u010distoty<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">V\u00fdroba polovodi\u010d\u016f zahrnuje \u0159adu proces\u016f prob\u00edhaj\u00edc\u00edch za extr\u00e9mn\u00edch podm\u00ednek:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Vysok\u00e9 teploty p\u0159esahuj\u00edc\u00ed 1000 \u00b0C<\/li>\n\n\n\n<li>Korozivn\u00ed procesn\u00ed plyny<\/li>\n\n\n\n<li>Reaktivn\u00ed chemik\u00e1lie<\/li>\n\n\n\n<li>Vysoce \u010dist\u00e1 v\u00fdrobn\u00ed prost\u0159ed\u00ed<\/li>\n\n\n\n<li>Struktury za\u0159\u00edzen\u00ed v nanometrov\u00e9m m\u011b\u0159\u00edtku<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Za t\u011bchto podm\u00ednek m\u016f\u017ee v\u00fdkon za\u0159\u00edzen\u00ed ovlivnit i stopov\u00e9 zne\u010di\u0161t\u011bn\u00ed poch\u00e1zej\u00edc\u00ed z materi\u00e1l\u016f, z nich\u017e je za\u0159\u00edzen\u00ed vyrobeno.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">V d\u016fsledku toho v\u00fdrobci polovodi\u010d\u016f obvykle pou\u017e\u00edvaj\u00ed <a href=\"https:\/\/www.fuyao-quartz.com\/cs\/products\/\">vysoce \u010dist\u00fd taven\u00fd k\u0159emen<\/a> nebo syntetick\u00fd taven\u00fd k\u0159emen nam\u00edsto b\u011b\u017en\u00e9ho pr\u016fmyslov\u00e9ho k\u0159emene.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">1. Extr\u00e9mn\u011b n\u00edzk\u00e1 \u00farove\u0148 kovov\u00e9 kontaminace<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">\u010cistota materi\u00e1lu je jedn\u00edm z nejd\u016fle\u017eit\u011bj\u0161\u00edch po\u017eadavk\u016f kladen\u00fdch na k\u0159emen pro polovodi\u010dov\u00e9 \u00fa\u010dely.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">P\u0159i zpracov\u00e1n\u00ed za vysok\u00fdch teplot mohou do desti\u010dek pronikat kovov\u00e9 ne\u010distoty, co\u017e m\u016f\u017ee m\u00edt vliv na jejich elektrick\u00e9 vlastnosti.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Zvl\u00e1\u0161tn\u00ed pozornost je v\u011bnov\u00e1na:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Hlin\u00edk (Al)<\/li>\n\n\n\n<li>\u017delezo (Fe)<\/li>\n\n\n\n<li>V\u00e1pn\u00edk (Ca)<\/li>\n\n\n\n<li>Ho\u0159\u010d\u00edk (Mg)<\/li>\n\n\n\n<li>Titan (Ti)<\/li>\n\n\n\n<li>Sod\u00edk (Na)<\/li>\n\n\n\n<li>Drasl\u00edk (K)<\/li>\n\n\n\n<li>Lithium (Li)<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">M\u00edsto toho, aby se \u0159\u00eddily jedinou univerz\u00e1ln\u00ed specifikac\u00ed, jsou limity ne\u010distot obvykle stanoveny v\u00fdrobcem polovodi\u010dov\u00e9ho procesu a za\u0159\u00edzen\u00ed.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">U pokro\u010dil\u00fdch aplikac\u00ed v oblasti polovodi\u010d\u016f se koncentrace ne\u010distot \u010dasto reguluj\u00ed na \u00farovni ppm nebo pod \u00farovn\u00ed ppm.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">2. Vynikaj\u00edc\u00ed vlastnosti p\u0159i vysok\u00fdch teplot\u00e1ch<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">Mnoh\u00e9 procesy p\u0159i v\u00fdrob\u011b polovodi\u010d\u016f prob\u00edhaj\u00ed p\u0159i teplot\u00e1ch v rozmez\u00ed 800 \u00b0C a\u017e 1200 \u00b0C.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">K\u0159emen se hojn\u011b pou\u017e\u00edv\u00e1, proto\u017ee nab\u00edz\u00ed:<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>Majetek<\/th><th>Typick\u00e1 hodnota<\/th><\/tr><\/thead><tbody><tr><td>Bod m\u011bknut\u00ed<\/td><td>P\u0159ibli\u017en\u011b 1730 \u00b0C<\/td><\/tr><tr><td>Trval\u00e1 provozn\u00ed teplota<\/td><td>A\u017e 1200 \u00b0C<\/td><\/tr><tr><td>Koeficient tepeln\u00e9 rozta\u017enosti<\/td><td>P\u0159ibli\u017en\u011b 0,5 \u00d7 10\u207b\u2076 \/\u00b0C<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p class=\"wp-block-paragraph\">D\u00edky mimo\u0159\u00e1dn\u011b n\u00edzk\u00e9mu koeficientu tepeln\u00e9 rozta\u017enosti se da\u0159\u00ed minimalizovat tepeln\u00e9 nap\u011bt\u00ed b\u011bhem cykl\u016f rychl\u00e9ho zah\u0159\u00edv\u00e1n\u00ed a ochlazov\u00e1n\u00ed.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Mezi b\u011b\u017en\u00e9 vysokoteplotn\u00ed k\u0159emenn\u00e9 sou\u010d\u00e1stky pat\u0159\u00ed:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Trubky k\u0159emenn\u00e9 pece<\/li>\n\n\n\n<li>Lod\u011b z k\u0159emene<\/li>\n\n\n\n<li>Nosi\u010de desti\u010dek<\/li>\n\n\n\n<li>Vlo\u017eky do v\u00fdrobn\u00edch linek<\/li>\n\n\n\n<li>Podstavce<\/li>\n<\/ul>\n\n\n\n<h1 class=\"wp-block-heading\">3. Obsah hydroxylov\u00fdch skupin (OH) je d\u016fle\u017eit\u00fd<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">Jedn\u00edm z faktor\u016f, kter\u00fd se \u010dasto p\u0159ehl\u00ed\u017e\u00ed, je obsah hydroxylov\u00fdch skupin.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Koncentrace OH skupin m\u016f\u017ee v\u00fdznamn\u011b ovlivnit tepelnou stabilitu a optick\u00e9 vlastnosti propustnosti.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">K\u0159emen s n\u00edzk\u00fdm obsahem OH<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Obvykle se pou\u017e\u00edv\u00e1 pro:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Dif\u00fazn\u00ed pece<\/li>\n\n\n\n<li>Oxidace v pec\u00edch<\/li>\n\n\n\n<li>Procesy LPCVD<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">V\u00fdhody:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Zlep\u0161en\u00e1 tepeln\u00e1 stabilita<\/li>\n\n\n\n<li>Sn\u00ed\u017een\u00e1 deformace p\u0159i vysok\u00fdch teplot\u00e1ch<\/li>\n\n\n\n<li>Lep\u0161\u00ed propustnost infra\u010derven\u00e9ho z\u00e1\u0159en\u00ed<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">K\u0159emen s vysok\u00fdm obsahem OH<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Obvykle se pou\u017e\u00edv\u00e1 pro:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>UV optick\u00e9 syst\u00e9my<\/li>\n\n\n\n<li>Optick\u00e1 okna<\/li>\n\n\n\n<li>Laserov\u00e9 aplikace<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">V\u00fdhody:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Zv\u00fd\u0161en\u00e1 propustnost UV z\u00e1\u0159en\u00ed<\/li>\n\n\n\n<li>Vynikaj\u00edc\u00ed optick\u00fd v\u00fdkon<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">R\u016fzn\u00e1 pou\u017eit\u00ed polovodi\u010d\u016f vy\u017eaduj\u00ed r\u016fzn\u00e9 specifikace OH.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">4. Kontrola bublin a vm\u011bstk\u016f<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">Vnit\u0159n\u00ed bubliny a vm\u011bstky jsou kl\u00ed\u010dov\u00fdmi ukazateli kvality polovodi\u010dov\u00e9ho k\u0159emene.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">P\u0159\u00edli\u0161 vysok\u00e1 hustota bublin m\u016f\u017ee v\u00e9st k:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Vytv\u00e1\u0159en\u00ed \u010d\u00e1stic<\/li>\n\n\n\n<li>Sn\u00ed\u017een\u00e1 mechanick\u00e1 pevnost<\/li>\n\n\n\n<li>Lok\u00e1ln\u00ed tepeln\u00e9 nam\u00e1h\u00e1n\u00ed<\/li>\n\n\n\n<li>P\u0159ed\u010dasn\u00e1 porucha sou\u010d\u00e1sti<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">U kritick\u00fdch aplikac\u00ed v oblasti polovodi\u010d\u016f se k\u0159emenn\u00e9 materi\u00e1ly \u010dasto klasifikuj\u00ed podle hustoty bublin a obsahu inkluz\u00ed.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u0160pi\u010dkov\u00e1 za\u0159\u00edzen\u00ed pro v\u00fdrobu polovodi\u010d\u016f obecn\u011b vy\u017eaduj\u00ed extr\u00e9mn\u011b n\u00edzk\u00fd obsah bublin a vm\u011bstk\u016f.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">5. Chemick\u00e1 odolnost<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">K\u0159emen vykazuje vynikaj\u00edc\u00ed odolnost v\u016f\u010di v\u011bt\u0161in\u011b kyselin a procesn\u00edch chemik\u00e1li\u00ed pou\u017e\u00edvan\u00fdch p\u0159i v\u00fdrob\u011b polovodi\u010d\u016f.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">V n\u00e1sleduj\u00edc\u00edch prost\u0159ed\u00edch vykazuje dobr\u00e9 v\u00fdsledky:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Kyselina s\u00edrov\u00e1<\/li>\n\n\n\n<li>Kyselina dusi\u010dn\u00e1<\/li>\n\n\n\n<li>Kyselina chlorovod\u00edkov\u00e1<\/li>\n\n\n\n<li>Oxiduj\u00edc\u00ed chemik\u00e1lie<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">K\u0159emen v\u0161ak m\u016f\u017ee b\u00fdt napaden:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Kyselina fluorovod\u00edkov\u00e1 (HF)<\/li>\n\n\n\n<li>N\u011bkter\u00e1 siln\u011b alkalick\u00e1 roztoky p\u0159i zv\u00fd\u0161en\u00fdch teplot\u00e1ch<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Proto je nutn\u00e9 kompatibilitu materi\u00e1l\u016f v\u017edy posuzovat s ohledem na chemick\u00e9 slo\u017een\u00ed procesu, pro kter\u00fd jsou ur\u010deny.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">6. Rozm\u011brov\u00e1 p\u0159esnost a kvalita povrchu<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">V\u00fdroba polovodi\u010dov\u00fdch za\u0159\u00edzen\u00ed vy\u017eaduje vysoce p\u0159esn\u00e9 k\u0159emenn\u00e9 sou\u010d\u00e1stky.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Mezi typick\u00e9 po\u017eadavky mohou pat\u0159it:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Plochost<\/li>\n\n\n\n<li>Paralelismus<\/li>\n\n\n\n<li>Soust\u0159ednost<\/li>\n\n\n\n<li>Povrchov\u00e1 \u00faprava<\/li>\n\n\n\n<li>Kvalita hran<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Krom\u011b toho by povrchy nem\u011bly obsahovat:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0160kr\u00e1bance<\/li>\n\n\n\n<li>\u010cipsy<\/li>\n\n\n\n<li>Trhliny<\/li>\n\n\n\n<li>Ciz\u00ed vm\u011bstky<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Povrchov\u00e9 vady se mohou st\u00e1t zdrojem zne\u010di\u0161t\u011bn\u00ed a sn\u00ed\u017eit spolehlivost procesu.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">7. \u010cistota a kontrola \u010d\u00e1stic<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">P\u0159i modern\u00ed v\u00fdrob\u011b polovodi\u010d\u016f se klade st\u00e1le v\u011bt\u0161\u00ed d\u016fraz na kontrolu kontaminace.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">K\u0159emenn\u00e9 sou\u010d\u00e1sti \u010dasto proch\u00e1zej\u00ed:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>P\u0159esn\u00e9 obr\u00e1b\u011bn\u00ed<\/li>\n\n\n\n<li>\u010ci\u0161t\u011bn\u00ed kyselinou<\/li>\n\n\n\n<li>Ultrazvukov\u00e9 \u010di\u0161t\u011bn\u00ed<\/li>\n\n\n\n<li>Oplachov\u00e1n\u00ed vodou vysok\u00e9 \u010distoty<\/li>\n\n\n\n<li>Obaly pro \u010dist\u00e9 prostory<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Samotn\u00fd materi\u00e1l vysok\u00e9 \u010distoty nesta\u010d\u00ed, pokud nen\u00ed fin\u00e1ln\u00ed sou\u010d\u00e1stka zpracov\u00e1na a zabalena v souladu s po\u017eadavky na \u010distotu v polovodi\u010dov\u00e9m pr\u016fmyslu.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">B\u011b\u017en\u00e9 k\u0159emenn\u00e9 materi\u00e1ly pou\u017e\u00edvan\u00e9 p\u0159i v\u00fdrob\u011b polovodi\u010d\u016f<\/h1>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>Typ materi\u00e1lu<\/th><th>Typick\u00e9 aplikace<\/th><\/tr><\/thead><tbody><tr><td>Taven\u00fd k\u0159emen<\/td><td>Obecn\u00e9 sou\u010d\u00e1sti za\u0159\u00edzen\u00ed pro v\u00fdrobu polovodi\u010d\u016f<\/td><\/tr><tr><td>Taven\u00fd k\u0159emen vysok\u00e9 \u010distoty<\/td><td>Dif\u00fazn\u00ed a oxida\u010dn\u00ed syst\u00e9my<\/td><\/tr><tr><td>Syntetick\u00fd taven\u00fd k\u0159emen<\/td><td>Aplikace v oblasti optiky a fotolitografie<\/td><\/tr><tr><td>K\u0159emen s n\u00edzk\u00fdm obsahem OH<\/td><td>Komponenty vysokoteplotn\u00edch pec\u00ed<\/td><\/tr><tr><td>K\u0159emen s vysok\u00fdm obsahem OH<\/td><td>Sou\u010d\u00e1sti pro propustnost UV z\u00e1\u0159en\u00ed<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<h1 class=\"wp-block-heading\">Z\u00e1v\u011br<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\">Ne v\u0161echny k\u0159emenn\u00e9 materi\u00e1ly jsou vhodn\u00e9 pro v\u00fdrobu polovodi\u010d\u016f.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">V\u00fdb\u011br k\u0159emene pro polovodi\u010dov\u00e9 \u00fa\u010dely by m\u011bl vych\u00e1zet z \u0159ady faktor\u016f, mezi n\u011b\u017e pat\u0159\u00ed \u010distota, obsah hydroxylov\u00fdch skupin, tepeln\u00e1 stabilita, hustota bublin, chemick\u00e1 odolnost, rozm\u011brov\u00e1 p\u0159esnost a po\u017eadavky na \u010distotu.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Vzhledem k tomu, \u017ee ka\u017ed\u00fd polovodi\u010dov\u00fd proces klade na materi\u00e1l odli\u0161n\u00e9 po\u017eadavky, je v\u00fdb\u011br vhodn\u00e9 t\u0159\u00eddy k\u0159emene \u010dasto stejn\u011b d\u016fle\u017eit\u00fd jako volba spr\u00e1vn\u00e9 konstrukce sou\u010d\u00e1stky.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Pro v\u00fdrobce polovodi\u010dov\u00fdch za\u0159\u00edzen\u00ed a z\u00e1vody na v\u00fdrobu polovodi\u010dov\u00fdch desti\u010dek m\u016f\u017ee spr\u00e1vn\u00fd v\u00fdb\u011br k\u0159emenn\u00e9ho materi\u00e1lu v\u00fdrazn\u011b zlep\u0161it stabilitu v\u00fdrobn\u00edho procesu, sn\u00ed\u017eit riziko kontaminace a prodlou\u017eit \u017eivotnost komponent\u016f.<\/p>","protected":false},"excerpt":{"rendered":"<p>Quartz is one of the most important materials used throughout semiconductor manufacturing. It is widely employed in diffusion furnaces, oxidation systems, CVD equipment, wafer carriers, process chambers, optical inspection systems, and chemical handling components. However, not all quartz materials are suitable for semiconductor applications. Depending on the process environment, quartz components may require different levels [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":3038,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[1],"tags":[544,563,1169,676,1315,1166,764,1313,964,1312,1314,1145,1316,1317,79,1094,1085,561,525],"class_list":["post-3037","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-fused-quartz","tag-fused-silica","tag-high-oh-quartz","tag-high-purity-quartz-2","tag-high-temperature-quartz-2","tag-low-oh-quartz","tag-quartz-boat","tag-quartz-chamber-parts","tag-quartz-furnace-tube","tag-quartz-material-for-semiconductors","tag-quartz-processing-parts","tag-quartz-wafer-carrier","tag-semiconductor-equipment-materials","tag-semiconductor-furnace-components","tag-semiconductor-grade-quartz","tag-semiconductor-manufacturing-materials","tag-semiconductor-quartz","tag-semiconductor-quartz-components","tag-synthetic-fused-silica"],"_links":{"self":[{"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/posts\/3037","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/comments?post=3037"}],"version-history":[{"count":1,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/posts\/3037\/revisions"}],"predecessor-version":[{"id":3039,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/posts\/3037\/revisions\/3039"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/media\/3038"}],"wp:attachment":[{"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/media?parent=3037"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/categories?post=3037"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.fuyao-quartz.com\/cs\/wp-json\/wp\/v2\/tags?post=3037"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}